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Photonic-dispersion neural networks for inverse scattering problems.
Li, Tongyu; Chen, Ang; Fan, Lingjie; Zheng, Minjia; Wang, Jiajun; Lu, Guopeng; Zhao, Maoxiong; Cheng, Xinbin; Li, Wei; Liu, Xiaohan; Yin, Haiwei; Shi, Lei; Zi, Jian.
Afiliação
  • Li T; State Key Laboratory of Surface Physics, Key Laboratory of Micro- and Nano-Photonics Structures (Ministry of Education) and Department of Physics, Fudan University, Shanghai 200433, China.
  • Chen A; Shanghai Engineering Research Center of Optical Metrology for Nano-fabrication (SERCOM), Shanghai 200433, China.
  • Fan L; Shanghai Engineering Research Center of Optical Metrology for Nano-fabrication (SERCOM), Shanghai 200433, China.
  • Zheng M; State Key Laboratory of Surface Physics, Key Laboratory of Micro- and Nano-Photonics Structures (Ministry of Education) and Department of Physics, Fudan University, Shanghai 200433, China.
  • Wang J; Shanghai Engineering Research Center of Optical Metrology for Nano-fabrication (SERCOM), Shanghai 200433, China.
  • Lu G; State Key Laboratory of Surface Physics, Key Laboratory of Micro- and Nano-Photonics Structures (Ministry of Education) and Department of Physics, Fudan University, Shanghai 200433, China.
  • Zhao M; Shanghai Engineering Research Center of Optical Metrology for Nano-fabrication (SERCOM), Shanghai 200433, China.
  • Cheng X; State Key Laboratory of Surface Physics, Key Laboratory of Micro- and Nano-Photonics Structures (Ministry of Education) and Department of Physics, Fudan University, Shanghai 200433, China.
  • Li W; Shanghai Engineering Research Center of Optical Metrology for Nano-fabrication (SERCOM), Shanghai 200433, China.
  • Liu X; Shanghai Engineering Research Center of Optical Metrology for Nano-fabrication (SERCOM), Shanghai 200433, China.
  • Yin H; State Key Laboratory of Surface Physics, Key Laboratory of Micro- and Nano-Photonics Structures (Ministry of Education) and Department of Physics, Fudan University, Shanghai 200433, China.
  • Shi L; Shanghai Engineering Research Center of Optical Metrology for Nano-fabrication (SERCOM), Shanghai 200433, China.
  • Zi J; Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China.
Light Sci Appl ; 10(1): 154, 2021 Jul 27.
Article em En | MEDLINE | ID: mdl-34315850
Inferring the properties of a scattering objective by analyzing the optical far-field responses within the framework of inverse problems is of great practical significance. However, it still faces major challenges when the parameter range is growing and involves inevitable experimental noises. Here, we propose a solving strategy containing robust neural-networks-based algorithms and informative photonic dispersions to overcome such challenges for a sort of inverse scattering problem-reconstructing grating profiles. Using two typical neural networks, forward-mapping type and inverse-mapping type, we reconstruct grating profiles whose geometric features span hundreds of nanometers with nanometric sensitivity and several seconds of time consumption. A forward-mapping neural network with a parameters-to-point architecture especially stands out in generating analytical photonic dispersions accurately, featured by sharp Fano-shaped spectra. Meanwhile, to implement the strategy experimentally, a Fourier-optics-based angle-resolved imaging spectroscopy with an all-fixed light path is developed to measure the dispersions by a single shot, acquiring adequate information. Our forward-mapping algorithm can enable real-time comparisons between robust predictions and experimental data with actual noises, showing an excellent linear correlation (R2 > 0.982) with the measurements of atomic force microscopy. Our work provides a new strategy for reconstructing grating profiles in inverse scattering problems.

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Light Sci Appl Ano de publicação: 2021 Tipo de documento: Article País de afiliação: China

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Light Sci Appl Ano de publicação: 2021 Tipo de documento: Article País de afiliação: China
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