Self-Terminated Surface Monolayer Oxidation Induced Robust Degenerate Doping in MoTe<sub>2</sub> for Low Contact Resistance.

Liu, Xiaochi; Qu, Deshun; Yuan, Yahua; Sun, Jian; Yoo, Won Jong

Self-Terminated Surface Monolayer Oxidation Induced Robust Degenerate Doping in MoTe₂ for Low Contact Resistance.

Liu, Xiaochi; Qu, Deshun; Yuan, Yahua; Sun, Jian; Yoo, Won Jong.

Afiliación

Liu X; School of Physics and Electronics, Central South University, 932 South Lushan Road, Changsha 410083, China.
Qu D; SKKU Advanced Institute of Nano-Technology (SAINT), Sungkyunkwan University, 2066 Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do 16419, Republic of Korea.
Yuan Y; School of Physics and Electronics, Central South University, 932 South Lushan Road, Changsha 410083, China.
Sun J; School of Physics and Electronics, Central South University, 932 South Lushan Road, Changsha 410083, China.
Yoo WJ; SKKU Advanced Institute of Nano-Technology (SAINT), Sungkyunkwan University, 2066 Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do 16419, Republic of Korea.

ACS Appl Mater Interfaces ; 12(23): 26586-26592, 2020 Jun 10.

Article en En | MEDLINE | ID: mdl-32410440

Palabras clave

contact resistance; degenerate doping; molybdenum ditelluride; oxygen plasma; self-terminated oxidation; surface oxidation

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: ACS Appl Mater Interfaces Asunto de la revista: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Año: 2020 Tipo del documento: Article País de afiliación: China

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