Recent Progress in MEMS Fiber-Optic Fabry-Perot Pressure Sensors.

Pressure sensing plays an important role in many industrial fields; conventional electronic pressure sensors struggle to survive in the harsh environment. Recently microelectromechanical systems (MEMS) fiber-optic Fabry-Perot (FP) pressure sensors have attracted great interest. Here we review the basic principles of MEMS fiber-optic FP pressure sensors and then discuss the sensors based on different materials and their industrial applications. We also introduce recent progress, such as two-photon polymerization-based 3D printing technology, and the state-of-the-art in this field, e.g., sapphire-based sensors that work up to 1200 °C. Finally, we discuss the limitations and opportunities for future development.

Fiber-tip Fabry-Pérot interferometer with a graphene-Au-Pd cantilever for trace hydrogen sensing.

The widespread utilization of hydrogen energy has increased the demand for trace hydrogen detection. In this work, we propose a fiber-optic hydrogen sensor based on a Fabry-Pérot Interferometer (FPI) consisting of a fiber-tip graphene-Au-Pd submicron film cantilever. The palladium (Pd) film on the cantilever surface is used as hydrogen-sensitive material to obtain high sensing sensitivity. Hydrogen sensing is realized by monitoring the resonant frequency shift of the FPI introduced by the interaction between Pd film and hydrogen molecules. The hydrogen sensor is proven for low-hydrogen-concentration detection with hydrogen concentrations in the range of 0-1000 ppm, and experimentally characterized by a highest sensitivity of 30.3 pm ppm-1 in a low hydrogen concentration of 0-100 ppm, which is more than two orders higher than for previously reported FPI-based sensors. In real-time hydrogen monitoring, a rapid reaction time of 31.5 s was achieved. This work provides a compact all-optical solution for the safe detection of low hydrogen concentrations, which is an interesting alternative for trace hydrogen detection in the aerospace industry, energy production, and medical applications.

Ampere force fiber optic magnetic field sensor using a Fabry-Perot interferometer.

The paper presents a novel fiber-optic vector magnetic field sensor using a Fabry-Perot interferometer, which consists of an optical fiber end face and a graphene/Au membrane suspended on the ceramic ferrule end face. A pair of gold electrodes are fabricated on the ceramic ferrule by femtosecond laser to transmit electrical current to the membrane. Ampere force is generated when an electrical current flows through the membrane in a perpendicular magnetic field. The change in Ampere force causes a shift in the resonance wavelength in the spectrum. In the magnetic field intensity range of 0 ∼ 180 mT and 0 ∼ -180 mT, the as-fabricated sensor exhibits magnetic field sensitivity of 5.71 pm/mT and 8.07 pm/mT. The proposed sensor has great potential application in weak magnetic field measurements due to its compact structure, cost-effectiveness, ease to manufacture, and good sensing performance.

Femtosecond laser welding for robust and low loss optical fiber bonding.

Driven by the increasing demand for faster high-performance computing (HPC) networks and higher data center fabric transmission bandwidth, to favorite the needs of machine learning, data training, and computing, the adoption of co-packaged optics (CPO) and near-packaged optics (NPO) is one of the innovations to mitigate the slowing down of Moore's law. Because of the high temperature generated by the next generation of high-speed chips like switch ASICs, CPUs, and GPUs, coupling fibers to photonic integrated circuit (PIC) with traditional epoxy-based fiber arrays is becoming more challenging and problematic. Therefore, an epoxy-free bonding method using femtosecond laser welding borosilicate glass 3.3 and optical fibers is proposed and demonstrated. Then, a low loss and polarization independent fiber to fiber coupling was demonstrated to show the reliability of bonding. In the experiment, a V groove is used for aligning and positioning two fibers. After welding, the minimum coupling loss and polarization dependent loss is 0.347 dB and below 0.1 dB respectively. The average shear force limit of the welded samples with 0.5 mm welding length is measured to be as high as ∼0.719 N. This technology could be used for epoxy-free based edge coupling the high density multi-fibers with PIC and has potential of scalable manufacturability through automation.

Nano-optomechanical Resonators for Sensitive Pressure Sensing.

Nanomechanical sensors made from suspended graphene are sensitive to pressure changes. However, these devices typically function by obtaining an electrical signal based on the static displacement of a suspended graphene membrane and so, in practice, have limited sensitivity and operational range. The present work demonstrates an optomechanical Au/graphene membrane-based gas pressure sensor with ultrahigh sensitivity. This sensor comprises a suspended Au/graphene membrane appended to a section of hollow-core fiber to form a sealed Fabry-Pérot cavity. In contrast to conventional nanomechanical pressure sensors, pressure changes are monitored via resonant sensing with an optical readout. A miniature pressure sensor based on this principle was able to detect an ultrasmall pressure difference of 1 × 10-7 mbar in the ultrahigh-vacuum region with a pressure range of 4.1 × 10-5 to 8.3 × 10-6 mbar. Furthermore, this pressure sensor can work over an extended pressure range of 7 × 10-6 mbar to 1000 mbar at room temperature, outperforming commercial pressure sensors. Similar results were obtained using both the fundamental and higher-order resonant frequencies but with the latter providing improved sensitivity. This sensor has a wide range of potential applications, including indoor navigation, altitude monitoring, and motion detection.

Highly Sensitive Hydrogen Sensor Based on an Optical Driven Nanofilm Resonator.

Nanofilm resonators combine ultracompact and highly mechanically sensitive properties, making them intriguing devices for sensing applications. For trace hydrogen detection, we demonstrate an optomechanical nanofilm resonator by employing a Pd- and Au-decorated graphene onto a fiber end facet. The Pd layer is a sensitive layer for selective absorption of hydrogen. Hydrogen sensing is achieved by all-optical measuring of the resonant frequencies shift of the optomechanical nanofilm resonator induced by hydrogen-related mechanical stress change. Using the approach, we realize highly sensitive hydrogen sensing at room temperature with a low detection limit, challenging the state-of-the-art. When the measured hydrogen concentration increases from 0 to 1000 ppm (v/v), the mechanical resonance frequencies of the sensor at 511.7 kHz, 1253.4 kHz, and 2231.7 kHz blue-shift by 100.4 kHz, 257.5 kHz, and 400.6 kHz, respectively. The response and recovery time are 120.3 and 91.3 s at a 1000 ppm hydrogen concentration. Such a sensor exhibits a low detection limit of 741 ppb and good repeatability in the measurement process, which makes the practical application of the sensor possible.

Fiber optic hydrogen sensor based on a Fabry-Perot interferometer with a fiber Bragg grating and a nanofilm.

Hydrogen is widely used in industrial production and clinical medicine, and as fuel. Hydrogen becomes explosive when the hydrogen-air mixture ranges from 4 to 76 vol%; thus, a rapid hydrogen concentration measurement is particularly important in practical applications. We present a novel fiber optic hydrogen sensor with fast response fabricated from a graphene-Au-Pd sandwich nanofilm and an ultrashort fiber Bragg grating. The response time is only 4.3 s at a 3.5 vol% hydrogen concentration. When the measured hydrogen concentration was increased from 0 to 4.5 vol%, the optical resonance dip in the sensor near 1550 nm shifted by 290 pm. In addition, the sensor has an insertion loss of only -2.22 dB, a spectral contrast of 10.8 dB, and a spectral finesse of 5. Such a flexible, fast-response sensor is expected to be used in the development of hydrogen sensors with low power consumption.

A High-Strength Strain Sensor Based on a Reshaped Micro-Air-Cavity.

We demonstrate a high-strength strain sensor based on a micro-air-cavity reshaped through repeating arc discharge. The strain sensor has a micro-scale cavity, approximate plane reflection, and large wall thickness, contributing to a broad free spectrum range ~36 nm at 1555 nm, high fringe contrast ~38 dB, and super-high mechanical robustness, respectively. A sensitivity of ~2.39 pm/µÎµ and a large measurement range of 0 to 9800 µÎµ are achieved for this strain sensor. The strain sensor has a high strength, e.g., the tensile strain applied the sensor is up to 10,000 µÎµ until the tested the single-mode fiber is broken into two sections. In addition, it exhibited low thermal sensitivity of less than 1.0 pm/°C reducing the cross-sensitivity between tensile strain and temperature.