Van der Waals Layer Transfer of 2D Materials for Monolithic 3D Electronic System Integration: Review and Outlook.

Kim, Jun-Young; Ju, Xin; Ang, Kah-Wee; Chi, Dongzhi

Kim, Jun-Young; Ju, Xin; Ang, Kah-Wee; Chi, Dongzhi.

Afiliação

Kim JY; Institute of Materials Research and Engineering, Agency for Science, Technology and Research, 2 Fusionopolis Way, Singapore 138634, Singapore.
Ju X; Institute of Materials Research and Engineering, Agency for Science, Technology and Research, 2 Fusionopolis Way, Singapore 138634, Singapore.
Ang KW; Institute of Materials Research and Engineering, Agency for Science, Technology and Research, 2 Fusionopolis Way, Singapore 138634, Singapore.
Chi D; Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117583, Singapore.

ACS Nano ; 17(3): 1831-1844, 2023 Feb 14.

Article em En | MEDLINE | ID: mdl-36655854

Palavras-chave

metal-assisted layer transfer; monolithic three-dimensional integration; multifunctional three-dimensional integrated electronics; transition metal dichalcogenides; two-dimensional material template-assisted van der Waals transfer; two-dimensional materials; van der Waals layer transfer; wafer-scale and high-yield layer transfer

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Qualitative_research Idioma: En Revista: ACS Nano Ano de publicação: 2023 Tipo de documento: Article País de afiliação: Singapura

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