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Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments.
Wu, Chen; Fang, Xudong; Kang, Qiang; Fang, Ziyan; Wu, Junxia; He, Hongtao; Zhang, Dong; Zhao, Libo; Tian, Bian; Maeda, Ryutaro; Jiang, Zhuangde.
Afiliação
  • Wu C; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049 China.
  • Fang X; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049 China.
  • Kang Q; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049 China.
  • Fang Z; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049 China.
  • Wu J; Shandong Laboratory of Yantai Advanced Materials and Green Manufacturing, Yantai, 265503 China.
  • He H; Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi'an Jiaotong University, Xi'an, China.
  • Zhang D; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049 China.
  • Zhao L; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049 China.
  • Tian B; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049 China.
  • Maeda R; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049 China.
  • Jiang Z; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an, 710049 China.
Microsyst Nanoeng ; 9: 41, 2023.
Article em En | MEDLINE | ID: mdl-37025565

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Microsyst Nanoeng Ano de publicação: 2023 Tipo de documento: Article

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Microsyst Nanoeng Ano de publicação: 2023 Tipo de documento: Article