Vertical and Lateral Etch Survey of Ferroelectric AlN/Al<sub>1-x</sub>Sc<sub>x</sub>N in Aqueous KOH Solutions.

Tang, Zichen; Esteves, Giovanni; Zheng, Jeffrey; Olsson, Roy H

Vertical and Lateral Etch Survey of Ferroelectric AlN/Al_1-xSc_xN in Aqueous KOH Solutions.

Tang, Zichen; Esteves, Giovanni; Zheng, Jeffrey; Olsson, Roy H.

Afiliação

Tang Z; Electrical and Systems Engineering Department, University of Pennsylvania, Philadelphia, PA 19104, USA.
Esteves G; Microsystems Engineering, Science and Applications (MESA), Sandia National Laboratories, Albuquerque, NM 87123, USA.
Zheng J; Material Science and Engineering Department, University of Pennsylvania, Philadelphia, PA 19104, USA.
Olsson RH; Electrical and Systems Engineering Department, University of Pennsylvania, Philadelphia, PA 19104, USA.

Micromachines (Basel) ; 13(7)2022 Jul 02.

Article em En | MEDLINE | ID: mdl-35888883

Palavras-chave

aluminum nitride (AlN); aluminum scandium nitride (AlScN); ferroelectric; potassium hydroxide (KOH); wet etch

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Micromachines (Basel) Ano de publicação: 2022 Tipo de documento: Article País de afiliação: Estados Unidos

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