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Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper.
Wen, Liang Gong; Roussel, Philippe; Pedreira, Olalla Varela; Briggs, Basoene; Groven, Benjamin; Dutta, Shibesh; Popovici, Mihaela I; Heylen, Nancy; Ciofi, Ivan; Vanstreels, Kris; Østerberg, Frederik W; Hansen, Ole; Petersen, Dirch H; Opsomer, Karl; Detavernie, Christophe; Wilson, Christopher J; Elshocht, Sven Van; Croes, Kristof; Bömmels, Jürgen; Tokei, Zsolt; Adelmann, Christoph.
Afiliación
  • Wen LG; imec, Kapeldreef 75, 3001 Leuven, Belgium.
  • Roussel P; imec, Kapeldreef 75, 3001 Leuven, Belgium.
  • Pedreira OV; imec, Kapeldreef 75, 3001 Leuven, Belgium.
  • Briggs B; imec, Kapeldreef 75, 3001 Leuven, Belgium.
  • Groven B; imec, Kapeldreef 75, 3001 Leuven, Belgium.
  • Dutta S; imec, Kapeldreef 75, 3001 Leuven, Belgium.
  • Popovici MI; Department of Physics and Astronomy, KU Leuven , Celestijnenlaan 200D, 3001 Leuven, Belgium.
  • Heylen N; imec, Kapeldreef 75, 3001 Leuven, Belgium.
  • Ciofi I; imec, Kapeldreef 75, 3001 Leuven, Belgium.
  • Vanstreels K; imec, Kapeldreef 75, 3001 Leuven, Belgium.
  • Østerberg FW; imec, Kapeldreef 75, 3001 Leuven, Belgium.
  • Hansen O; Department of Micro- and Nanotechnology, Technical University of Denmark , Ørsteds Plads, 2800 Kgs. Lyngby, Denmark.
  • Petersen DH; Department of Micro- and Nanotechnology, Technical University of Denmark , Ørsteds Plads, 2800 Kgs. Lyngby, Denmark.
  • Opsomer K; Department of Micro- and Nanotechnology, Technical University of Denmark , Ørsteds Plads, 2800 Kgs. Lyngby, Denmark.
  • Detavernie C; imec, Kapeldreef 75, 3001 Leuven, Belgium.
  • Wilson CJ; Department of Solid-State Sciences, Ghent University , Krijgslaan 281, 9000 Gent, Belgium.
  • Elshocht SV; imec, Kapeldreef 75, 3001 Leuven, Belgium.
  • Croes K; imec, Kapeldreef 75, 3001 Leuven, Belgium.
  • Bömmels J; imec, Kapeldreef 75, 3001 Leuven, Belgium.
  • Tokei Z; imec, Kapeldreef 75, 3001 Leuven, Belgium.
  • Adelmann C; imec, Kapeldreef 75, 3001 Leuven, Belgium.
ACS Appl Mater Interfaces ; 8(39): 26119-26125, 2016 Oct 05.
Article en En | MEDLINE | ID: mdl-27598509
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Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: ACS Appl Mater Interfaces Asunto de la revista: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Año: 2016 Tipo del documento: Article País de afiliación: Bélgica
Buscar en Google
Añadir a Mi BVS
Imprimir
XML
PubMed Links

Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: ACS Appl Mater Interfaces Asunto de la revista: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Año: 2016 Tipo del documento: Article País de afiliación: Bélgica