Atomic force microscopy data of novel high-k hydrocarbon films synthesized on Si wafers for gate dielectric applications.
Data Brief
; 30: 105652, 2020 Jun.
Article
em En
| MEDLINE
| ID: mdl-32395596
ABSTRACT
This article presents data obtained from the atomic force microscopy (AFM) images of ultrathin high-k hydrocarbon (HC) films. The high-k HC films were synthesized on Si(100) wafers at various growth temperatures by using inductively-coupled plasma chemical vapor deposition with CH4 gas and a gas mixture consisting of 10% H2 and 90% Ar. The AFM images were obtained by tapping mode. The AFM results provide the surface topography, roughness, and thickness of the HC films as a function of growth temperature, which are essential data for high-k gate dielectrics of metal-insulator-semiconductor device applications. This data article is related to the article entitled, "Novel high-k gate dielectric properties of ultrathin hydrocarbon films for next-generation metal-insulator-semiconductor devices" (Kim et al., 2020) [1].
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01-internacional
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MEDLINE
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En
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Data Brief
Ano de publicação:
2020
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Article