Highly Fluorinated Barium Titanate Nanoparticle Dispersion for Fabrication of Lithographically Patterned Thin Films.
Materials (Basel)
; 12(24)2019 Dec 05.
Article
en En
| MEDLINE
| ID: mdl-31817332
ABSTRACT
We report the synthesis, characterization, and photopatterning of high-k inorganic nanoparticles that are covered with highly fluorinated carboxylic acid and, as a result, are solution-processable in fluorous liquids. Barium titanate (BTO) nanoparticles, 7-8 nm in diameter, were prepared under solvothermal conditions and were surface-modified with perfluoroalkyl ether-type carboxylic acid molecules via ligand-exchange reactions. Thin films with a high dielectric constant (9.27 at 1 kHz) were achieved by spin-coating homogeneous solutions of BTO nanoparticles in a fluorous solvent (HFE-7500). Additionally, electron-beam lithography and photolithography were applied to the thin films of BTO nanoparticles, yielding BTO patterns with scales of 300 nm and 5 µm, respectively. Thus, an approach for a chemically non-damaging solution process of inorganic materials for device implementation was successfully demonstrated.
Texto completo:
1
Colección:
01-internacional
Base de datos:
MEDLINE
Idioma:
En
Revista:
Materials (Basel)
Año:
2019
Tipo del documento:
Article