High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas.

With the advent of high volume manufacturing capabilities by extreme ultraviolet lithography, constant improvements in light source design and cost-efficiency are required. Currently, light intensity and conversion efficiency (CE) measurments are obtained by charged couple devices, faraday cups etc, but also phoshpor imaging plates (IPs) (BaFBr:Eu). IPs are sensitive to light and high-energy species, which is ideal for studying extreme ultraviolet (EUV) light from laser produced plasmas (LPPs). In this work, we used IPs to observe a large angular distribution (10°-90°). We ablated a tin target by high-energy lasers (1064 nm Nd:YAG, 1010 and 1011 W/cm2) to generate the EUV light. The europium ions in the IP were trapped in a higher energy state from exposure to EUV light and high-energy species. The light intensity was angular dependent; therefore excitation of the IP depends on the angle, and so highly informative about the LPP. We obtained high-space resolution (345 µm, 0.2°) angular distribution and grazing spectrometer (5-20 nm grate) data simultaneously at different target to IP distances (103 mm and 200 mm). Two laser systems and IP types (BAS-TR and BAS-SR) were also compared. The cosine fitting values from the IP data were used to calculate the CE to be 1.6% (SD ± 0.2) at 13.5 nm 2% bandwidth. Finally, a practical assessment of IPs and a damage issue are disclosed.

Difference in protein adsorption onto polymer films with or without thermal annealing.

Protein adsorptions onto non-annealed (NA) and thermally annealed (TA) polyetherimide films were examined by surface plasmon resonance measurements. Proteins adsorbed onto the NA films with smaller adsorption constants in comparison with the TA films. Neutron reflectivity measurements of the two films suggested that the outermost region of the NA films swelled with larger amounts of water molecules than the TA films. It is plausible that the aforementioned difference in the protein adsorption properties is derived from the difference in the interfacial aggregation structures of the two films.

Interfacial width in polymer bilayer films prepared by double-spin-coating and flotation methods.

A spin-coating method with the aid of selective solvents has been used to construct multilayer structures for organic devices under the assumption that the solvents do not invade a preformed structure. To confirm the assumption, we examined the interfacial width (lambda(i)) of model polymer bilayers, composed of polystyrene and perdeuterated poly(methyl methacrylate), prepared by spin-coating and flotation methods. Neutron reflectivity measurements revealed that the lambda(i) value was larger for the spin-coating method than for the flotation method. These results cast doubt on the validity of the assumption. This knowledge should be kept in mind when this method is applied to construct multilayer structures.

Nonsolvents cause swelling at the interface with poly(methyl methacrylate) films.

Density profiles of a perdeuterated poly(methyl methacrylate) (dPMMA) film spin-coated on a substrate in water, hexane, and methanol, which are "nonsolvents" for dPMMA, were examined along the direction normal to the interface by specular neutron reflectivity (NR). The interfaces of dPMMA with the liquids were diffuse in comparison with the pristine interface with air; the interfacial width with water was thicker than that with hexane. Interestingly, in water, the dPMMA film was composed of a swollen layer and the interior region, which also contained water, in addition to the diffused layer. The interface of dPMMA with hexane was sharper than that with water. Although there were slight indications of a swollen layer for the dPMMA in hexane, the solvent molecules did not penetrate significantly into the film. On the other hand, in methanol, the whole region of the dPMMA film was strikingly swollen. To conserve mass, the swelling of the film by the nonsolvents is accompanied by an increase in the film thickness. The change in the film thickness estimated by NR was in excellent accord with the results of direct observations using atomic force microscopy (AFM). The modulus of dPMMA in the vicinity of the interfaces with liquids was also examined on the basis of force-distance curves measured by AFM. The modulus decreased closer to the outermost region of the film. The extent to which the modulus decreased in the interfacial region was consistent with the amount of liquid sorbed into the film.