Anomaly Detection Using Signal Segmentation and One-Class Classification in Diffusion Process of Semiconductor Manufacturing.

Chang, Kyuchang; Yoo, Youngji; Baek, Jun-Geol

Chang, Kyuchang; Yoo, Youngji; Baek, Jun-Geol.

Afiliación

Chang K; Department of Industrial and Management Engineering, Korea University, Seoul 02841, Korea.
Yoo Y; Samsung Electronics Co., Ltd., Hwaseong-si 18448, Korea.
Baek JG; Department of Industrial and Management Engineering, Korea University, Seoul 02841, Korea.

Sensors (Basel) ; 21(11)2021 Jun 04.

Article en En | MEDLINE | ID: mdl-34199809

Asunto(s)

Algoritmos; Semiconductores; Difusión

Palabras clave

anomaly detection; fault detection and classification (FDC); isolation forest (iF); local outlier factor (LOF); one-class classification (OCC); signal segmentation

Texto completo

Añadir a Mi BVS

Imprimir

XML

PubMed Links

Buscar en Google

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Asunto principal: Semiconductores / Algoritmos Tipo de estudio: Diagnostic_studies / Prognostic_studies Idioma: En Revista: Sensors (Basel) Año: 2021 Tipo del documento: Article

Texto completo

Añadir a Mi BVS

Imprimir

XML

PubMed Links

Buscar en Google