Oxygen and Nitrogen Transfer in Furnaces in Crystal Growth of Silicon by Czochralski and Directional Solidification Processes.

Kakimoto, Koichi; Liu, Xin; Nakano, Satoshi

Kakimoto, Koichi; Liu, Xin; Nakano, Satoshi.

Afiliação

Kakimoto K; Research Institute for Applied Mechanics (RIAM), Kyushu University, Fukuoka 816-8580, Japan.
Liu X; Research Institute for Applied Mechanics (RIAM), Kyushu University, Fukuoka 816-8580, Japan.
Nakano S; Research Institute for Applied Mechanics (RIAM), Kyushu University, Fukuoka 816-8580, Japan.

Materials (Basel) ; 15(5)2022 Mar 01.

Article em En | MEDLINE | ID: mdl-35269074

Palavras-chave

crystal growth; impurity; silicon; simulation; transfer

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Materials (Basel) Ano de publicação: 2022 Tipo de documento: Article País de afiliação: Japão

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