RESUMEN
In wafer metrology, the knowledge of the photomask together with the deposition process only reveals the approximate geometry and material properties of the structures on a wafer as a priori information. With this prior information and a parametrized description of the scatterers, we demonstrate the performance of the Gauss-Newton method for the precise and noise-robust reconstruction of the actual structures, without further regularization of the inverse problem. The structures are modeled as 3D finite dielectric scatterers with a uniform polygonal cross-section along their height, embedded in a planarly layered medium. A continuous parametrization in terms of the homogeneous permittivity and the vertex coordinates of the polygons is employed. By combining the global Gabor frame in the spatial spectral Maxwell solver with the consistent parametrization of the structures, the underlying linear system of the Maxwell solver inherits all the continuity properties of the parametrization. Two synthetically generated test cases demonstrate the noise-robust reconstruction of the parameters by surpassing the reconstruction capabilities of traditional imaging methods at signal-to-noise ratios up to -3d B with geometrical errors below λ/7, where λ is the illumination wavelength. For signal-to-noise ratios of 10 dB, the geometrical parameters are reconstructed with errors of approximately λ/60, and the material properties are reconstructed with errors of around 0.03%. The continuity properties of the Maxwell solver and the use of prior information are key contributors to these results.
RESUMEN
In relation to the computation of electromagnetic scattering in layered media by the Gabor-frame-based spatial spectral Maxwell solver, we present two methods to compute the Gabor coefficients of the transverse cross section of three-dimensional scattering objects with high accuracy and efficiency. The first method employs the analytically obtained two-dimensional Fourier transform of the cross section of a scattering object, which we describe by two-dimensional characteristic functions, in combination with the traditional discrete Gabor transform method for computing the Gabor coefficients. The second method concerns the expansion of the so-called dual window function to compute the Gabor coefficients by employing the divergence theorem. Both methods utilize (semi)-analytical approaches to overcome the heavy oversampling requirement of the traditional discrete Gabor transform method in the case of discontinuous functions. Numerical results show significant improvement in terms of accuracy and computation time for these two methods against the traditional discrete Gabor transform method.
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Beyond fifth generation (5G) communication systems aim towards data rates in the tera bits per second range, with improved and flexible coverage options, introducing many new technological challenges in the fields of network architecture, signal pro- cessing, and radio frequency front-ends. One option is to move towards cell-free, or distributed massive Multiple-Input Multiple-Output (MIMO) network architectures and highly integrated front-end solutions. This paper presents an outlook on be- yond 5G distributed massive MIMO communication systems, the signal processing, characterisation and simulation challenges, and an overview of the state of the art in millimetre wave antennas and electronics.
RESUMEN
We present two adapted formulations, one tailored to isotropic media and one for general anisotropic media, of the normal vector field framework previously introduced to improve convergence near arbitrarily shaped material interfaces in spectral simulation methods for periodic scattering geometries. The adapted formulations enable the definition and generation of the normal vector fields to be confined to a region of prolongation that includes the material interfaces but is otherwise limited. This allows for a more flexible application of geometrical transformations like rotation and translation per scattering object in the unit cell. Moreover, these geometrical transformations enable a cut-and-connect strategy to compose general geometries from elementary building blocks. The entire framework gives rise to continuously parameterized geometries.
RESUMEN
We propose a modular electromagnetic modeling procedure for large finite electromagnetic band-gap (EBG) structures, called linear embedding via Green's operators. It is a diakoptic method based on the Huygens-Schelkunoff principle involving equivalent boundary current sources that electromagnetically characterize the enclosed domain of arbitrary shapes, as if it were a multiport system. In a cascade of embedding steps, separate reusable domains are combined to form larger domains. Device design often involves tuning local medium properties in a compact designated domain with a large environment. Through an additional embedding step the equivalent sources describing the environment can be transferred to the boundary of the designated domain, rendering subsequent design steps very fast. This two-stage optimization process is applied in the design of an EBG power splitter.