Flexible Mid-infrared Photonic Circuits for Real-time and Label-Free Hydroxyl Compound Detection.
Sci Rep
; 9(1): 4153, 2019 03 11.
Article
en En
| MEDLINE
| ID: mdl-30858396
ABSTRACT
Chip-scale chemical detections were demonstrated by mid-Infrared (mid-IR) integrated optics made by aluminum nitride (AlN) waveguides on flexible borosilicate templates. The AlN film was deposited using sputtering at room temperature, and it exhibited a broad infrared transmittance up to λ = 9 µm. The AlN waveguide profile was created by microelectronic fabrication processes. The sensor is bendable because it has a thickness less than 30 µm that significantly decreases the strain. A bright fundamental mode was obtained at λ = 2.50-2.65 µm without mode distortion or scattering observed. By spectrum scanning at the -OH absorption band, the waveguide sensor was able to identify different hydroxyl compounds, such as water, methanol, and ethanol, and the concentrations of their mixtures. Real-time methanol monitoring was achieved by reading the intensity change of the waveguide mode at λ = 2.65 µm, which overlap with the stretch absorption of the hydroxyl bond. Due to the advantages of mechanical flexibility and broad mid-IR transparency, the AlN chemical sensor will enable microphotonic devices for wearables and remote biomedical and environmental detection.
Texto completo:
1
Colección:
01-internacional
Base de datos:
MEDLINE
Tipo de estudio:
Diagnostic_studies
Idioma:
En
Revista:
Sci Rep
Año:
2019
Tipo del documento:
Article
País de afiliación:
Estados Unidos