Material interface detection based on secondary electron images for focused ion beam machining.

A method for interface detection is proposed for focused ion beam (FIB) processes of multilayered targets. As multilayers have emerged as promising structures for nanodevices, the FIB machining of multilayers has become a challenging issue. We proposed material interface detection by monitoring secondary electron (SE) images captured during the FIB process. The average of the gray-levels and the skewness coefficient of gray-level histograms of the SE images were evaluated to recognize endpoints for the FIB processes. The FIB process control with the proposed method was demonstrated by fabricating the nanostructures on the multilayered target without thickness information. It was also demonstrated on a curved surface. Grooves with a desired depth into the target and an aperture as an opening window were precisely fabricated by the FIB process control. The proposed strategy of the FIB process can be used for complex substrates such as curved or flexible targets.

Contact Effect of ReS2/Metal Interface.

Rhenium disulfide (ReS2) has attracted immense interest as a promising two-dimensional material for optoelectronic devices owing to its outstanding photonic response based on its energy band gap's insensitivity to the layer thickness. Here, we theoretically calculated the electrical band structure of mono-, bi-, and trilayer ReS2 and experimentally found the work function to be 4.8 eV, which was shown to be independent of the layer thickness. We also evaluated the contact resistance of a ReS2 field-effect transistor using a Y-function method with various metal electrodes, including graphene. The ReS2 channel is a strong n-type semiconductor, thus a lower work function than that of metals tends to lead to a lower contact resistance. Moreover, the graphene electrodes, which were not chemically or physically bonded to ReS2, showed the lowest contact resistance, regardless of the work function, suggesting a significant Fermi-level pinning effect at the ReS2/metal interface. In addition, an asymmetric Schottky diode device was demonstrated using Ti or graphene for ohmic contacts and Pt or Pd for Schottky contacts. The ReS2-based transistor used in this study on the work function of ReS2 achieved the possibility of designing the next-generation nanologic devices.

Layer dependence and gas molecule absorption property in MoS2 Schottky diode with asymmetric metal contacts.

Surface potential measurement on atomically thin MoS2 flakes revealed the thickness dependence in Schottky barriers formed between high work function metal electrodes and MoS2 thin flakes. Schottky diode devices using mono- and multi-layer MoS2 channels were demonstrated by employing Ti and Pt contacts to form ohmic and Schottky junctions respectively. Characterization results indicated n-type behavior of the MoS2 thin flakes and the devices showed clear rectifying performance. We also observed the layer dependence in device characteristics and asymmetrically enhanced responses to NH3 and NO2 gases based on the metal work function and the Schottky barrier height change.

Synthesis and bidirectional frequency tuning of cantilever-shape nano resonators using a focused ion beam.

The synthesis of cantilever-shape nano resonators and their resonant frequency tunings in both upward and downward directions have been demonstrated using FIB-CVD (focused ion beam-chemical vapor deposition). The in situ experimental observations of mechanical resonances as well as cutting and adding of resonator materials have been accomplished inside the FIB vacuum chamber. Extending the length of the cantilever-shape resonator by 500 nm scale using either the same material or alternating different materials effectively reduced resonant frequency. On the other hand, direct cutting and gradual trimming of the end point of nano resonator increases its resonant frequency. This simple yet versatile synthesis and frequency tuning scheme could be applicable to both constructing micro/nano scale resonators and tuning nanostructures with reduced efforts and enhanced efficiency.

Spatially discrete thermal drawing of biodegradable microneedles for vascular drug delivery.

Spatially discrete thermal drawing is introduced as a novel method for the fabrication of biodegradable microneedles with ultra-sharp tip ends. This method provides the enhanced control of microneedle shapes by spatially controlling the temperature of drawn polymer as well as drawing steps and speeds. Particular focus is given on the formation of sharp tip ends of microneedles at the end of thermal drawing. Previous works relied on the fracture of polymer neck by fast drawing that often causes uncontrolled shapes of microneedle tips. Instead, this approach utilizes the surface energy of heated polymer to form ultra-sharp tip ends. We have investigated the effect of such temperature control, drawing speed, and drawing steps in thermal drawing process on the final shape of microneedles using biodegradable polymers. XRD analysis was performed to analyze the effect of thermal cycle on the biodegradable polymer. Load-displacement measurement also showed the dependency of mechanical strengths of microneedles on the microneedle shapes. Ex vivo vascular tissue insertion and drug delivery demonstrated microneedle insertion to tunica media layer of canine aorta and drug distribution in the tissue layer.

A high throughput supra-wavelength plasmonic bull's eye photon sorter spatially and spectrally multiplexed on silica optical fiber facet.

This paper presents a plasmonic bull's eye consisting of a micron-sized hole and a concentric nano-antenna metallic ring surrounded by periodic circular grooves on a thin gold film. The unique metallic nano-ring imbedded in the supra-wavelength-sized hole acts as an amplifying and filtering component to simultaneously provide a significantly lower spectral noise and a higher power transmission at the resonance wavelength, in comparison to prior sub-wavelength bull's eyes. Systematic numerical analyses based on finite-difference time-domain method were carried out to find the impacts of the structural parameters. Experimentally we integrated three proposed plasmonic structure on a cleaved facet of an optical fiber that can act as a spatially and spectrally multiplexed photon sorter. Transmission characteristics of the proposed devices were characterized in terms of the spectral response and signal to noise ratio. Potential applications of the fiber optic photon sorter were also discussed.

Fabrication of ordered bulk heterojunction organic photovoltaic cells using nanopatterning and electrohydrodynamic spray deposition methods.

Organic photovoltaic cells with an ordered heterojunction (OHJ) active layer are expected to show increased performance. In the study described here, OHJ cells were fabricated using a combination of nanoimprinting and electrohydrodynamic (EHD) spray deposition methods. After an electron donor material was nanoimprinted with a PDMS stamp (valley width: 230 nm, period: 590 nm) duplicated from a Si nanomold, an electron acceptor material was deposited onto the nanoimprinted donor layer using an EHD spray deposition method. The donor-acceptor interface layer was observed by obtaining cross-sectional images with a focused ion beam (FIB) microscope. The photocurrent generation performance of the OHJ cells was evaluated with the current density-voltage curve under air mass (AM) 1.5 conditions. It was found that the surface morphology of the electron acceptor layer affected the current and voltage outputs of the photovoltaic cells. When an electron acceptor layer with a smooth thin (250 nm above the valley of the electron donor layer) surface morphology was obtained, power conversion efficiency was as high as 0.55%. The electrohydrodynamic spray deposition method used to produce OHJ photovoltaic cells provides a means for the adoption of large area, high throughput processes.

The fabrication of metal silicide nanodot arrays using localized ion implantation.

We propose a process for fabricating nanodot arrays with a pitch size of less than 25 nm. The process consists of localized ion implantation in a metal thin film on a Si wafer using a focused ion beam (FIB), followed by chemical etching. This process utilizes the etching resistivity changes of the ion beam irradiated region that result from metal silicide formation by ion implantation. To control the nanodot diameter, a threshold ion dose model is proposed using the Gaussian distribution of the ion beam intensities. The process is verified by fabricating nanodots with various diameters. The mechanism of etching resistivity is investigated via x-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES).

Multiple excitation of localized surface plasmon to create a 10 nm x 10 nm strong optical spot using an Au nanoparticle array-based ridge waveguide.

We present a description of a multiple excitation of localized surface plasmons (LSPs) from an Au nanoparticle (NP) array-based ridge waveguide to create a small optical spot size with an extremely strong intensity. Using a numerical finite-difference time-domain method, we find that the optical intensity of the ridge waveguide with an Au NP array is about 700% higher than that of a simple ridge waveguide. Moreover, the spacing between the NPs plays an important role in the multiple excitation of LSPs. The spot size, calculated at FWHM, is 10 nm x 10 nm at a distance of 5 nm from the exit plane.