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Methods for extending working distance using modified photonic crystal for near-field lithography.
Zhang, Wen-Peng; Li, Xiao-Tian; Dai, Jin-Hong; Wen, Zhong-Quan; Zhou, Yi; Chen, Gang; Liang, Gaofeng.
Afiliação
  • Zhang WP; Key Laboratory of Optoelectronic Technology & Systems (Chongqing University), Ministry of Education, and College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, People's Republic of China.
  • Li XT; Key Laboratory of Optoelectronic Technology & Systems (Chongqing University), Ministry of Education, and College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, People's Republic of China.
  • Dai JH; Key Laboratory of Optoelectronic Technology & Systems (Chongqing University), Ministry of Education, and College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, People's Republic of China.
  • Wen ZQ; Key Laboratory of Optoelectronic Technology & Systems (Chongqing University), Ministry of Education, and College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, People's Republic of China.
  • Zhou Y; Key Laboratory of Optoelectronic Technology & Systems (Chongqing University), Ministry of Education, and College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, People's Republic of China.
  • Chen G; Key Laboratory of Optoelectronic Technology & Systems (Chongqing University), Ministry of Education, and College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, People's Republic of China.
  • Liang G; Key Laboratory of Optoelectronic Technology & Systems (Chongqing University), Ministry of Education, and College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, People's Republic of China.
Nanotechnology ; 35(5)2023 Nov 15.
Article em En | MEDLINE | ID: mdl-37863077
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Nanotechnology Ano de publicação: 2023 Tipo de documento: Article
Texto completo
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XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Nanotechnology Ano de publicação: 2023 Tipo de documento: Article