Design of an Integrated Micro-Viscometer for Monitoring Engine Oil.

This paper proposes a novel integrated micro-viscometer for engine-oil monitoring. The final solution consists of a capacitive micromachined ultrasonic transducer (CMUT) and an application-specific integrated circuit (ASIC). The CMUT is used to generate and capture acoustic waves while immersed in engine oil. The low power transceiver ASIC is interfaced with the CMUT structure for actuation and reception. An integrated charge pump boosts the supply voltage from 3.3 to 22 V to generate the DC polarization voltage of the CMUT. The receiver has a power consumption of 72 µW with an input-referred noise current of 3.2pAHz and a bandwidth of 7 MHz. The CMUT array occupies an area of 3.5 × 1 mm, whereas the ASIC has a chip area of 1 × 1 mm. The system was tested using engine oils of different types and ages at different temperatures. Measurement results show a significant frequency shift due to the dynamic viscosity change that occurs as oil ages. A shift of -1.9 kHz/cP was measured, which corresponds to a shift of 33 Hz/mile. This work paves the way for high accuracy-integrated solutions for oil condition monitoring and is expected to play a significant role in a more economic and environmentally friendly usage of oil.

Towards the World's Smallest Gravimetric Particulate Matter Sensor: A Miniaturized Virtual Impactor with a Folded Design.

The increasing air pollution across the globe has given rise to a global health crisis that is increasing at an alarming rate. Every year, millions of people lose their lives due to health risks caused by air pollutants. Hence, there is a pressing need for better solutions to accurately measure the amount of air pollution. This work is aimed at designing a highly compact, accurate, low-cost, self-resettable, and easy-to-use gravimetric-based particulate matter sensor solution for portable applications. Previous attempts have failed to realize true miniaturization, due to the size constraints of the virtual impactor needed-a mechanism that segregates the particulate matters based on their sizes. Our complete particulate matter sensor solution consists of three components (i) a piezoelectric resonating membrane, (ii) a virtual impactor, and (iii) a thermophoretic mechanism to reset the sensor. This paper presents a novel design of the virtual impactor, based on a folded configuration. This helps realize the entire system in a volume of 20 mm × 20 mm × 10 mm. We report here the design, working principles, fabrication, and experimental results of the virtual impactor.

Dual-Level Capacitive Micromachined Uncooled Thermal Detector.

This paper presents a novel dual-level capacitive microcantilever-based thermal detector that is implemented in the commercial surface micromachined PolyMUMPs technology. The proposed design is implemented side-by-side with four different single-level designs to enable a design-to-design performance comparison. The dual-level design exhibits a rate of capacitance change per degree Celsius that is over three times higher than that of the single-level designs and has a base capacitance that is more than twice as large. These improvements are achieved because the dual-level architecture allows a 100% electrode-to-detector area, while single-level designs are shown to suffer from an inherent trade-off between sensitivity and base capacitance. In single-level designs, either the number of the bimorph beams or the capacitance electrode can be increased for a given sensor area. The former is needed for a longer effective length of the bimorph for higher thermomechanical sensitivity (i.e., larger tilting angels per degree Celsius), while the latter is desired to relax the read-out integrated-circuits requirements. This thermomechanical response-to-initial capacitance trade-off is mitigated by the dual-level design, which dedicates one structural layer to serve as the upper electrode of the detector, while the other layer contains as many bimorph beams as desired, independently of the former's area.

Hard-Baked Photoresist as a Sacrificial Layer for Sub-180 °C Surface Micromachining Processes.

This letter proposes a method for utilizing a positive photoresist, Shipley 1805, as a sacrificial layer for sub-180 °C fabrication process flows. In the proposed process, the sacrificial layer is etched at the end to release the structures using a relatively fast wet-etching technique employing resist remover and a critical point dryer (CPD). This technique allows high etching selectivity over a large number of materials, including silicon-based structural materials such as silicon-carbide, metals such as titanium and aluminum, and cured polymers. This selectivity, as well as the low processing thermal budget, introduces more flexibility in material selection for monolithic integration above complementary metal oxide semiconductor (CMOS) as well as flexible substrates.