Sub-Nanometer Depth Profiling of Native Metal Oxide Layers Within Single Fixed-Angle X-Ray Photoelectron Spectra.

Wortmann, Martin; Viertel, Klaus; Westphal, Michael; Graulich, Dominik; Yang, Yang; Gärner, Maik; Schmalhorst, Jan; Frese, Natalie; Kuschel, Timo

Wortmann, Martin; Viertel, Klaus; Westphal, Michael; Graulich, Dominik; Yang, Yang; Gärner, Maik; Schmalhorst, Jan; Frese, Natalie; Kuschel, Timo.

Afiliación

Wortmann M; Faculty of Physics, Bielefeld University, Universitätsstraße 25, 33615, Bielefeld, Germany.
Viertel K; Faculty of Engineering and Mathematics, Bielefeld University of Applied Sciences and Arts, Interaktion 1, 33619, Bielefeld, Germany.
Westphal M; Faculty of Physics, Bielefeld University, Universitätsstraße 25, 33615, Bielefeld, Germany.
Graulich D; Faculty of Physics, Bielefeld University, Universitätsstraße 25, 33615, Bielefeld, Germany.
Yang Y; Faculty of Physics, Bielefeld University, Universitätsstraße 25, 33615, Bielefeld, Germany.
Gärner M; Faculty of Physics, Bielefeld University, Universitätsstraße 25, 33615, Bielefeld, Germany.
Schmalhorst J; Faculty of Physics, Bielefeld University, Universitätsstraße 25, 33615, Bielefeld, Germany.
Frese N; Department of Physics and Astronomy, Watanabe Hall, University of Hawaii, 2505 Correa Road, Honolulu, HI, 96822, USA.
Kuschel T; Faculty of Physics, Bielefeld University, Universitätsstraße 25, 33615, Bielefeld, Germany.

Small Methods ; 8(3): e2300944, 2024 Mar.

Article en En | MEDLINE | ID: mdl-38009726

Palabras clave

X-ray photoelectron spectroscopy; depth profiling; modeling; native oxide layer; thickness measurement

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Small Methods Año: 2024 Tipo del documento: Article País de afiliación: Alemania

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