Batch-producible MEMS fiber-optic Fabry-Perot pressure sensor for high-temperature application.
Appl Opt
; 57(23): 6687-6692, 2018 Aug 10.
Article
in En
| MEDLINE
| ID: mdl-30129613
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Appl Opt
Year:
2018
Document type:
Article
Country of publication:
United States