1.
J Electron Microsc (Tokyo)
; 54(2): 119-21, 2005 Apr.
Artigo
em Inglês
| MEDLINE
| ID: mdl-15972729
RESUMO
We have successfully developed a spherical aberration (Cs)-corrected electron microscope for probe- and image-forming systems using hexapole correctors. The performance of the microscope has been evaluated experimentally. The point resolution attained using the image-forming Cs-corrector is better than 0.12 nm. For scanning transmission electron microscopy, the Ronchigram flat area was >40 mrad in half-angle using the probe-forming Cs-corrector.