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Curved Structure of Si by Improving Etching Direction Controllability in Magnetically Guided Metal-Assisted Chemical Etching.
Kim, Tae Kyoung; Bae, Jee-Hwan; Kim, Juyoung; Cho, Min Kyung; Kim, Yu-Chan; Jin, Sungho; Chun, Dongwon.
Afiliación
  • Kim TK; Materials Science and Engineering, University of California at San Diego, 9500 Gilman Dr, La Jolla, CA 92093, USA.
  • Bae JH; Advanced Analysis Center, Korea Institute of Science and Technology (KIST), Seoul 02792, Korea.
  • Kim J; Advanced Analysis Center, Korea Institute of Science and Technology (KIST), Seoul 02792, Korea.
  • Cho MK; Advanced Analysis Center, Korea Institute of Science and Technology (KIST), Seoul 02792, Korea.
  • Kim YC; Center for Biomaterials, Biomedical Research Institute, Korea Institute of Science and Technology (KIST), Seoul 02792, Korea.
  • Jin S; Materials Science and Engineering, University of California at San Diego, 9500 Gilman Dr, La Jolla, CA 92093, USA.
  • Chun D; Advanced Analysis Center, Korea Institute of Science and Technology (KIST), Seoul 02792, Korea.
Micromachines (Basel) ; 11(8)2020 Jul 30.
Article en En | MEDLINE | ID: mdl-32751667
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2020 Tipo del documento: Article País de afiliación: Estados Unidos
Texto completo
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2020 Tipo del documento: Article País de afiliación: Estados Unidos