Complex refractive-index measurement based on Fresnel's equations and the uses of heterodyne interferometry.

ABSTRACT

The phase difference between s and p polarization of the light reflected from a material is used for measuring the material's complex refractive index. First, two phase differences that correspond to two different incidence angles are measured by heterodyne interferometry. Then these two phase differences are substituted into Fresnel's equations, and a set of simultaneous equations is obtained. Finally, the equations are solved by use of a personal computer by a numerical analysis technique, and the complex refractive index of the material can be estimated.