Fabricating Silicon Resonators for Analysing Biological Samples.

The adaptability of microscale devices allows microtechnologies to be used for a wide range of applications. Biology and medicine are among those fields that, in recent decades, have applied microtechnologies to achieve new and improved functionality. However, despite their ability to achieve assay sensitivities that rival or exceed conventional standards, silicon-based microelectromechanical systems remain underutilised for biological and biomedical applications. Although microelectromechanical resonators and actuators do not always exhibit optimal performance in liquid due to electrical double layer formation and high damping, these issues have been solved with some innovative fabrication processes or alternative experimental approaches. This paper focuses on several examples of silicon-based resonating devices with a brief look at their fundamental sensing elements and key fabrication steps, as well as current and potential biological/biomedical applications.

Direct measurement of the mechanical properties of a chromatin analog and the epigenetic effects of para-sulphonato-calix[4]arene.

By means of Silicon Nano Tweezers (SNTs) the effects on the mechanical properties of λ-phage DNA during interaction with calf thymus nucleosome to form an artificial chromatin analog were measured. At a concentration of 100 nM, a nucleosome solution induced a strong stiffening effect on DNA (1.1 N m-1). This can be compared to the effects of the histone proteins, H1, H2A, H3 where no changes in the mechanical properties of DNA were observed and the complex of the H3/H4 proteins where a smaller increase in the stiffness is observed (0.2 N m-1). Para-sulphonato-calix[4]arene, SC4, known for epigenetic activity by interacting specifically with the lysine groups of histone proteins, was studied for its effect on an artificial chromatin. Using a microfluidic SNT device, SC4 was titrated against the artificial chromatin, at a concentration of 1 mM in SC4 a considerable increase in stiffness, 15 N m-1, was observed. Simultaneously optical microscopy showed a physical change in the DNA structure between the tips of the SNT device. Electronic and Atomic Force microscopy confirmed this structural re-arrangement. Negative control experiments confirmed that these mechanical and physical effects were induced neither by the acidity of SC4 nor through nonspecific interactions of SC4 on DNA.

Boyden chamber-based compartmentalized tumor spheroid culture system to implement localized anticancer drug treatment.

In anticancer drug development, it is important to simultaneously evaluate both the effect of drugs on cell proliferation and their ability to penetrate tissues. To realize such an evaluation process, here, we present a compartmentalized tumor spheroid culture system utilizing a thin membrane with a through-hole to conduct localized anticancer treatment of tumor spheroids and monitor spheroid dimensions as an indicator of cell proliferation. The system is based on a commercialized Boyden chamber plate; a through-hole was bored through a porous membrane of the chamber, and the pre-existing 0.4 µm membrane pores were filled with parylene C. A HepG2 spheroid was immobilized onto the through-hole, separating the upper and lower compartments. Fluorescein (to verify the isolation between the compartments) and tirapazamine (TPZ; to treat only the lower part of the spheroid) were added to the upper and lower compartments, respectively. Since the transportation of fluorescein was blocked during treatment, i.e., the upper and lower compartments were isolated, it was confirmed that localized TPZ treatment was successfully conducted using the developed system. The effect of localized TPZ treatment on cell proliferation was estimated by measuring the maximum horizontal cross-sectional areas in the upper and lower parts of the spheroid by microscopic observations. This system can, thus, be used to perform localized anticancer drug treatment of tumor spheroids and evaluate the effect of drugs on cell proliferation.

Developing a MEMS Device with Built-in Microfluidics for Biophysical Single Cell Characterization.

This study combines the high-throughput capabilities of microfluidics with the sensitive measurements of microelectromechanical systems (MEMS) technology to perform biophysical characterization of circulating cells for diagnostic purposes. The proposed device includes a built-in microchannel that is probed by two opposing tips performing compression and sensing separately. Mechanical displacement of the compressing tip (up to a maximum of 14 µm) and the sensing tip (with a quality factor of 8.9) are provided by two separate comb-drive actuators, and sensing is performed with a capacitive displacement sensor. The device is designed and developed for simultaneous electrical and mechanical measurements. As the device is capable of exchanging the liquid inside the channel, different solutions were tested consecutively. The performance of the device was evaluated by introducing varying concentrations of glucose (from 0.55 mM (0.1%) to 55.5 mM (10%)) and NaCl (from 0.1 mM to 10 mM) solutions in the microchannel and by monitoring changes in the mechanical and electrical properties. Moreover, we demonstrated biological sample handling by capturing single cancer cells. These results show three important capabilities of the proposed device: mechanical measurements, electrical measurements, and biological sample handling. Combined in one device, these features allow for high-throughput multi-parameter characterization of single cells.

Elucidating the mechanism of the considerable mechanical stiffening of DNA induced by the couple Zn2+/Calix[4]arene-1,3-O-diphosphorous acid.

The couple Calix[4]arene-1,3-O-diphosphorous acid (C4diP) and zinc ions (Zn2+) acts as a synergistic DNA binder. Silicon NanoTweezer (SNT) measurements show an increase in the mechanical stiffness of DNA bundles by a factor of >150, at Zn2+ to C4diP ratios above 8, as compared to Zinc alone whereas C4diP alone decreases the stiffness of DNA. Electroanalytical measurements using 3D printed devices demonstrate a progression of events in the assembly of C4diP on DNA promoted by zinc ions. A mechanism at the molecular level can be deduced in which C4diP initially coordinates to DNA by phosphate-phosphate hydrogen bonds or in the presence of Zn2+ by Zn2+ bridging coordination of the phosphate groups. Then, at high ratios of Zn2+ to C4diP, interdigitated dimerization of C4diP is followed by cross coordination of DNA strands through Zn2+/C4diP inter-strand interaction. The sum of these interactions leads to strong stiffening of the DNA bundles and increased inter-strand binding.

A rapid and practical technique for real-time monitoring of biomolecular interactions using mechanical responses of macromolecules.

Monitoring biological reactions using the mechanical response of macromolecules is an alternative approach to immunoassays for providing real-time information about the underlying molecular mechanisms. Although force spectroscopy techniques, e.g. AFM and optical tweezers, perform precise molecular measurements at the single molecule level, sophisticated operation prevent their intensive use for systematic biosensing. Exploiting the biomechanical assay concept, we used micro-electro mechanical systems (MEMS) to develop a rapid platform for monitoring bio/chemical interactions of bio macromolecules, e.g. DNA, using their mechanical properties. The MEMS device provided real-time monitoring of reaction dynamics without any surface or molecular modifications. A microfluidic device with a side opening was fabricated for the optimal performance of the MEMS device to operate at the air-liquid interface for performing bioassays in liquid while actuating/sensing in air. The minimal immersion of the MEMS device in the channel provided long-term measurement stability (>10 h). Importantly, the method allowed monitoring effects of multiple solutions on the same macromolecule bundle (demonstrated with DNA bundles) without compromising the reproducibility. We monitored two different types of effects on the mechanical responses of DNA bundles (stiffness and viscous losses) exposed to pH changes (2.1 to 4.8) and different Ag(+) concentrations (1 µM to 0.1 M).

Direct electrical and mechanical characterization of in situ generated DNA between the tips of silicon nanotweezers (SNT).

Previously, we reported the application of micromachined silicon nanotweezers (SNT) integrated with a comb-drive actuator and capacitive sensors for capturing and mechanical characterization of DNA bundles. Here, we demonstrate direct DNA amplification on such a MEMS structure with subsequent electrical and mechanical characterization of a single stranded DNA (ssDNA) bundle generated between the tips of SNT via isothermal rolling circle amplification (RCA) and dielectrophoresis (DEP). An in situ generated ssDNA bundle was visualized and evaluated via electrical conductivity (I-V) and mechanical frequency response measurements. Colloidal gold nanoparticles significantly enhanced (P < 0.01) the electrical properties of thin ssDNA bundles. The proposed technology allows direct in situ synthesis of DNA with a predefined sequence on the tips of a MEMS sensor device, such as SNT, followed by direct DNA electrical and mechanical characterization. In addition, our data provides a "proof-of-principle" for the feasibility of the on-chip label free DNA detection device that can be used for a variety of biomedical applications focused on sequence specific DNA detection.

Real-time mechanical characterization of DNA degradation under therapeutic X-rays and its theoretical modeling.

The killing of tumor cells by ionizing radiation beams in cancer radiotherapy is currently based on a rather empirical understanding of the basic mechanisms and effectiveness of DNA damage by radiation. By contrast, the mechanical behaviour of DNA encompassing sequence sensitivity and elastic transitions to plastic responses is much better understood. A novel approach is proposed here based on a micromechanical Silicon Nanotweezers device. This instrument allows the detailed biomechanical characterization of a DNA bundle exposed to an ionizing radiation beam delivered here by a therapeutic linear particle accelerator (LINAC). The micromechanical device endures the harsh environment of radiation beams and still retains molecular-level detection accuracy. In this study, the first real-time observation of DNA damage by ionizing radiation is demonstrated. The DNA bundle degradation is detected by the micromechanical device as a reduction of the bundle stiffness, and a theoretical model provides an interpretation of the results. These first real-time observations pave the way for both fundamental and clinical studies of DNA degradation mechanisms under ionizing radiation for improved tumor treatment.

A programmable and reconfigurable microfluidic chip.

This article reports an original concept enabling the rapid fabrication of continuous-flow microfluidic chips with a programmable and reconfigurable geometry. The concept is based on a digital microfluidic platform featuring an array of individually addressable electrodes. A selection of electrodes is switched on sequentially to create a de-ionized (DI) water finger specific pattern, while the surrounding medium consists of liquid-phase paraffin. The water displacement is induced by both electrowetting on dielectric and liquid dielectrophoresis phenomena. Once the targeted DI water pattern is obtained, the chip temperature is lowered by turning on an integrated thermoelectric cooler, forming channel structures made of solidified paraffin with edges delimitated by the DI water pattern. As a result, the chip can be used afterwards to conduct in-flow continuous microfluidic experiments. This process is resettable and reversible by heating up the chip to melt the paraffin and reconfigure the microchannel design on demand, offering the advantages of cost, adaptability, and robustness. This paper reports experimental results describing the overall concept, which is illustrated with typical and basic fluidic geometries.

Integrated MEMS platform with silicon nanotweezers and open microfluidic device for real-time and routine biomechanical probing on molecules and cells.

This paper describes an integrated biomechanical platform for real-time molecular or cellular assays. This platform is composed of silicon nanotweezers to manipulate the biological samples and an open microfluidic to handle solution and reactive agents. The tweezers are fabricated by standard Silicon-On-Insulator based micromachining processes (2 masks +1 additional mask for special tips) and integrate actuator, trapping tips and sensor. The microfluidic device is produced from common polydimethylsiloxane (PDMS) micromolding and integrates active valves for controlling the biological medium. Combining both technologies, a versatile experimental setup, built up in an enclosed space (< 10 cm(3)), enables direct interrogation of molecules or cells in solution. The silicon nanotweezers sense slight biological modifications of the trapped molecules or cell by monitoring the mechanical resonance response, which keeps a high Q factor (over 20) in liquid. Biomolecular assays (molecule trapping and enzymatic reaction kinetics) as well as characterizations of cells are reported here. The system provide molecular level resolution and is sensitive enough to capture cell biomechano-transduction activities. Moreover as the system is handy, it may be an easy, fast and quantitative alternative to existing methods.

Silicon Nanotweezers with a microfluidic cavity for the real time characterization of DNA damage under therapeutic radiation beams.

We report the biomechanical characterization of λ-DNA bundle exposed to a therapeutic radiation beam by silicon Nanotweezers. The micromechanical device endures the harsh environment of radiation beams, and still retains molecular-level detection accuracy. The real-time DNA bundle degradation is observed in terms of biomechanical stiffness and viscosity reduction, both in air and in solution. These results pave the way for both fundamental and clinical studies of DNA degradation mechanisms under ionizing radiation for improved tumor treatment.

Nano bioresearch approach by microtechnology.

To progress in basic science and drug development, convenient methodology for detecting specific biological molecules and their interaction in living organism is in high demand. After more than 20 years of increasing research efforts, micro and nanotechnologies are now mature to propose a new class of miniature devices and principles enabling compartmentalized bioassays. Among them, this review proposes various examples that include array of electro-active microwells for highly parallel single cell analysis, cost-effective nanofluidic for DNA separation, parallel enzymatic reaction in 100pL droplet and high-throughput platform for membrane proteins assays. The micro devices are presented with relevant experiments to foresee their future contribution to translational research and drug discovery.

Enzymatic reaction in droplets manipulated with liquid dielectrophoresis.

Droplet generation and transportation for biological reactions are conducted with liquid dielectrophoresis (LDEP), forming two hundred picoliter droplets and aligning them in an open environment above the micro-machined electrodes. The generation of the dielectrophoresis signals was critically examined to actuate droplets in biological solutions without excessive Joule heating. Enzymatic reactions between ß-galactosidase and fluorescein di-ß-D-galactopyranoside were succeeded in manipulated droplets, which was confirmed by fluorescence imaging. These results allow us to propose the integration of LDEP actuation in high throughput biomolecular assays.

Towards single biomolecule handling and characterization by MEMS.

Applications of microelectromechanical systems (MEMS) technology are widespread in both industrial and research fields providing miniaturized smart tools. In this review, we focus on MEMS applications aiming at manipulations and characterization of biomaterials at the single molecule level. Four topics are discussed in detail to show the advantages and impact of MEMS tools for biomolecular manipulations. They include the microthermodevice for rapid temperature alternation in real-time microscopic observation, a microchannel with microelectrodes for isolating and immobilizing a DNA molecule, and microtweezers to manipulate a bundle of DNA molecules directly for analyzing its conductivity. The feasibilities of each device have been shown by conducting specific biological experiments. Therefore, the development of MEMS devices for single molecule analysis holds promise to overcome the disadvantages of the conventional technique for biological experiments and acts as a powerful strategy in molecular biology.

Humidity dependence of charge transport through DNA revealed by silicon-based nanotweezers manipulation.

The study of the electrical properties of DNA has aroused increasing interest since the last decade. So far, controversial arguments have been put forward to explain the electrical charge transport through DNA. Our experiments on DNA bundles manipulated with silicon-based actuated tweezers demonstrate undoubtedly that humidity is the main factor affecting the electrical conduction in DNA. We explain the quasi-Ohmic behavior of DNA and the exponential dependence of its conductivity with relative humidity from the adsorption of water on the DNA backbone. We propose a quantitative model that is consistent with previous studies on DNA and other materials, like porous silicon, subjected to different humidity conditions.

Single DNA molecule isolation and trapping in a microfluidic device.

This paper presents a systematic method to isolate and trap long single DNA segments between integrated electrodes in a microfluidic environment. Double stranded lambda-DNA molecules are introduced in a microchip and are isolated by electrophoretic force through microfluidic channels. Downstream, each individual molecule is extended and oriented by ac dielectrophoresis (900 kHz, 1 MV m(-1)) and anchored between aluminium electrodes. With a proper design, a long DNA segment (up to 10 microm) can be instantly captured in stretched conformation, opening way for further assays.

Inhibitory analysis of the effect of polycyclic aromatic hydrocarbons on the activity of chitinase by means of liquid chromatography-mass spectrometry of chitin oligosaccharides.

The analytical method of determining enzyme activity by liquid chromatography-mass spectrometry (LC/MS) was developed and applied for investigation of the effect of polycyclic aromatic hydrocarbons (PAHs) on the enzyme activity of chitinase. The measurement of chitinase activity by LC/MS is useful in order to use the nonderivatized substrate, which can show in vivo chitinase activity. Substrate consumption and product formation were monitored in order to determine chitinase activity. It was shown that, for the first time, in vitro addition of PAHs inhibited the activity of chitinase in a noncompetitive manner. The IC(50) value of benzo[a]pyrene was 1.4 microM, and PAHs containing four or more aromatic rings showed the same or higher inhibitory effect, whereas PAHs with a lower number of aromatic rings showed lower inhibition of the chitinase activity than benzo[a]pyrene.

Laser-induced fluorescence microscopic system using an optical parametric oscillator for tunable detection in microchip analysis.

A laser-induced fluorescence microscopic system based on optical parametric oscillation has been constructed as a tunable detector for microchip analysis. The detection limit of sulforhodamine B (Ex. 520 nm, Em. 570 nm) was 0.2 mumol, which was approximately eight orders of magnitude better than with a conventional fluorophotometer. The system was applied to the determination of fluorescence-labeled DNA (Ex. 494 nm, Em. 519 nm) in a microchannel and the detection limit reached a single molecule. These results showed the feasibility of this system as a highly sensitive and tunable fluorescence detector for microchip analysis.

On-line determination of trace sulfur dioxide in air by integrated microchip coupled with fluorescence detection.

A microchip-based method was developed for on-line determination of trace sulfur dioxide (SO(2)) in air. Gaseous SO(2), which diffused through the porous glass materials on the microchip, was absorbed into an absorption solution of triethanolamine (TEA) as sulfite ions and reacted with N-(9-acridinyl)maleimide (NAM), which was used as a fluorescent reagent. The fluorescence of NAM-sulfite in micro-fluidic channel was detected. The calibration curve of sulfite ions in the range of 1.5-30mumol/L (SO(2) 3-60ppbv) showed a linear relation R(2)=0.995, and the relative standard deviation (R.S.D.) was 1.9% for 10mumol/L sulfite ions in five measurements. The entire measurement procedure was achieved by the integrated microchip, and the consumption of reagents was drastically reduced. It was satisfactory to apply this method to determine on-line the SO(2) level in the air.