High Isolation, Double-Clamped, Magnetoelectric Microelectromechanical Resonator Magnetometer.

Magnetoelectric (ME)-based magnetometers have garnered much attention as they boast ultra-low-power systems with a small form factor and limit of detection in the tens of picotesla. The highly sensitive and low-power electric readout from the ME sensor makes them attractive for near DC and low-frequency AC magnetic fields as platforms for continuous magnetic signature monitoring. Among multiple configurations of the current ME magnetic sensors, most rely on exploiting the mechanically resonant characteristics of a released ME microelectromechanical system (MEMS) in a heterostructure device. Through optimizing the resonant device configuration, we design and fabricate a fixed-fixed resonant beam structure with high isolation compared to previous designs operating at ~800 nW of power comprised of piezoelectric aluminum nitride (AlN) and magnetostrictive (Co1-xFex)-based thin films that are less susceptible to vibration while providing similar characteristics to ME-MEMS cantilever devices. In this new design of double-clamped magnetoelectric MEMS resonators, we have also utilized thin films of a new iron-cobalt-hafnium alloy (Fe0.5Co0.5)0.92Hf0.08 that provides a low-stress, high magnetostrictive material with an amorphous crystalline structure and ultra-low magnetocrystalline anisotropy. Together, the improvements of this sensor design yield a magnetic field sensitivity of 125 Hz/mT when released in a compressive state. The overall detection limit of these sensors using an electric field drive and readout are presented, and noise sources are discussed. Based on these results, design parameters for future ME MEMS field sensors are discussed.

Demonstration of a quasi-monostatic autonomous underwater vehicle based high duty cycle active sonar.

The feasibility of resolving target returns within receive signals collected by a continuously transmitting quasi-monostatic, broadband, autonomous underwater vehicle (AUV) based sonar is explored. Theoretical studies supported by experimental results suggest that it is possible to capture the source-to-receiver coupling response and target scattering with sufficient fidelity during the continuous transmission to enable detection and (potentially) classification processing. Demonstrations focused upon the detection of a bottomed target object at sea using transmit signals with duty cycles of 60% and 100% indicate that such an approach is feasible for a representative AUV-based side looking sonar system operating in shallow water.