Enabling rotary atomic layer deposition for optical applications.

Atomic layer deposition (ALD) has been proven as an excellent method for depositing high-quality optical coatings due to its outstanding film quality and precise process control. Unfortunately, batch ALD requires time-consuming purge steps, which leads to low deposition rates and highly time-intensive processes for complex multilayer coatings. Recently, rotary ALD has been proposed for optical applications. In this, to the best of our knowledge, novel concept, each process step takes place in a separate part of the reactor divided by pressure and nitrogen curtains. To be coated, substrates are rotated through these zones. During each rotation, an ALD cycle is completed, and the deposition rate depends primarily on the rotation speed. In this work, the performance of a novel rotary ALD coating tool for optical applications is investigated and characterized with S i O 2 and T a 2 O 5 layers. Low absorption levels of <3.1p p m and <6.0p p m are demonstrated at 1064 nm for around 186.2 nm thick single layers of T a 2 O 5 and 1032 nm S i O 2, respectively. Growth rates up to 0.18 nm/s on fused silica substrates were achieved. Furthermore, excellent non-uniformity is also demonstrated, with values reaching as low as ±0.53% and ±1.07% over an area of 135×60m m for T a 2 O 5 and S i O 2, respectively.

Layout optimization for flexographically printed optical networks.

Optical networks can carry significantly higher data rates than their equivalent electrical systems. Because of their unique properties and constraints, optical networks have their own design rules. In this paper, an algorithm for the optimization of optical networks is presented. In addition, an optimized optical decimal-binary converter is flexographically manufactured and examined for its transmission properties. It is verified that optimization can minimize attenuation by several orders of magnitude, and points of high optical losses can also be predicted and adjusted.

Approach for the production chain of printed polymer optical waveguides-an overview.

Research for new production chains in the field of waveguide fabrication is a challenging task. Realizing a cost efficient manufacturing process allows integrating optical data communication in arbitrary structures, for example, the wing of an airplane or the body of a car. The production chain described in this paper contains the design, simulation, and fabrication process of printed polymer optical waveguides (POWs).