Data-based systematic error extraction and compensation methods based on wavelet transform in ultra-precision optical polishing.

Sub-aperture polishing is a key technique for fabricating ultra-precision optics. However, the existence of the polishing errors that are difficult to be compensated by physical modeling seriously affects the manufacturing accuracy and efficiency of optical components. To address this problem, a data-based systematic error extraction and compensation (DSEC) method was proposed to enhance the polishing accuracy on optics. To maximize the extraction quality in a small dataset condition, the wavelet transform is introduced into the extraction process, and the uncertainty of the piston term in the interferometer measurement is improved by L1-norm optimization. Furthermore, two typical error sources (loss of polishing fluid in the edge and the robot trajectory error) are used to verify the effectiveness of the proposed method; in experimental verification, the root mean square (RMS) of the surface figure of a ϕ85-mm mirror was decreased from 0.069λ to 0.017λ, and the RMS of the 610 × 440 mm mirrors was achieved at 0.019λ after the edge compensation, where the polishing accuracy can be improved by more than 4 times; additionally, the RMS of the surface figure with an effective aperture of 480 × 360 mm mirror was reached at 0.011λ after the trajectory error compensation, where the polishing accuracy can be improved by more than 2 times. The proposed DSEC model offers insights that will help achieve advancement in the sub-aperture polishing process.

Evolution mechanism of subsurface damage during laser machining process of fused silica.

The machining-induced subsurface damage (SSD) on fused silica optics would incur damage when irradiated by intense lasers, which severely restricts the service life of fused silica optics. The high absorption of fused silica to 10.6 µm makes it possible to utilize pulsed CO2 laser to remove and characterize SSD by layer-by-layer ablation, which improves its laser-induced damage threshold. However, thermal stress during the laser ablation process may have an impact on SSD, leading to extension. Still, the law of SSD morphology evolution mechanism has not been clearly revealed. In this work, a multi-physics simulated model considering light field modulation is established to reveal the evolution law of radial SSD during the laser layer-by-layer ablation process. Based on the simulation of different characteristic structural parameters, two evolution mechanisms of radial SSD are revealed, and the influence of characteristic structural parameters on SSD is also elaborated. By prefabricating the SSD by femtosecond laser, the measurements of SSD during CO2 laser layer-by-layer ablation experiments are consistent with the simulated results, and three stages of SSD depth variation under two evolution processes are further proposed. The findings of this study provide theoretical guidance for effectively characterizing SSD based on laser layer-by-layer ablation strategies on fused silica optics.

Comparative Study of Plasma-Enhanced-Atomic-Layer-Deposited Al2O3/HfO2/SiO2 and HfO2/Al2O3/SiO2 Trilayers for Ultraviolet Laser Applications.

High-performance thin films combining large optical bandgap Al2O3 and high refractive index HfO2 are excellent components for constructing the next generation of laser systems with enhanced output power. However, the growth of low-defect plasma-enhanced-atomic-layer-deposited (PEALD) Al2O3 for high-power laser applications and its combination with HfO2 and SiO2 materials commonly used in high-power laser thin films still face challenges, such as how to minimize defects, especially interface defects. In this work, substrate-layer interface defects in Al2O3 single-layer thin films, layer-layer interface defects in Al2O3-based bilayer and trilayer thin films, and their effects on the laser-induced damage threshold (LIDT) were investigated via capacitance-voltage (C-V) measurements. The experimental results show that by optimizing the deposition parameters, specifically the deposition temperature, precursor exposure time, and plasma oxygen exposure time, Al2O3 thin films with low defect density and high LIDT can be obtained. Two trilayer anti-reflection (AR) thin film structures, Al2O3/HfO2/SiO2 and HfO2/Al2O3/SiO2, were then prepared and compared. The trilayer AR thin film with Al2O3/HfO2/SiO2 structure exhibits a lower interface defect density, better interface bonding performance, and an increase in LIDT by approximately 2.8 times. We believe these results provide guidance for the control of interface defects and the design of thin film structures and will benefit many thin film optics for laser applications.

Thermal stability of triple-junction gallium arsenide cells.

Laser wireless power transmission (LWPT) systems have significant applications in the field of wireless energy transmission, including spacecraft sensor networks, satellite-to-satellite communication, and remote power supply. However, continuous laser exposure increases the temperature of the photovoltaic (PV) cells in the LWPT system, thus decreasing the electrical output performance. This work, which we believe is a new approach, is on the basis of a notch film designed by a combined merit function proposed to maintain the electrical output performance while under 1064-nm continuous laser irradiation. Moreover, the thermal stability of PV cells under laser irradiation was investigated, which revealed the recoverability of the open-circuit voltage (Voc) of the cells at different temperatures, and the thermal damage to cells was a gradual process. This process began with the vaporization of the encapsulation adhesive, followed by a decline in, but still recoverable and functional, electrical performance, and finally, the cell was completely damaged. The thermal stability of the PV cells coated with the notch film increased ten-fold compared to those without it. Furthermore, the correlation between the minimum Voc and maximum temperature of the cells with notch films of different performances was established. These investigations serve as references for further optimization of LWPT.

Fast, intelligent and high-precision adaptive null interferometry for optical freeform surfaces by backpropagation.

In the past 10 years, adaptive wavefront interferometry (AWI) has been employed for measuring freeform surface profiles. However, existing AWI techniques relying on stepwise and model-free stochastic optimizations have resulted in inefficient tests. To address these issues, deterministic adaptive wavefront interferometry (DAWI) is firstly introduced in this paper based on backpropagation (BP), which employs a loss function to simultaneously reconstruct and sparsify initial incomplete interferometric fringes until they are nulled. Each iteration of BP requires two phase shifts. Through simulations, we have verified that freeform wavefront error with a peak-to-valley (PV) of up to 168 λ can be fully compensated in tens of iterations using a 1024 × 1024 pixel area of a liquid-crystal spatial light modulator. In experiments, we accomplished a null test of a freeform surface with 80% missing interference fringes in 39 iterations, resulting in a surface profile error PV of 66.22 λ and measurement error better than λ/4. The DAWI has at least 20 times fewer iterations in fringe reconstruction than the 3-step AWI methods, and nearly an order of magnitude fewer iterations in the whole process, paving the way for significantly enhanced efficiency, generality and precision in freeform surface adaptive interferometry.

Plug-and-play positioning error compensation model for ripple suppressing in industrial robot polishing.

The industrial robot-based polisher has wide applications in the field of optical manufacturing due to the advantages of low cost, high degrees of freedom, and high dynamic performance. However, the large positioning error of the industrial robot can lead to surface ripple and seriously restrict the system performance, but this error can only be inefficiently compensated for by measurement before each processing at present. To address this problem, we discovered the period-phase evolution law of the positioning error and established a double sine function compensation model. In the self-developed robotic polishing platform, the results show that the Z-axis error in the whole workspace after compensation can be reduced to ±0.06m m, which reaches the robot repetitive positioning error level; the Spearman correlation coefficients between the measurement and modeling errors are all above 0.88. In the practical polishing experiments, for both figuring and uniform polishing, the ripple error introduced by the positioning error is significantly suppressed by the proposed model under different conditions. Besides, the power spectral density (PSD) analysis has shown a significant suppression in the corresponding frequency error. This model gives an efficient plug-and-play compensation model for the robotic polisher, which provides possibilities for further improving robotic processing accuracy and efficiency.

Theoretical and experimental investigations in thermo-mechanical properties of fused silica with pulsed CO2 laser ablation.

Laser ablation is widely used as a flexible and non-contact processing technology for the fabrication of fused silica. However, the introduction of thermal stress inevitably leads to crack growth and reduces the lifetime of fused silica. Due to the complicated coupling interaction and properties of fused silica, the unclear thermal stress formation is the bottleneck restricting further development of laser ablation. In this article, a three-dimensional multi-physics thermo-mechanical model was developed to reveal the evolution mechanism, and experiments were performed to validate the simulated results. The surface morphology evolution was elaborated during process cycles, with recoil pressure identified as the key factor in determining surface morphology. Moreover, thermal stress was quantified utilizing optical retardance and stress birefringence, effectively distinguishing between non-thermal and thermal stress induced by laser ablation. The theoretical simulations fit well with experimental measurements. Meanwhile, stress distribution and evolution behaviors were revealed under different processing parameters by this model. This work not only contributes to a profound understanding of the laser ablation process but also establishes a theoretical foundation for achieving high surface quality and non-thermal stress laser ablation.

A corrugated epsilon-nearzero saturable absorber for a high-performance 1.3 µm solid-state bulk laser.

Epsilon-near-zero (ENZ) materials with vanishing permittivity exhibit unprecedented optical nonlinearity within subwavelength propagation lengths in the ENZ region, making them promising photoelectric materials that have achieved exciting results in ultrafast pulse laser modulations. In this study, we fabricated a novel saturable absorber (SA) based on a corrugated indium tin oxide (CITO) film with a symmetrical geometry using a low-cost self-assembly process. The strong saturable absorption of the CITO film triggered by the ENZ effect at normal incidence was comparable to that of the planar indium tin oxide (ITO) film at an optimal 60° incidence (TM polarization) at 1340 nm. In addition, the strong nonlinear optical properties of the CITO film were not limited by the incident angle and polarization state of the pump laser over a wide range of 0-20°. Benefiting from the excellent saturable absorption of CITO-based SA at normal incidence, a Q-switching operation with CITO-based SA at 1.34 µm was achieved in a Nd:YVO4 solid-state laser system, obtaining pulses of a duration of 85.6 ns, which was one order of magnitude narrower than that of the planar ITO-based SA. This study presents a new strategy for developing high-performance ENZ-based SAs and ultrafast lasers.

Ultra-broad bandwidth low-dispersion mirror with smooth dispersion and high laser damage resistance.

Low-dispersion mirrors (LDMs), which require a broad bandwidth, low dispersion, and high damage threshold, are essential optics in ultra-intense and ultra-short laser devices. Bragg mirrors and chirped LDMs do not satisfy these requirements simultaneously. We propose a novel LDM (NLDM) based on the hump-like structure and quarter wavelength optical thickness (QWOT) structure to achieve a broad bandwidth, smooth dispersion, and high robustness. The spectral and dispersion characteristics of the two structures compensate for each other, which makes up for the deficiency that the dispersion bandwidth of the sinusoidal modulation structure cannot be broadened. Based on this structure, the LDM can achieve a design bandwidth of 240 nm and support the transmission of sub-11-fs pulses. The accuracy of the NLDM is experimentally evaluated. The structure shows the potential for broad-spectrum laser damage performance due to the low electric field intensity. The NLDM improves the mirror performance and paves the way for a new generation of ultra-intense and ultra-short laser devices.

Densi-melting effect for ultra-precision laser beam figuring with clustered overlapping technology at full-spatial-frequency.

Laser beam figuring (LBF), as a processing technology for ultra-precision figuring, is expected to be a key technology for further improving optics performance. To the best of our knowledge, we firstly demonstrated CO2 LBF for full-spatial-frequency error convergence at negligible stress. We found that controlling the subsidence and surface smoothing caused by material densification and melt under specific parameters range is an effective way to ensure both form error and roughness. Besides, an innovative "densi-melting" effect is further proposed to reveal the physical mechanism and guide the nano-precision figuring control, and the simulated results at different pulse durations fit well with the experiment results. Plus, to suppress the laser scanning ripples (mid-spatial-frequency (MSF) error) and reduce the control data volume, a clustered overlapping processing technology is proposed, where the laser processing in each sub-region is regarded as tool influence function (TIF). Through the overlapping control of TIF figuring depth, we achieved LBF experiments for the form error root mean square (RMS) reduced from 0.009λ to 0.003λ (λ=632.8 nm) without destroying microscale roughness (0.447 nm to 0.453 nm) and nanoscale roughness (0.290 nm to 0.269 nm). The establishment of the densi-melting effect and the clustered overlapping processing technology prove that LBF provides a new high-precision, low-cost manufacturing method for optics.

400nm ultra-broadband gratings for near-single-cycle 100 Petawatt lasers.

Compressing high-energy laser pulses to a single-cycle and realizing the "λ3 laser concept", where λ is the wavelength of the laser, will break the current limitation of super-scale projects and contribute to the future 100-petawatt and even Exawatt lasers. Here, we have realized ultra-broadband gold gratings, core optics in the chirped pulse amplification, in the 750-1150 nm spectral range with a > 90% -1 order diffraction efficiency for near single-cycle pulse stretching and compression. The grating is also compatible with azimuthal angles from -15° to 15°, making it possible to design a three-dimensional compressor. In developing and manufacturing processes, a crucial grating profile with large base width and sharp ridge is carefully optimized and controlled to dramatically broaden the high diffraction efficiency bandwidth from the current 100-200 nm to over 400 nm. This work has removed a key obstacle to achieving the near single-cycle 100-PW lasers in the future.

Fourier convolution-parallel neural network framework with library matching for multi-tool processing decision-making in optical fabrication.

Intelligent manufacturing of ultra-precision optical surfaces is urgently desired but rather difficult to achieve due to the complex physical interactions involved. The development of data-oriented neural networks provides a new pathway, but existing networks cannot be adapted for optical fabrication with a high number of feature dimensions and a small specific dataset. In this Letter, for the first time to the best of our knowledge, a novel Fourier convolution-parallel neural network (FCPNN) framework with library matching was proposed to realize multi-tool processing decision-making, including basically all combination processing parameters (tool size and material, slurry type and removal rate). The number of feature dimensions required to achieve supervised learning with a hundred-level dataset is reduced by 3-5 orders of magnitude. Under the guidance of the proposed network model, a 260 mm × 260 mm off-axis parabolic (OAP) fused silica mirror successfully achieved error convergence after a multi-process involving grinding, figuring, and smoothing. The peak valley (PV) of the form error for the OAP fused silica mirror decreased from 15.153λ to 0.42λ and the root mean square (RMS) decreased from 2.944λ to 0.064λ in only 25.34 hours. This network framework has the potential to push the intelligence level of optical manufacturing to a new extreme.

Modeling and in-depth analysis of the mid-spatial-frequency error influenced by actual contact pressure distribution in sub-aperture polishing.

In ultra-precision optical processing, the sub-aperture polishing is prone to produce a mid-spatial-frequency (MSF) error. However, the generation mechanism of the MSF error is still not fully clarified, which seriously affects the further improvement of optical component performance. In this paper, it is proved that the actual contact pressure distribution between the workpiece and tool is a crucial source which affects the MSF error characteristics. A rotational periodic convolution (RPC) model is proposed to reveal the quantitative relationship among the contact pressure distribution, speed ratio (spin velocity/feed speed) and MSF error distribution. In-depth analyses show that the MSF error is linearly related to the symmetry level of contact pressure distribution and inversely proportional to the speed ratio, where the symmetry level is effectively evaluated by the proposed method based on Zernike polynomials. In the experiments, according to the actual contact pressure distribution obtained from the pressure-sensitive paper, the error rate of modeling results under different processing conditions is around 15%, which proves the validity of the proposed model. The influence of contact pressure distribution on the MSF error is further clarified through the establishment of RPC model, which can further promote the development of sub-aperture polishing.

Design, production, and characterization of a pair of positive and negative high dispersive mirrors for chirped pulse amplification systems.

We report a novel modified Gires-Tournois interferometer (MGTI) starting design for high-dispersive mirrors (HDMs). The MGTI structure combines multi-G-T and conjugate cavities and introduces a large amount of dispersion while covering a wide bandwidth. With this MGTI starting design, a pair of positive (PHDM) and negative highly dispersive mirrors (NHDM) providing group delay dispersions of +1000 fs2 and -1000 fs2 in the spectral range of 750 nm to 850 nm is developed. The pulse stretching and compression capabilities of both HDMs are studied theoretically by simulating the pulse envelopes reflected from the HDMs. A near Fourier Transform Limited pulse is obtained after 50 bounces on each positive and negative HDM, which verifies the excellent matching between the PHDM and NHDM. Moreover, the laser-induced damage properties of the HDMs are studied using laser pulses of 800 nm and 40 fs. The damage thresholds of the PHDM and NHDM are approximately 0.22 J/cm2 and 0.11 J/cm2, respectively. The laser-induced blister structure of the HDMs is observed, the formation and evolution processes of the blister are evaluated.

Tunable Key-Size Physical Unclonable Functions Based on Phase Segregation in Mixed Halide Perovskites.

Optical physical unclonable functions (PUFs) have been considered as an effective tool for anti-counterfeiting owing to the uncontrollable manufacturing process and excellent resistance to machine-learning attacks. However, most optical PUFs exhibit fixed challenge-response pairs and static encoding structures after they are manufactured, which significantly impedes the actual development. Herein, we propose a tunable key-size PUF based on reversible phase segregation in mixed halide perovskites with uncontrollable Br/I ratios under variable power densities. The basic performance of encryption keys of low and high power density was evaluated and indicated a high degree of uniformity, uniqueness, and readout repeatability. Merging the binary keys of low and high power density, tunable key-size PUF is realized with higher security. The proposed tunable key-size PUF offers new insights into the development of dynamic-structure PUFs and demonstrates a novel scheme for achieving higher security of anti-counterfeiting and authentication.

Statistical perception of the chaotic fabrication error and the self-adaptive processing decision in ultra-precision optical polishing.

Subaperture polishing is a key technique for fabricating ultra-precision optics. However, the error source complexity in the polishing process creates large fabrication errors with chaotic characteristics that are difficult to predict using physical modelling. In this study, we first proved that the chaotic error is statistically predictable and developed a statistical chaotic-error perception (SCP) model. We confirmed that the coupling between the randomness characteristics of chaotic error (expectation and variance) and the polishing results follows an approximately linear relationship. Accordingly, the convolution fabrication formula based on the Preston equation was improved, and the form error evolution in each polishing cycle for various tools was quantitatively predicted. On this basis, a self-adaptive decision model that considers the chaotic-error influence was developed using the proposed mid- and low-spatial-frequency error criteria, which realises the automatic decision of the tool and processing parameters. An ultra-precision surface with equivalent accuracy can be stably realised via proper tool influence function (TIF) selection and modification, even for low-deterministic level tools. Experimental results indicated that the average prediction error in each convergence cycle was reduced to 6.14%. Without manual participation, the root mean square(RMS) of the surface figure of a ϕ100-mm flat mirror was converged to 1.788 nm with only robotic small-tool polishing, and that of a ϕ300-mm high-gradient ellipsoid mirror was converged to 0.008 λ. Additionally, the polishing efficiency was increased by 30% compared with that of manual polishing. The proposed SCP model offers insights that will help achieve advancement in the subaperture polishing process.

Thickness-dependent loss-induced failure of an ideal ENZ-enhanced optical response in planar ultrathin transparent conducting oxide films.

Ultrathin planar transparent conducting oxide (TCO) films are commonly used to enhance the optical response of epsilon-near-zero (ENZ) devices; however, our results suggest that thickness-dependent loss renders them ineffective. Here, we investigated the thickness-dependent loss of indium tin oxide (ITO) films and their effect on the ENZ-enhanced optical responses of ITO and ITO/SiO2 multilayer stacks. The experimental and computational results show that the optical loss of ITO films increases from 0.47 to 0.70 as the thickness decreases from 235 to 52 nm, which results in a reduction of 60% and 45% in the maximum field enhancement factor of a 52-nm monolayer ITO and 4-layer ITO/SiO2 multilayer stack, respectively. The experimental results show that the ENZ-enhanced nonlinear absorption coefficient of the 52-nm single-layer ITO film is -1.6 × 103 cm GW-1, which is 81% lower than that of the 235-nm ITO film (-8.6 × 103 cm GW-1), indicating that the thickness-dependent loss makes the ultrathin TCO films unable to obtain greater nonlinear responses. In addition, the increased loss reduces the cascading Berreman transmission valley intensity of the 4-layer ITO/SiO2 multilayer stack, resulting in a 42% reduction in the ENZ-enhanced nonlinear absorption coefficient compared to the 235-nm ITO film and a faster hot electron relaxation time. Our results suggest that the thickness and loss trade-off is an intrinsic property of TCO films and that the low-loss ultrathin TCO films are the key to the robust design and fabrication of novel ENZ devices based on flat ultrathin TCO films.

Multispectral higher-order Fano resonant metasurface based on periodic twisted DNA-like split ring arrays with three modulation methods.

The active modulation of the Fano resonance is rare but desirable. However, recent studies mostly focused on a single modulation method and few reported the use of three photoelectric control methods. A tunable graphene DNA-like metamaterial modulator with multispectral Fano resonance is demonstrated. In experimentally fabricated metamaterials with six photoelectric joint modulation patterns, each joint shows different optoelectrical response characteristics. Ultrahigh modulation depth (MD) up to 982% was achieved at 1.5734 THz with a 1.040 A external laser pump by involving combined optoelectrical methods. These results show that the metasurface modulator is a promising platform for higher-order Fano resonance modulation and communication fields.

Wavefront-coded phase measuring deflectometry for the all-focused measurement.

Phase measuring deflectometry is a powerful measuring method for complex optical surfaces, which captures the reflected fringe images encoded on the screen under the premise of focusing the measured specular surface. Due to the limited depth of field of the camera, the captured images and the measured surface cannot be focused at the same time. To solve the position-angle uncertainty issue, in this Letter, the wavefront coding technology is used to modulate the imaging wavefront of the deflectometry, thereby making the measuring system insensitive to the defocus and other low-order aberration including astigmatism, field curvature, and so on. To obtain the accurate phase, the captured fringe images are deconvoluted using the modulated point spread function to reduce the phase error. Demonstrated with a highly curved spherical surface, the measurement accuracy can be improved by four times. Experiments demonstrate that the proposed method can successfully reconstruct the complex surfaces defocusing the captured images, which can greatly release the focusing requirement and improve measurement accuracy.

Dual control of multi-band resonances with a metal-halide perovskite-integrated terahertz metasurface.

The phenomenon of multi-resonant Fano resonances is important for the design of biosensors and communication fields. There are very few studies reporting the multi-band Fano resonance metamaterials with more than three resonance frequencies, or the tunable optical metamaterials to control the multi-band Fano resonance characteristics. Here, we report dual control of multi-band Fano resonances with a metal-halide perovskite-integrated terahertz metasurface by lasers and an electrical field. By tuning the conductivity of the perovskite film on the metasurface, ultrasensitive optoelectronic modulation was achieved. The terahertz transmission amplitude exhibited increasing and decreasing stages. We analyzed the physical phenomena and found that capacitance effects and Fermi-level enhancement had significant roles in the optical- and electronic-modulation experiments. The resonant frequencies in the electronic modulation had broader frequency shifts and a higher and wider tunable modulation depth range. More importantly, the maximum modulation depth was as high as 197%, with a significant fluctuation in the amplitude and more unstable frequency shifts in the transmission spectra.