Profile estimation for Pt submicron wire on rough Si substrate from experimental data.
Opt Express
; 20(19): 21678-86, 2012 Sep 10.
Article
en En
| MEDLINE
| ID: mdl-23037286
ABSTRACT
An efficient forward scattering model is constructed for penetrable 2D submicron particles on rough substrates. The scattering and the particle-surface interaction are modeled using discrete sources with complex images. The substrate micro-roughness is described by a heuristic surface transfer function. The forward model is applied in the numerical estimation of the profile of a platinum (Pt) submicron wire on rough silicon (Si) substrate, based on experimental Bidirectional Reflectance Distribution Function (BRDF) data.
Texto completo:
1
Colección:
01-internacional
Base de datos:
MEDLINE
Idioma:
En
Revista:
Opt Express
Asunto de la revista:
OFTALMOLOGIA
Año:
2012
Tipo del documento:
Article
País de afiliación:
Alemania