[Development of soft X-ray multilayer mirror at 23.4 nm].

To meet the research requirement of Ne-like Ge X-ray laser, we designed and fabricated soft X-ray multilayer mirrors at 23.4 nm. New material combination Ti/Si has been chosen based on the material selecting rule, considering the optical characteristics and physicochemical characteristics. Then the period thickness (d), material ratio (gamma), and period number (N) of the multilayer were optimized and the reflectivity was calculated by software. The coating parameters were optimized through experiments and the Ti/Si multilayer mirrors at 23.4 nm were fabricated by magnetron sputtering coating machine. The mirrors were tested by X-ray diffractometer and soft X-ray reflectometer after fabrication. The test results of the Ti/Si multilayer were lambda0 = 23.2 nm and R = 25.8%. Compared with Mo/Si multiplayer, which is generally used in soft X-ray region, the reflectivity of Ti/Si multilayer increases 10% approximately, and FWHM narrows by 1.8 nm at 23.4 nm, indicating better optical performance.

[Measurement technology for relative spectral responsivity of the ultraviolet ICCD].

The spectral responsivity is one of the important parameters of detector. With the development of ultraviolet detect technique accurate measure for the spectral responsivity of ultraviolet detector becomes more and more important. A measure principle which is based on the direct comparison measuring method for relative spectral response measurement of the ultraviolet ICCD is introduced. Based on the scientific-grade spectrometer with ultraviolet responsivity, a measurement facility was built. The relative spectral responsivity curve of the ultraviolet ICCD was obtained. The curve indicates that the spectral-response of UV-ICCD is from 220 to 300 nm and the peak response is near 270 nm, which indicates that the UV-ICCD is solar blind. The analysis of the uncertainty shows that the most largest uncertainty of measurement for relative spectral responsivity of the UV-ICCD is 7.79% and meets the requirement.

[Development of soft X-ray and vacuum ultraviolet spectrum sources].

The soft X-ray and vacuum ultraviolet sources developed in CIOMP are presented. The wall-stabilized argon arc source with spectrum stability and repeatability of +/-0.3% is applied to the calibration of spectrum intensity distribution of the vacuum ultraviolet instruments as an absolute standard source. The Penning source, duobplasma source and hollow cathode source are able to produce atomic and ionic line spectra as a wavelength standard source, which covers a few nanometers to several tens nanometers with spectrum radiation stability and repeatability of +/-1.0%. In particular, the low debris laser produced plasma source with liquid aerosol spray target recently developed can emit stronger soft X-ray for soft X-ray lithography and metrology, which has a transfer efficiency as high as 0.75%/2pi x sr/2% bandwidth.

[Method to measure spectrum intensity from laser plasma soft X-ray source].

This paper presents a method to detect and measure spectrum intensity from a laser plasma soft X-ray source. A Channel Electron Multiplier (CEM) and a calibrated silicon photodiode were used as detectors in this method, the former is a nonstandard detector and the latter is a standard one. Charge-sensitive preamplifiers were used for measuring total charges generated by detectors, and a monochromator with high resolution was employed as the spectrometer. The formulae to calculate spectrum intensity from laser plasma soft X-ray source was given, based on the known grating efficiency of the monochromator, CEM's gain and responsivity of the silicon photodiode to photons.

[Experimental investigation of laser plasma soft X-ray source with gas target].

This paper describes a debris-free laser plasma soft X-ray source with a gas target, which has high operating frequency and can produce strong soft X-ray radiation. The valve of this light source is drived by a piezoelectrical ceramic whose operating frequency is up to 400 Hz. In comparison with laser plasma soft X-ray sources using metal target, the light source is debris-free. And it has higher operating frequency than gas target soft X-ray sources whose nozzle is controlled by a solenoid valve. A channel electron multiplier (CEM) operating in analog mode is used to detect the soft X-ray generated by the laser plasma source, and the CEM's output is fed to to a charge-sensitive preamplifier for further amplification purpose. Output charges from the CEM are proportional to the amplitude of the preamplifier's output voltage. Spectra of CO2, Xe and Kr at 8-14 nm wavelength which can be used for soft X-ray projection lithography are measured. The spectrum for CO2 consists of separate spectral lines originate mainly from the transitions in Li-like and Be-like ions. The Xe spectrum originating mainly from 4d-5f, 4d-4f, 4d-6p and 4d-5p transitions in multiply charged xenon ions. The spectrum for Kr consists of separate spectral lines and continuous broad spectra originating mainly from the transitions in Cu-, Ni-, Co- and Fe-like ions.

[Clinical observation on effect of yishen jiedu recipe in retarding the course of chronic renal failure].

OBJECTIVE: To observe the effect of Yishen Jiedu Recipe (YSJDR) in retarding the course of chronic renal failure (CRF). METHODS: Forty-five patients were divided into two groups, the 22 patients in Group A were treated with low-protein diet and blood pressure controlling therapy only, while the 23 patients in Group B were treated with additional YSJDR. The time (month) for doubling serum creatinine (SCr) level was taken to evaluate the speed of CRF progression. RESULTS: In Group A, the time for SCr increased from 288.4 +/- 96.7 mumol/L to 586.3 +/- 251.3 mumol/L was 16.7 +/- 5.1 months, while in Group B the time for SCr increased from 291.2 +/- 101.2 mumol/L to 589.6 +/- 257.5 mumol/L was 28.2 +/- 8.7 months. Comparison between the two groups showed significant difference (P < 0.05). CONCLUSION: On the basis of low-protein diet and blood pressure controlling therapy, the additional treatment of YSJDR could markedly retard the progression speed of CRF.