Growth Control Strategy of Hydrogen-Containing Nanocrystalline Carbon Films during Plasma-Enhanced Chemical Vapor Deposition based on Molecular Dynamics-Monte Carlo Simulations.

Che, Ju; Yi, Peiyun; Deng, Yujun; Zhang, Di; Peng, Linfa; Lai, Xinmin

Che, Ju; Yi, Peiyun; Deng, Yujun; Zhang, Di; Peng, Linfa; Lai, Xinmin.

Afiliación

Che J; State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240, P. R. China.
Yi P; State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240, P. R. China.
Deng Y; State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240, P. R. China.
Zhang D; State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240, P. R. China.
Peng L; State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai 200240, P. R. China.
Lai X; Shanghai Key Laboratory of Digital Manufacture for Thin-Walled Structures, Shanghai Jiao Tong University, Shanghai 200240, P. R. China.

ACS Appl Mater Interfaces ; 15(38): 45475-45484, 2023 Sep 27.

Article en En | MEDLINE | ID: mdl-37703433

Palabras clave

H:C ratio; deposition growth mechanisms; growth control strategy; hybrid molecular dynamics-Monte Carlo simulations; hydrogen-containing nanocrystalline carbon films; process optimization

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Contexto en salud: 1_ASSA2030 Problema de salud: 1_financiamento_saude Tipo de estudio: Prognostic_studies Idioma: En Revista: ACS Appl Mater Interfaces Asunto de la revista: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Año: 2023 Tipo del documento: Article

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