Assessing the Impact of Secondary Fluorescence on X-Ray Microanalysis Results from Semiconductor Thin Films.

Hunter, Daniel A; Lavery, Samuel P; Edwards, Paul R; Martin, Robert W

Hunter, Daniel A; Lavery, Samuel P; Edwards, Paul R; Martin, Robert W.

Afiliação

Hunter DA; Department of Physics, SUPA, University of Strathclyde, Glasgow G4 0NG, UK.
Lavery SP; Department of Physics, SUPA, University of Strathclyde, Glasgow G4 0NG, UK.
Edwards PR; Department of Physics, SUPA, University of Strathclyde, Glasgow G4 0NG, UK.
Martin RW; Department of Physics, SUPA, University of Strathclyde, Glasgow G4 0NG, UK.

Microsc Microanal ; : 1-12, 2022 May 25.

Article em En | MEDLINE | ID: mdl-35611839

Palavras-chave

DTSA-II; X-ray microanalysis; secondary fluorescence; semiconductors; wavelength-dispersive X-ray spectroscopy

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Microsc Microanal Ano de publicação: 2022 Tipo de documento: Article País de afiliação: Reino Unido

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