RESUMEN
Optical microcavities confine light to wavelength-scale volumes and are a key component for manipulating and enhancing the interaction of light, vacuum states, and matter. Current microcavities are constrained to a small number of spatial mode profiles. Imaging cavities can accommodate complicated modes but require an externally preshaped input. Here, we experimentally demonstrate a visible-wavelength, metasurface-based holographic microcavity that overcomes these limitations. The micrometer-scale metasurface cavity fulfills the round-trip condition for a designed mode with a complex-shaped intensity profile and thus selectively enhances light that couples to this mode, achieving a spectral bandwidth of 0.8 nm. By imaging the intracavity mode, we show that the holographic mode changes quickly with the cavity length and that the cavity displays the desired spatial mode profile only close to the design cavity length. When a metasurface is placed on a distributed Bragg reflector and steep phase gradients are realized, the correct choice of the reflector's top layer material can boost metasurface performance considerably. The applied forward-design method can be readily transferred to other spectral regimes and mode profiles.
RESUMEN
Extreme ultraviolet (EUV) radiation is a key technology for material science, attosecond metrology, and lithography. Here, we experimentally demonstrate metasurfaces as a superior way to focus EUV light. These devices exploit the fact that holes in a silicon membrane have a considerably larger refractive index than the surrounding material and efficiently vacuum-guide light with a wavelength of ~50 nanometers. This allows the transmission phase at the nanoscale to be controlled by the hole diameter. We fabricated an EUV metalens with a 10-millimeter focal length that supports numerical apertures of up to 0.05 and used it to focus ultrashort EUV light bursts generated by high-harmonic generation down to a 0.7-micrometer waist. Our approach introduces the vast light-shaping possibilities provided by dielectric metasurfaces to a spectral regime that lacks materials for transmissive optics.
RESUMEN
Cavities concentrate light and enhance its interaction with matter. Confining to microscopic volumes is necessary for many applications but space constraints in such cavities limit the design freedom. Here we demonstrate stable optical microcavities by counteracting the phase evolution of the cavity modes using an amorphous Silicon metasurface as cavity end mirror. Careful design allows us to limit the metasurface scattering losses at telecom wavelengths to less than 2% and using a distributed Bragg reflector as metasurface substrate ensures high reflectivity. Our demonstration experimentally achieves telecom-wavelength microcavities with quality factors of up to 4600, spectral resonance linewidths below 0.4 nm, and mode volumes below [Formula: see text]. The method introduces freedom to stabilize modes with arbitrary transverse intensity profiles and to design cavity-enhanced hologram modes. Our approach introduces the nanoscopic light control capabilities of dielectric metasurfaces to cavity electrodynamics and is industrially scalable using semiconductor manufacturing processes.
