Separation of Neighboring Terraces on a Flattened Si(111) Surface by Selective Etching along Step Edges Using Total Wet Chemical Processing.

Ma, Zhida; Masumoto, Seiya; Kawai, Kentaro; Yamamura, Kazuya; Arima, Kenta

Ma, Zhida; Masumoto, Seiya; Kawai, Kentaro; Yamamura, Kazuya; Arima, Kenta.

Afiliação

Ma Z; Department of Precision Engineering, Graduate School of Engineering, Osaka University, 2-1, Yamada-oka, Suita, Osaka 565-0871, Japan.
Masumoto S; Department of Precision Engineering, Graduate School of Engineering, Osaka University, 2-1, Yamada-oka, Suita, Osaka 565-0871, Japan.
Kawai K; Department of Precision Engineering, Graduate School of Engineering, Osaka University, 2-1, Yamada-oka, Suita, Osaka 565-0871, Japan.
Yamamura K; Department of Precision Engineering, Graduate School of Engineering, Osaka University, 2-1, Yamada-oka, Suita, Osaka 565-0871, Japan.
Arima K; Research Center for Precision Engineering, Graduate School of Engineering, Osaka University, 2-1, Yamada-oka, Suita, Osaka 565-0871, Japan.

Langmuir ; 38(12): 3748-3754, 2022 Mar 29.

Article em En | MEDLINE | ID: mdl-35298169

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Langmuir Assunto da revista: QUIMICA Ano de publicação: 2022 Tipo de documento: Article País de afiliação: Japão

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