Robust Bottom-Up Gold Filling of Deep Trenches and Gratings.

Josell, D; Osborn, W; Williams, M E; Miao, H

Josell, D; Osborn, W; Williams, M E; Miao, H.

Afiliação

Josell D; Materials Science and Engineering Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.
Osborn W; Materials Measurement Science Division, National Institute of Standards and Technology, Gaithersburg, Maryland, 20899, USA.
Williams ME; Materials Science and Engineering Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.
Miao H; General Optics, LLC, Zionsville, IN 46077.

J Electrochem Soc ; 169(3)2022.

Article em En | MEDLINE | ID: mdl-36936547

Palavras-chave

Electroplating; Gold; Gratings; Superconformal

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: J Electrochem Soc Ano de publicação: 2022 Tipo de documento: Article País de afiliação: Estados Unidos

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