Modeling of surface-wave discharges with cylindrical symmetry.

ABSTRACT

This paper presents the modeling of microwave (2.45GHz) discharges with cylindrical symmetry, produced in the absence of an external magnetic field by TM00 surface waves (SW) within either cylindrical or coaxial structures. A stationary, one-dimensional (radial) moment model (including the continuity and the momentum-transfer equations for electrons and positive ions, and the electron mean energy transport equations) is solved self-consistently coupled to Poisson's equation for the space-charge electrostatic field and the appropriated Maxwell's equations for the SW electromagnetic field. The model is solved for argon discharges over a broad range of operating conditions Average electron densities from 10;{11}to3x10;{12}cm;{-3} and gas pressures from 10;{-2}to5Torr . Results are compared to those of a simplified classical model that disregards charge separation near discharge boundaries, ignoring also the development of electron-plasma resonances caused by the severe electron density gradients within space-charge sheath regions. Simulations show that the presence of a sheath-resonance region has a strong influence on the values of the SW attenuation constant, particularly at low pressures and high electron densities, affecting also the local budget of the discharge power deposition (hence discharge maintenance).