An ultra-deep TSV technique enabled by the dual catalysis-based electroless plating of combined barrier and seed layers.

Silicon interposers embedded with ultra-deep through-silicon vias (TSVs) are in great demand for the heterogeneous integration and packaging of opto-electronic chiplets and microelectromechanical systems (MEMS) devices. Considering the cost-effective and reliable manufacturing of ultra-deep TSVs, the formation of continuous barrier and seed layers remains a crucial challenge to solve. Herein, we present a novel dual catalysis-based electroless plating (ELP) technique by tailoring polyimide (PI) liner surfaces to fabricate dense combined Ni barrier/seed layers in ultra-deep TSVs. In additional to the conventional acid catalysis procedure, a prior catalytic step in an alkaline environment is proposed to hydrolyze the PI surface into a polyamide acid (PAA) interfacial layer, resulting in additional catalysts and the formation of a dense Ni layer that can function as both a barrier layer and a seed layer, particularly at the bottom of the deep TSV. TSVs with depths larger than 500 µm and no voids are successfully fabricated in this study. The fabrication process involves low costs and temperatures. For a fabricated 530-µm-deep TSV with a diameter of 70 µm, the measured depletion capacitance and leakage current are approximately 1.3 pF and 1.7 pA at 20 V, respectively, indicating good electrical properties. The proposed fabrication strategy can provide a cost-effective and feasible solution to the challenge of manufacturing ultra-deep TSVs for modern 3D heterogeneous integration and packaging applications.

A robust lateral shift free (LSF) electrothermal micromirror with flexible multimorph beams.

Electrothermal bimorph-based scanning micromirrors typically employ standard silicon dioxide (SiO2) as the electrothermal isolation material. However, due to the brittle nature of SiO2, such micromirrors may be incapable to survive even slight collisions, which greatly limits their application range. To improve the robustness of electrothermal micromirrors, a polymer material is incorporated and partially replaces SiO2 as the electrothermal isolation and anchor material. In particular, photosensitive polyimide (PSPI) is used, which also simplifies the fabrication process. Here, PSPI-based electrothermal micromirrors have been designed, fabricated, and tested. The PSPI-type micromirrors achieved an optical scan angle of ±19.6° and a vertical displacement of 370 µm at only 4 Vdc. With a mirror aperture size of 1 mm × 1 mm, the PSPI-type micromirrors survived over 200 g accelerations from either vertical or lateral directions in impact experiments. In the drop test, the PSPI-type micromirrors survived falls to a hard floor from heights up to 21 cm. In the standard frequency sweeping vibration test, the PSPI-type micromirrors survived 21 g and 29 g acceleration in the vertical and lateral vibrations, respectively. In all these tests, the PSPI-type micromirrors demonstrated at least 4 times better robustness than SiO2-type micromirrors fabricated in the same batch.

Development of an Optoelectronic Integrated Sensor for a MEMS Mirror-Based Active Structured Light System.

Micro-electro-mechanical system (MEMS) scanning micromirrors are playing an increasingly important role in active structured light systems. However, the initial phase error of the structured light generated by a scanning micromirror seriously affects the accuracy of the corresponding system. This paper reports an optoelectronic integrated sensor with high irradiance responsivity and high linearity that can be used to correct the phase error of the micromirror. The optoelectronic integrated sensor consists of a large-area photodetector (PD) and a receiving circuit, including a post amplifier, an operational amplifier, a bandgap reference, and a reference current circuit. The optoelectronic sensor chip is fabricated in a 180 nm CMOS process. Experimental results show that with a 5 V power supply, the optoelectronic sensor has an irradiance responsivity of 100 mV/(µW/cm2) and a -3 dB bandwidth of 2 kHz. The minimal detectable light power is about 19.4 nW, which satisfies the requirements of many active structured light systems. Through testing, the application of the chip effectively reduces the phase error of the micromirror to 2.5%.

Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders.

Piezoelectric micromachined ultrasonic transducer (pMUT) rangefinders have been rapidly developed in the last decade. With high output pressure to enable long-range detection and low power consumption (16 µW for over 1 m range detection has been reported), pMUT rangefinders have drawn extensive attention to mobile range-finding. pMUT rangefinders with different strategies to enhance range-finding performance have been developed, including the utilization of pMUT arrays, advanced device structures, and novel piezoelectric materials, and the improvements of range-finding methods. This work briefly introduces the working principle of pMUT rangefinders and then provides an extensive overview of recent advancements that improve the performance of pMUT rangefinders, including advanced pMUT devices and range-finding methods used in pMUT rangefinder systems. Finally, several derivative systems of pMUT rangefinders enabling pMUT rangefinders for broader applications are presented.

MEMS Enabled Miniature Two-Photon Microscopy for Biomedical Imaging.

Over the last decade, two-photon microscopy (TPM) has been the technique of choice for in vivo noninvasive optical brain imaging for neuroscientific study or intra-vital microendoscopic imaging for clinical diagnosis or surgical guidance because of its intrinsic capability of optical sectioning for imaging deeply below the tissue surface with sub-cellular resolution. However, most of these research activities and clinical applications are constrained by the bulky size of traditional TMP systems. An attractive solution is to develop miniaturized TPMs, but this is challenged by the difficulty of the integration of dynamically scanning optical and mechanical components into a small space. Fortunately, microelectromechanical systems (MEMS) technology, together with other emerging micro-optics techniques, has offered promising opportunities in enabling miniaturized TPMs. In this paper, the latest advancements in both lateral scan and axial scan techniques and the progress of miniaturized TPM imaging will be reviewed in detail. Miniature TPM probes with lateral 2D scanning mechanisms, including electrostatic, electromagnetic, and electrothermal actuation, are reviewed. Miniature TPM probes with axial scanning mechanisms, such as MEMS microlenses, remote-focus, liquid lenses, and deformable MEMS mirrors, are also reviewed.

High-flexibility and high-accuracy phase delay calibration method for MEMS-based fringe projection systems.

Microelectromechanical system (MEMS) mirror based laser beam scanning (LBS) projectors for fringe projection profilometry (FPP) are becoming increasingly popular attributing to their small size and low cost. However, the initial phase of the scanning MEMS mirror employed in an LBS projector may vary over time, resulting in unstable and distorted fringe patterns. The distorted fringe patterns will largely decrease the accuracy of the three-dimensional (3D) topographic reconstruction. In this paper, an efficient phase delay calibration method based on a unique fringe projection sequence and a corresponding image processing algorithm is proposed. The proposed method can compensate the phase uncertainty and variation with no need to add any extra components. One LBS projector has been constructed using a uniaxial electrostatic MEMS mirror that has a mirror size of 2.5 mm × 2.5 mm and a scanning field of view of 60 ∘ at its resonance of 1523 Hz. 3D reconstruction experiments are conducted to study how the 3D reconstruction results are affected by the phase delay. The standard deviation of a sphere reconstruction is improved from 2.05 mm to 0.20 mm after the positive phase delay deviation of 5 µs is compensated using this new calibration method.

Thin ceramic PZT dual- and multi-frequency pMUT arrays for photoacoustic imaging.

Miniaturized ultrasonic transducer arrays with multiple frequencies are key components in endoscopic photoacoustic imaging (PAI) systems to achieve high spatial resolution and large imaging depth for biomedical applications. In this article, we report on the development of ceramic thin-film PZT-based dual- and multi-frequency piezoelectric micromachined ultrasonic transducer (pMUT) arrays and the demonstration of their PAI applications. With chips sized 3.5 mm in length or 10 mm in diameter, square and ring-shaped pMUT arrays incorporating as many as 2520 pMUT elements and multiple frequencies ranging from 1 MHz to 8 MHz were developed for endoscopic PAI applications. Thin ceramic PZT with a thickness of 9 µm was obtained by wafer bonding and chemical mechanical polishing (CMP) techniques and employed as the piezoelectric layer of the pMUT arrays, whose piezoelectric constant d 31 was measured to be as high as 140 pm/V. Benefiting from this high piezoelectric constant, the fabricated pMUT arrays exhibited high electromechanical coupling coefficients and large vibration displacements. In addition to electrical, mechanical, and acoustic characterization, PAI experiments with pencil leads embedded into an agar phantom were conducted with the fabricated dual- and multi-frequency pMUT arrays. Photoacoustic signals were successfully detected by pMUT elements with different frequencies and used to reconstruct single and fused photoacoustic images, which clearly demonstrated the advantages of using dual- and multi-frequency pMUT arrays to provide comprehensive photoacoustic images with high spatial resolution and large signal-to-noise ratio simultaneously.

Review of Electrothermal Micromirrors.

Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based on different thermal actuators are reviewed, and also the mechanisms of those actuators are analyzed, including U-shape, chevron, thermo-pneumatic, thermo-capillary and thermal bimorph-based actuation. Special attention is given to bimorph based-electrothermal micromirrors due to their versatility in tip-tilt-piston motion. The exemplified applications of each type of electrothermal micromirrors are also presented. Moreover, electrothermal micromirrors integrated with electromagnetic or electrostatic actuators are introduced.

Review of Recent Development of MEMS Speakers.

Facilitated by microelectromechanical systems (MEMS) technology, MEMS speakers or microspeakers have been rapidly developed during the past decade to meet the requirements of the flourishing audio market. With advantages of a small footprint, low cost, and easy assembly, MEMS speakers are drawing extensive attention for potential applications in hearing instruments, portable electronics, and the Internet of Things (IoT). MEMS speakers based on different transduction mechanisms, including piezoelectric, electrodynamic, electrostatic, and thermoacoustic actuation, have been developed and significant progresses have been made in commercialization in the last few years. In this article, the principle and modeling of each MEMS speaker type is briefly introduced first. Then, the development of MEMS speakers is reviewed with key specifications of state-of-the-art MEMS speakers summarized. The advantages and challenges of all four types of MEMS speakers are compared and discussed. New approaches to improve sound pressure levels (SPLs) of MEMS speakers are also proposed. Finally, the remaining challenges and outlook of MEMS speakers are given.

Development of Dual-Frequency PMUT Arrays Based on Thin Ceramic PZT for Endoscopic Photoacoustic Imaging.

This paper presents a dual-frequency piezoelectric micromachined ultrasonic transducer (pMUT) array based on thin ceramic PZT for endoscopic photoacoustic imaging (PAI) applications. With a chip size of 7 × 7 mm2, the pMUT array consists of 256 elements, half of which have a lower resonant frequency of 1.2 MHz and the other half have a higher resonant frequency of 3.4 MHz. Ceramic PZT, with outstanding piezoelectric coefficients, has been successfully thinned down to a thickness of only 4 µ by using wafer bonding and chemical mechanical polishing (CMP) techniques and employed as the piezoelectric layer of the pMUT elements. The diaphragm diameters of the lower-frequency and higher-frequency elements are 220 µm and 120 µm, respectively. The design methodology, multiphysics modeling, fabrication process, and characterization of the pMUTs are presented in detail. The fabricated pMUT array has been fully characterized via electrical, mechanical, and acoustic measurements. The measured maximum responsivities of the lower- and higher- frequency elements reach 110 nm/V and 30 nm/V at their respective resonances. The measured cross-couplings of the lower-frequency elements and higher-frequency elements are about 9% and 5%, respectively. Furthermore, PAI experiments with pencil leads embedded into an agar phantom have been conducted, which clearly shows the advantages of using dual-frequency pMUT arrays to provide comprehensive photoacoustic images with high spatial resolution and large signal-to-noise ratio simultaneously.

In Vivo Evaluation of a Miniaturized Fluorescence Molecular Tomography (FMT) Endoscope for Breast Cancer Detection Using Targeted Nanoprobes.

In this study, in vivo animal experiments with 12 nude mice bearing breast-cancer-patient-tissue-derived xenograft (PDX) tumors were performed aiming to verify the imaging capability of a novel miniaturized fluorescence molecular tomography (FMT) endoscope, in combination with targeted nanoparticle-near-infrared (NIR) dye conjugates. Tumor-bearing mice were divided into two groups by systematic injection with urokinase plasminogen activator receptor-targeted (n = 7) and nontargeted (n = 5) imaging nanoprobes as a contrast agent, respectively. Each mouse was imaged at 6, 24, and 48 h following the injection of nanoprobes using the FMT endoscope. The results show that systemic delivery of targeted nanoprobes produced a 4-fold enhancement in fluorescence signals from tumors, compared with tumors that received nontargeted nanoprobes. This study indicates that our miniaturized FMT endoscope, coupled with the targeted nanoparticle-NIR dye conjugates as a contrast agent, has high sensitivity and specificity, and thus great potential to be used for image-guided detection and removal of a primary tumor and local metastatic tumors during surgery.

A Silicon Optical Bench-Based Forward-View Two-Axis Scanner for Microendoscopy Applications.

Optical microendoscopy enabled by a microelectromechanical system (MEMS) scanning mirror offers great potential for in vivo diagnosis of early cancer inside the human body. However, an additional beam folding mirror is needed for a MEMS mirror to perform forward-view scanning, which drastically increases the diameter of the resultant MEMS endoscopic probe. This paper presents a new monolithic two-axis forward-view optical scanner that is composed of an electrothermally driven MEMS mirror and a beam folding mirror both vertically standing and integrated on a silicon substrate. The mirror plates of the two mirrors are parallel to each other with a small distance of 0.6 mm. The laser beam can be incident first on the MEMS mirror and then on the beam folding mirror, both at 45°. The MEMS scanner has been successfully fabricated. The measured optical scan angles of the MEMS mirror were 10.3° for the x axis and 10.2° for the y axis operated under only 3 V. The measured tip-tilt resonant frequencies of the MEMS mirror were 1590 Hz and 1850 Hz, respectively. With this compact MEMS design, a forward-view scanning endoscopic probe with an outer diameter as small as 2.5 mm can be made, which will enable such imaging probes to enter the subsegmental bronchi of an adult patient.

Analog-controlled light microshutters based on electrothermal actuation for smart windows.

Smart windows for sunlight control play an important role in modern green buildings. Electrically-controllable light microshutters provide a promising solution for smart windows. However, most of reported microshutters work under on/off binary mode. In this work, an electrothermally actuated microshutter that can achieve analog light control is proposed. The microshutter consists of an array of electrothermal Al/SiO2 bimorph cantilever plates suspended over a through-silicon cavity. The device is fabricated by a combination of surface- and bulk- micromachining processes. Test experiments show that for a single microshutter pixel, the device opening ratio can be tuned continuously from 78.6% (Open state, 0 V) all the way down to nearly 0% (Close state, 8 V) with a small hysteresis. For the entire array of 2 × 5 microshutters, the light transmission ratio varies continuously from 63.3% to 3.6% when the applied voltage is increased from 0 to 7.3 V. Furthermore, the response time, long-term reliability and window-like function of the microshutter are tested.

MEMS Ultrasound Transducers for Endoscopic Photoacoustic Imaging Applications.

Photoacoustic imaging (PAI) is drawing extensive attention and gaining rapid development as an emerging biomedical imaging technology because of its high spatial resolution, large imaging depth, and rich optical contrast. PAI has great potential applications in endoscopy, but the progress of endoscopic PAI was hindered by the challenges of manufacturing and assembling miniature imaging components. Over the last decade, microelectromechanical systems (MEMS) technology has greatly facilitated the development of photoacoustic endoscopes and extended the realm of applicability of the PAI. As the key component of photoacoustic endoscopes, micromachined ultrasound transducers (MUTs), including piezoelectric MUTs (pMUTs) and capacitive MUTs (cMUTs), have been developed and explored for endoscopic PAI applications. In this article, the recent progress of pMUTs (thickness extension mode and flexural vibration mode) and cMUTs are reviewed and discussed with their applications in endoscopic PAI. Current PAI endoscopes based on pMUTs and cMUTs are also introduced and compared. Finally, the remaining challenges and future directions of MEMS ultrasound transducers for endoscopic PAI applications are given.

A MEMS lens scanner based on serpentine electrothermal bimorph actuators for large axial tuning.

Confocal microscopes and two-photon microscopes are powerful tools for early cancer diagnosis because of their high-resolution 3D imaging capability, but applying them for clinical use in internal organs is hindered by the lack of axially tunable lens modules with small size, high image quality and large tuning range. This paper reports a compact MEMS lens scanner that has the potential to overcome this limitation. The MEMS lens scanner consists of a MEMS microstage and a microlens. The MEMS microstage is based on a unique serpentine inverted-series-connected (ISC) electrothermal bimorph actuator design. The microlens is an aspheric glass lens to ensure optical quality. The MEMS microstage has been fabricated and the lens scanner has been successfully assembled. The entire lens scanner is circular with an outer diameter of 4.4 mm and a clear optical aperture of 1.8 mm. Experiments show that the tunable range reaches over 200 µm at only 10.5 V and the stiffness of the microstage is 6.2 N/m. Depth scan imaging by the MEMS lens scanner has also been demonstrated with a 2.2 µm resolution, only limited by the available resolution target.

A Customized Two Photon Fluorescence Imaging Probe Based on 2D scanning MEMS Mirror Including Electrothermal Two-Level-Ladder Dual S-Shaped Actuators.

We report the design and characterization of a two-photon fluorescence imaging miniature probe. This customized two-axis scanning probe is dedicated for intraoperative two-photon fluorescence imaging endomicroscopic use and is based on a micro-electro-mechanical system (MEMS) mirror with a high reflectivity plate and two-level-ladder double S-shaped electrothermal bimorph actuators. The fully assembled probe has a total outer diameter of 4 mm including all elements. With a two-lens configuration and a small aperture MEMS mirror, this probe can generate a large optical scan angle of 24° with 4 V drive voltage and can achieve a 450 µm FOV with a 2-fps frame rate. A uniform Pixel Dwell Time and a stable scanning speed along a raster pattern were demonstrated while a 57-fs pulse duration of the excitation beam was measured at the exit of the probe head. This miniature imaging probe will be coupled to a two-photon fluorescence endomicroscope oriented towards clinical use.

MEMS Mirrors for LiDAR: A review.

In recent years, Light Detection and Ranging (LiDAR) has been drawing extensive attention both in academia and industry because of the increasing demand for autonomous vehicles. LiDAR is believed to be the crucial sensor for autonomous driving and flying, as it can provide high-density point clouds with accurate three-dimensional information. This review presents an extensive overview of Microelectronechanical Systems (MEMS) scanning mirrors specifically for applications in LiDAR systems. MEMS mirror-based laser scanners have unrivalled advantages in terms of size, speed and cost over other types of laser scanners, making them ideal for LiDAR in a wide range of applications. A figure of merit (FoM) is defined for MEMS mirrors in LiDAR scanners in terms of aperture size, field of view (FoV) and resonant frequency. Various MEMS mirrors based on different actuation mechanisms are compared using the FoM. Finally, a preliminary assessment of off-the-shelf MEMS scanned LiDAR systems is given.

Real-time Lissajous imaging with a low-voltage 2-axis MEMS scanner based on electrothermal actuation.

Laser scanning based on Micro-Electro-Mechanical Systems (MEMS) scanners has become very attractive for biomedical endoscopic imaging, such as confocal microscopy or Optical Coherence Tomography (OCT). These scanners are required to be fast to achieve real-time image reconstruction while working at low actuation voltage to comply with medical standards. In this context, we report a 2-axis Micro-Electro-Mechanical Systems (MEMS) electrothermal micro-scannercapable of imaging large fields of view at high frame rates, e.g. from 10 to 80 frames per second. For this purpose, Lissajous scan parameters are chosen to provide the optimal image quality within the scanner capabilities and the sampling rate limit, resulting from the limited A-scan rate of typical swept-sources used for OCT. Images of 233 px × 203 px and 53 px × 53 px at 10 fps and 61 fps, respectively, are experimentally obtained and demonstrate the potential of this micro-scannerfor high definition and high frame rate endoscopic Lissajous imaging.

A Ceramic PZT-based PMUT Array for Endoscopic Photoacoustic Imaging.

In this paper, we present the design, fabrication, and characterization of a compact 4 × 4 piezoelectric micromachined ultrasonic transducer (pMUT) array and its application to photoacoustic imaging. The uniqueness of this pMUT array is the integration of a 4 µm-thick ceramic PZT, having significantly higher piezoelectric coefficient and lower stress than sol-gel or sputtered PZT. The fabricated pMUT array has a small chip size of only 1.8 × 1.6 mm2 with each pMUT element having a diameter of 210 µm. The fabricated device was characterized with electrical impedance measurement and acoustic sensing test. Photoacoustic imaging has also been successfully demonstrated on an agar phantom with a pencil lead embedded using the fabricated pMUT array.

Stability Study of an Electrothermally-Actuated MEMS Mirror with Al/SiO2 Bimorphs.

Electrothermal actuation is one of the main actuation mechanisms and has been employed to make scanning microelectromechanical systems (MEMS) mirrors with large scan range, high fill factor, and low driving voltage, but there exist long-term drifting issues in electrothermal bimorph actuators whose causes are not well understood. In this paper, the stability of an Al / SiO 2 bimorph electrothermal MEMS mirror operated in both static and dynamic scan mode has been studied. Particularly, the angular drifts of the MEMS mirror plate were measured over 90 h at different temperatures in the range of 50 - 150 °C. The experiments show that the temporal drift of the mirror plate orientation largely depends on the temperature of the electrothermal bimorph actuators. Interestingly, it is found that the angular drift changes from falling to rising as the temperature increases. An optimal operating temperature between 75 °C to 100 °C for the MEMS mirror is identified. At this temperature, the MEMS mirror exhibited stable scanning with an angular drift of less than 0.0001 °/h.