Millimeter-scale focal length tuning with MEMS-integrated meta-optics employing high-throughput fabrication.
Sci Rep
; 12(1): 5385, 2022 03 30.
Article
en En
| MEDLINE
| ID: mdl-35354839
ABSTRACT
Miniature varifocal lenses are crucial for many applications requiring compact optical systems. Here, utilizing electro-mechanically actuated 0.5-mm aperture infrared Alvarez meta-optics, we demonstrate 3.1 mm (200 diopters) focal length tuning with an actuation voltage below 40 V. This constitutes the largest focal length tuning in any low-power electro-mechanically actuated meta-optic, enabled by the high energy density in comb-drive actuators producing large displacements at relatively low voltage. The demonstrated device is produced by a novel nanofabrication process that accommodates meta-optics with a larger aperture and has improved alignment between meta-optics via flip-chip bonding. The whole fabrication process is CMOS compatible and amenable to high-throughput manufacturing.
Texto completo:
1
Colección:
01-internacional
Base de datos:
MEDLINE
Asunto principal:
Sistemas Microelectromecánicos
/
Cristalino
/
Lentes
Idioma:
En
Revista:
Sci Rep
Año:
2022
Tipo del documento:
Article
País de afiliación:
Estados Unidos