Temperature-robust optical microphone with a compact grating interferometric module.

The high demand for advanced acoustic sensors has prompted optical microphones to become a current research hotspot; this is especially the case in light of the performance of existing electroacoustic microphones having reached the ceiling. In this work, a thermally stable optical microphone has been developed for sensitive detection of low-frequency acoustic signals. The microphone was prepared using a prestressed nickel diaphragm and a compact grating interferometric module. The adjacent surfaces of the diaphragm and grating form a short Fabry-Perot cavity, which makes the microphone robust to ambient temperature fluctuation due to the reduced thermal drift of its operating point relative to the quadrature point of the interferometer. The cavity length-operating wavelength relationship of the microphone operating at the quadrature point was obtained. The performance of the prepared microphone was tested using various methods. Experimental results show that the microphone enables stable operation at the quadrature point over a wide range of temperatures from 0°C to 60°C with low signal distortion and high sensitivity. The response of the prepared optical microphone to low-frequency drone noise was measured and compared with that obtained with a commercial electret condenser microphone.