Dual-wavelength Fourier ptychography using a single LED.

We propose dual-wavelength Fourier ptychography for topographic measurement. To extend the axial measurement range, a single light-emitting diode (LED) and two appropriate bandpass filters are employed. This provides a speckle-free phase image, and reduces the possibility of a systematic error, which yields a high-quality topographic image. The proposed system can measure the surface topography in the range of nano- to micro-structures. The performance of the system is experimentally verified.

Dual-wavelength off-axis digital holography using a single light-emitting diode.

We propose a new low-coherence interferometry system for dual-wavelength off-axis digital holography. By utilizing diffraction gratings, two beams with narrower bandwidths and different center wavelengths could be filtered in a single light-emitting diode. The characteristics of the system are analytically determined to extend the coherence length and field-of-view enough for off-axis configuration. The proposed system enables the fast and accurate measurement of the surface profile with more than a micrometer step height and less noise. The performance of the system is verified by the experimental results of a standard height sample.

Dual-wavelength digital holography with a single low-coherence light source.

We propose a measurement system using dual-wavelength digital holography and low-coherence interferometry to measure micro- and nanostructure surface heights. To achieve an extended axial step-measurement range and better image quality, a single light-emitting diode generates two distinct light sources by filtering different center wavelengths and narrower bandwidths. The system can measure surface profile with higher step heights and lower speckle noise in a large field-of-view. Using single-source lighting and a simple configuration, the method supports compactly configured and lower-cost surface-topography measurement systems applicable in various fields. Experimental results for a standard step sample verify the system's performance.

Increasing the storage density of a page-based holographic data storage system by image upscaling using the PSF of the Nyquist aperture.

We introduce an image upscaling method that reduces bit errors caused by Nyquist apertures. Nyquist apertures used for higher storage densities generate optical aberrations and degrade the quality of the image that is recorded on the medium. Here, to correct the bit errors caused by the Nyquist aperture, an image upscaling method is used to restore the degraded image in the enhanced spatial frequency domain using its point spread function (PSF) as a restoration filter. The proposed method reduces the bit error rate (BER) significantly and hence allows higher storage densities.

Single crystal-like Si patterns for photonic crystal color filters.

A novel fabrication method for a two-dimensional photonic crystal color filter based on guided mode resonance is proposed. An amorphous silicon layer deposited through the low-temperature plasma enhanced chemical vapor deposition (PECVD) process is patterned into two-dimensional structures using low-cost nanoimprint lithography. It is then effectively crystallized using multi-shot excimer laser annealing at low energy. We have demonstrated analytically and experimentally that single crystal-like silicon patterns on a glass substrate can offer high-efficiency photonic crystal color filters for reflective display applications. The highly crystallized silicon patterning scheme presented here may be very attractive for a variety of devices requiring high carrier mobility and high optical efficiency.

Upscaling image resolution of compact imaging systems using wavefront coding and a property of the point-spread function.

We propose an image-resolution upscaling method for compact imaging systems. The image resolution is calculated using the resolving power of the optics and the pixel size of a digital image sensor. The resolution limit of the compact imaging system comes from its size and the number of allowed lenses. To upscale the image resolution but maintain the small size, we apply wavefront coding and image restoration. Conventional image restoration could not enhance the image resolution of the sensor. Here, we use the upscaled image of a wavefront-coded optical system and apply an image-restoration algorithm using a more precisely calculated point-spread function (PSF) as the deconvolution filter. An example of a wavefront-coded optical system with a 5-megapixel image sensor is given. The final image had a resolution equivalent to that of a 10-megapixel image using only four plastic lenses. Moreover, image degradation caused by hand motion could also be reduced using the proposed method.

A study on the realization of high resolution solid immersion lens-based near-field imaging optics by use of an annular aperture.

We report on the realization of solid immersion lens (SIL)-based near-field (NF) optics with an annular aperture, which is targeted to achieve high optical resolution. A numerical aperture (NA) = 1.84 hemisphere SIL-optics with an annular aperture achieves higher optical resolution than the conventional NA = 2.0 SIL-optics. The designed aperture is fabricated by photo-lithography and dry-etching technique. Experimental verification of the designed optics was performed through beam spot profile measurement under NF imaging conditions. A 15% smaller full-width-at-half-maximum spot diameter is obtained by the aperture. We verified that this method gives an improvement of the resolution in the optical imaging systems requiring higher resolution.

Multiple excitation of localized surface plasmon to create a 10 nm x 10 nm strong optical spot using an Au nanoparticle array-based ridge waveguide.

We present a description of a multiple excitation of localized surface plasmons (LSPs) from an Au nanoparticle (NP) array-based ridge waveguide to create a small optical spot size with an extremely strong intensity. Using a numerical finite-difference time-domain method, we find that the optical intensity of the ridge waveguide with an Au NP array is about 700% higher than that of a simple ridge waveguide. Moreover, the spacing between the NPs plays an important role in the multiple excitation of LSPs. The spot size, calculated at FWHM, is 10 nm x 10 nm at a distance of 5 nm from the exit plane.

Nanoimprinted photonic crystal color filters for solar-powered reflective displays.

A novel concept for reflective displays that uses two-dimensional photonic crystals with subwavelength gratings is introduced. A solar-powered reflective display with photonic crystal color filters was analyzed by a theoretical approach. We fabricated the photonic crystal color filters on a glass substrate by using low-cost nanoimprint lithography and multi-scan excimer laser annealing to produce RGB color filters through a single patterning process. The theoretical and experimental results show that the color filters have high reflectance and angular tolerance, which was qualitatively confirmed by chromaticity coordination analysis.

Cover-layer-protected solid immersion lens-based near-field recording with an annular aperture.

Currently, data recording density in cover-layer-protected near-field-recording (NFR) and multiple-recording layered NFR optical data storage technology is limited by the difficulty in obtaining high-refractive-index cover layer materials. In addition, with the exception of improved resolution, the higher the numerical aperture (NA), the poorer the optical characteristics. However, in this study, we present novel cover-layer-protected solid immersion lens (SIL)-based NFR optics that provide superior optical performance with higher recording density, greatly enhanced focal depth, and less sensitivity to near-field air-gap-distance variation by modulating the amplitude and phase in the entrance pupil using annular pupil zones. Using an annular aperture consisting of three concentric annular zones to effect amplitude and phase modulation, the 1.45 NA cover-layer-protected SIL-based NFR optics achieved a data recording density as high as that of conventional 1.80 NA SIL-based NFR optics. These 1.45 NA optics yielded a full-width at half-maximum (FWHM) spot size of 0.315 lambda, a focal depth of 0.82 lambda, a focused beam spot sensitivity to air-gap-distance within the near-field region of 0.04 lambda, and a sidelobe intensity lower than 7%. In comparison with conventional 1.80 NA SIL-based NFR optics, the annular aperture optics achieved 3.5 times longer focal depth and much lower focused beam spot sensitivity to air-gap distance while maintaining the same high resolution. The introduction of this novel specially designed NFR optics could greatly improve data capacity in multiple-recording layered NFR.

Feasibility study of the application of radially polarized illumination to solid immersion lens-based near-field optics.

We analyzed the behavior of the electric field in a focal plane consisting of a solid immersion lens (SIL), an air gap, and a measurement sample for radially polarized illumination in SIL-based near-field optics with an annular aperture. The analysis was based on the Debye diffraction integral and multiple beam interference. For SIL-based near-field optics whose NA is higher than unity, radially polarized light generates a smaller beam spot on the bottom surface of a SIL than circularly polarized light; however, the beam spot on the measurement sample is broadened with a more dominant transverse electric field. By introducing an annular aperture technique, it is possible to decrease the effects of the transverse electric field, and therefore the size of the beam spot on the measurement sample can be small. This analysis could have various applications in near-field optical storage, near-field microscopy, lithography at ultrahigh resolution, and other applications that use SILs for high resolution.

Two-dimensional photonic crystal color filter development.

Reflective color filters using two-dimensional photonic crystals based on sub-wavelength gratings were proposed and constructed. Using low-cost nanoimprint lithography, an amorphous silicon layer was deposited through the low-temperature PECVD process and patterned into two-dimensional structures. The isolated amorphous silicon patterns were readily crystallized using a multi-shot excimer laser annealing at low energy. A study of the close relationship between color filter reflectance and silicon pattern crystallinity is introduced. Theoretical and experimental results show that the proposed color filters have high reflectance and, moreover, decrease the dependence on incident angle compared to one-dimensional photonic crystal color filters.

Effects of motion of an imaging system and optical image stabilizer on the modulation transfer function.

This paper analyzes the effects due to the angular motion of a small-sized imaging system equipped with an optical image stabilizer (OIS) on image quality. Accurate lens moving distances for the OIS required to compensate the ray distortion induced by the angular motion are determined. To calculate the associated modulation transfer function, the integrated and the compensated point spread functions are defined. Finally, the deterioration of the image resolution due to angular motion and the restorative performance of the OIS are analyzed by isolating seven types of angular motion.

Effects of fabrication errors in the diffractive optical element on the modulation transfer function of a hybrid lens.

Diffractive optical elements (DOEs) are often used to improve the performance of optical systems. However, when a blazed DOE is machined, shape errors can be generated in the discontinuity region of the DOE due to the finite radius of the processing tool. We simulated the effects of this shape error on the optical path and modulation transfer function (MTF) in a hybrid lens for a compact camera module. The decrease rate of the MTF was larger in the low-spatial-frequency domain and when the light entered at a low incident angle.

Breaking diffraction limit of a small f-number compact camera using wavefront coding.

We propose a resolution enhancement method for mobile small f-number compact imaging systems based on wavefront coding and superresolution image processing. Wavefront coding increases the focus depth of an optical system and produces point spread functions (PSFs) with similar characteristics at different field and defocus positions. The designed target wavefront is realized as a combination of wavefront errors of each rotationally symmetric lens, without including an additional phase plate. Finally, using one deconvolution filter containing all the characteristics of the PSFs, we achieve high resolution, breaking the diffraction limit of small f-number and the resolution limit of the image sensor by super-resolution image processing.

Effects of optical variables in immersion lens-based near-field optics.

We analyze the effects of optical variables, such as illumination state, focal position variation, near-field air-gap height, and refractive index mismatch, in immersion lens-based near-field optics on the resultant field propagation characteristics, including spot size, focal depth, and aberrations. First, to investigate the general behaviors of various incident polarization states, focused fields near the focal planes in simple two- or three-layered media structures are calculated under considerations of refractive index mismatch, geometric focal position variations, and air-gap height in a multi-layered medium. Notably, for solid immersion near-field optics, although purely TM polarized illumination generates a stronger and 15% smaller beam spot size in the focal region than in the case of circularly polarized incident light, the intensity of the focused field decreases sharply from the interface between air and the third medium. For the same optical configurations, we show that changes in geometric focal position to the recording or detecting medium increases focal depth. Finally, through focused field analysis on a ROM (read-only memory) and a RW (rewritable) medium, compound effects of considered variables are discussed. The resultant field propagation behaviors described in this study may be applicable to the design of either highly efficient reflection or transmission near-field optics for immersion lens based information storage, microscopy and lithographic devices.

Design and fabrication of diffractive optical elements by use of gray-scale photolithography.

Diffractive optical elements (DOEs) are key components in the miniaturization of optical systems because of their planarity and extreme thinness. We demonstrate the fabrication of DOEs by use of gray-scale photolithography with a high-energy-beam sensitive glass photomask. We obtained DOE lenses with continuous phase profiles as small as 800 microm in diameter and 5.9 microm in the outermost grating pitch by selecting a suitable optical density for each height level and optimizing the process variables. Microlenses patterned with eight levels and replicated by UV embossing with the polymer master mold showed a diffraction efficiency of 81.5%, which was sufficiently high for the devices to be used as optical pickups. The effects of deviations in diffraction efficiency between the DOE height and profile design were analyzed.