Comparative study of the roughness of optical surfaces and thin films by use of X-ray scattering and atomic force microscopy.
Appl Opt
; 38(4): 684-91, 1999 Feb 01.
Article
en En
| MEDLINE
| ID: mdl-18305664
ABSTRACT
The surface roughness of polished glass substrates and optical thin-film coatings is studied with atomic force microscopy and x-ray scattering. It is demonstrated that both methods permit the determination of power spectral density functions in a wide range of spatial frequencies. The results are in good quantitative agreement.
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01-internacional
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MEDLINE
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En
Revista:
Appl Opt
Año:
1999
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Article