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Fabrication of Aluminum Oxide Thin-Film Devices Based on Atomic Layer Deposition and Pulsed Discrete Feed Method.
Lin, Shih-Chin; Wang, Ching-Chiun; Tien, Chuen-Lin; Tung, Fu-Ching; Wang, Hsuan-Fu; Lai, Shih-Hsiang.
Afiliación
  • Lin SC; Mechanical and Systems Research Lab, Industrial Technology Research Institute, Hsinchu 310401, Taiwan.
  • Wang CC; Mechanical and Systems Research Lab, Industrial Technology Research Institute, Hsinchu 310401, Taiwan.
  • Tien CL; Department of Electrical Engineering, Feng Chia University, Taichung 40724, Taiwan.
  • Tung FC; Mechanical and Systems Research Lab, Industrial Technology Research Institute, Hsinchu 310401, Taiwan.
  • Wang HF; Mechanical and Systems Research Lab, Industrial Technology Research Institute, Hsinchu 310401, Taiwan.
  • Lai SH; Mechanical and Systems Research Lab, Industrial Technology Research Institute, Hsinchu 310401, Taiwan.
Micromachines (Basel) ; 14(2)2023 Jan 21.
Article en En | MEDLINE | ID: mdl-36837979
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2023 Tipo del documento: Article País de afiliación: Taiwán
Texto completo
Añadir a Mi BVS
Imprimir
XML
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2023 Tipo del documento: Article País de afiliación: Taiwán