Nonvolatile Phase-Only Transmissive Spatial Light Modulator with Electrical Addressability of Individual Pixels.

Active metasurfaces with tunable subwavelength-scale nanoscatterers are promising platforms for high-performance spatial light modulators (SLMs). Among the tuning methods, phase-change materials (PCMs) are attractive because of their nonvolatile, threshold-driven, and drastic optical modulation, rendering zero-static power, crosstalk immunity, and compact pixels. However, current electrically controlled PCM-based metasurfaces are limited to global amplitude modulation, which is insufficient for SLMs. Here, an individual-pixel addressable, transmissive metasurface is experimentally demonstrated using the low-loss PCM Sb2Se3 and doped silicon nanowire heaters. The nanowires simultaneously form a diatomic metasurface, supporting a high-quality-factor (∼406) quasi-bound-state-in-the-continuum mode. A global phase-only modulation of ∼0.25π (∼0.2π) in simulation (experiment) is achieved, showing ten times enhancement. A 2π phase shift is further obtained using a guided-mode resonance with enhanced light-Sb2Se3 interaction. Finally, individual-pixel addressability and SLM functionality are demonstrated through deterministic multilevel switching (ten levels) and tunable far-field beam shaping. Our work presents zero-static power transmissive phase-only SLMs, enabled by electrically controlled low-loss PCMs and individual meta-molecule addressable metasurfaces.

Broadband thermal imaging using meta-optics.

Subwavelength diffractive optics known as meta-optics have demonstrated the potential to significantly miniaturize imaging systems. However, despite impressive demonstrations, most meta-optical imaging systems suffer from strong chromatic aberrations, limiting their utilities. Here, we employ inverse-design to create broadband meta-optics operating in the long-wave infrared (LWIR) regime (8-12 µm). Via a deep-learning assisted multi-scale differentiable framework that links meta-atoms to the phase, we maximize the wavelength-averaged volume under the modulation transfer function (MTF) surface of the meta-optics. Our design framework merges local phase-engineering via meta-atoms and global engineering of the scatterer within a single pipeline. We corroborate our design by fabricating and experimentally characterizing all-silicon LWIR meta-optics. Our engineered meta-optic is complemented by a simple computational backend that dramatically improves the quality of the captured image. We experimentally demonstrate a six-fold improvement of the wavelength-averaged Strehl ratio over the traditional hyperboloid metalens for broadband imaging.

Large field-of-view thermal imaging via all-silicon meta-optics.

A broad range of imaging and sensing technologies in the infrared require large field-of-view (FoV) operation. To achieve this, traditional refractive systems often employ multiple elements to compensate for aberrations, which leads to excess size, weight, and cost. For many applications, including night vision eye-wear, air-borne surveillance, and autonomous navigation for unmanned aerial vehicles, size and weight are highly constrained. Sub-wavelength diffractive optics, also known as meta-optics, can dramatically reduce the size, weight, and cost of these imaging systems, as meta-optics are significantly thinner and lighter than traditional refractive lenses. Here, we demonstrate 80° FoV thermal imaging in the long-wavelength infrared regime (8-12 µm) using an all-silicon meta-optic with an entrance aperture and lens focal length of 1 cm.

Large field-of-view short-wave infrared metalens for scanning fiber endoscopy.

Significance: The scanning fiber endoscope (SFE), an ultrasmall optical imaging device with a large field-of-view (FOV) for having a clear forward view into the interior of blood vessels, has great potential in the cardiovascular disease diagnosis and surgery assistance, which is one of the key applications for short-wave infrared biomedical imaging. The state-of-the-art SFE system uses a miniaturized refractive spherical lens doublet for beam projection. A metalens is a promising alternative that can be made much thinner and has fewer off-axis aberrations than its refractive counterpart. Aim: We demonstrate a transmissive metalens working at 1310 nm for a forward viewing endoscope to achieve a shorter device length and better resolution at large field angles. Approach: We optimize the metalens of the SFE system using Zemax, fabricate it using e-beam lithography, characterize its optical performances, and compare them with the simulations. Results: The SFE system has a resolution of ∼ 140 µ m at the center of field (imaging distance 15 mm), an FOV of ∼ 70 deg , and a depth-of-focus of ∼ 15 mm , which are comparable with a state-of-the-art refractive lens SFE. The use of the metalens reduces the length of the optical track from 1.2 to 0.86 mm. The resolution of our metalens-based SFE drops by less than a factor of 2 at the edge of the FOV, whereas the refractive lens counterpart has a ∼ 3 times resolution degradation. Conclusions: These results show the promise of integrating a metalens into an endoscope for device minimization and optical performance improvement.

Millimeter-scale focal length tuning with MEMS-integrated meta-optics employing high-throughput fabrication.

Miniature varifocal lenses are crucial for many applications requiring compact optical systems. Here, utilizing electro-mechanically actuated 0.5-mm aperture infrared Alvarez meta-optics, we demonstrate 3.1 mm (200 diopters) focal length tuning with an actuation voltage below 40 V. This constitutes the largest focal length tuning in any low-power electro-mechanically actuated meta-optic, enabled by the high energy density in comb-drive actuators producing large displacements at relatively low voltage. The demonstrated device is produced by a novel nanofabrication process that accommodates meta-optics with a larger aperture and has improved alignment between meta-optics via flip-chip bonding. The whole fabrication process is CMOS compatible and amenable to high-throughput manufacturing.

Correction to: MEMS-actuated metasurface Alvarez lens.

[This corrects the article DOI: 10.1038/s41378-020-00190-6.].

Droplet delivery and nebulization system using surface acoustic wave for mass spectrometry.

We present a piezoelectric transducer for standing wave surface acoustic wave nebulization (SW-SAWN). The transducer nebulizes nonvolatile analytes present in bulk fluid into ambient air after which the aerosolized drops are sampled by mass spectrometry (MS) for detection. Furthermore, we report for the first time integration of anisotropic ratchet conveyors (ARCs) on the SAWN transducer surfaces to automate the sample preparation and droplet delivery process. The ARCs employ micro-sized hydrophilic patterns on hydrophobic Cytop coatings. Moving, positioning, merging, and mixing of droplets at a designated nebulization location are demonstrated. To create the ARCs, we adopt parylene C as a stencil mask so that the hydrophobicity of the Cytop does not degrade during the microfabrication process. MS measurements with the SAWN chip are performed under different input frequencies. The SAWN transducer can provide a controllable nebulization rate by varying the input nebulization frequency while maintaining a reasonable signal to noise ratio for MS detection.

Photolithographic Patterning of Perovskite Thin Films for Multicolor Display Applications.

Metal halide perovskites are emerging as attractive materials for light-emitting diode (LED) applications. The external quantum efficiency (EQE) has experienced a rapid progress and reached over 21%, comparable to the state of the art organic and quantum dot LEDs. For metal halide perovskites, their simple solution-processing preparation, facile band gap tunability, and narrow emission line width provide another attractive route to harness their superior optoelectronic properties for multicolor display applications. In this work, we demonstrate a high-resolution, large-scale photolithographic method to pattern multicolor perovskite films. This approach is based on a dry lift-off process which involves the use of parylene as an intermediary and the easy mechanical peeling-off of parylene films on various substrates. Using this approach, we successfully fabricated multicolor patterns with red and green perovskite pixels on a single substrate, which could be further applied in liquid crystal displays (LCDs) with blue backlight. Besides, a prototype green perovskite micro-LED display under current driving has been demonstrated.

MEMS-actuated metasurface Alvarez lens.

Miniature lenses with a tunable focus are essential components for many modern applications involving compact optical systems. While several tunable lenses have been reported with various tuning mechanisms, they often face challenges with respect to power consumption, tuning speed, fabrication cost, or production scalability. In this work, we have adapted the mechanism of an Alvarez lens - a varifocal composite lens in which lateral shifts of two optical elements with cubic phase surfaces give rise to a change in the optical power - to construct a miniature, microelectromechanical system (MEMS)-actuated metasurface Alvarez lens. Implementation based on an electrostatic MEMS generates fast and controllable actuation with low power consumption. The utilization of metasurfaces - ultrathin and subwavelength-patterned diffractive optics - as optical elements greatly reduces the device volume compared to systems using conventional freeform lenses. The entire MEMS Alvarez metalens is fully compatible with modern semiconductor fabrication technologies, granting it the potential to be mass-produced at a low unit cost. In the reported prototype operating at 1550 nm wavelength, a total uniaxial displacement of 6.3 µm was achieved in the Alvarez metalens with a direct-current (DC) voltage application up to 20 V, which modulated the focal position within a total tuning range of 68 µm, producing more than an order of magnitude change in the focal length and a 1460-diopter change in the optical power. The MEMS Alvarez metalens has a robust design that can potentially generate a much larger tuning range without substantially increasing the device volume or energy consumption, making it desirable for a wide range of imaging and display applications.

An active self-cleaning surface system for photovoltaic modules using anisotropic ratchet conveyors and mechanical vibration.

The purpose of this work is to develop an active self-cleaning system that removes contaminants from a solar module surface by means of an automatic, water-saving, and labor-free process. The output efficiency of a solar module can be degraded over time by dust accumulation on top of the cover glass, which is often referred to as "soiling". This paper focuses on creating an active self-cleaning surface system using a combination of microsized features and mechanical vibration. The features, which are termed anisotropic ratchet conveyors (ARCs), consist of hydrophilic curved rungs on a hydrophobic background. Two different ARC systems have been designed and fabricated with self-assembled monolayer (SAM) silane and fluoropolymer thin film (Cytop). Fabrication processes were established to fabricate these two systems, including patterning Cytop without degrading the original Cytop hydrophobicity. Water droplet transport characteristics, including anisotropic driving force, droplet resonance mode, cleaning mechanisms, and system power consumption, were studied with the help of a high-speed camera and custom-made test benches. The droplet can be transported on the ARC surface at a speed of 27 mm/s and can clean a variety of dust particles, either water-soluble or insoluble. Optical transmission was measured to show that Cytop can improve transmittance by 2.5~3.5% across the entire visible wavelength range. Real-time demonstrations of droplet transport and surface cleaning were performed, in which the solar modules achieved a 23 percentage-point gain after cleaning.

Self-Cleaning: From Bio-Inspired Surface Modification to MEMS/Microfluidics System Integration.

This review focuses on self-cleaning surfaces, from passive bio-inspired surface modification including superhydrophobic, superomniphobic, and superhydrophilic surfaces, to active micro-electro-mechanical systems (MEMS) and digital microfluidic systems. We describe models and designs for nature-inspired self-cleaning schemes as well as novel engineering approaches, and we discuss examples of how MEMS/microfluidic systems integrate with functional surfaces to dislodge dust or undesired liquid residues. Meanwhile, we also examine "waterless" surface cleaning systems including electrodynamic screens and gecko seta-inspired tapes. The paper summarizes the state of the art in self-cleaning surfaces, introduces available cleaning mechanisms, describes established fabrication processes and provides practical application examples.

Vibration Induced Transport of Enclosed Droplets.

The droplet response to vibrations has been well characterized on open substrates, but microfluidic applications for droplets on open systems are limited by rapid evaporation rates and prone to environmental contamination. However, the response of enclosed droplets to vibration is less understood. Here, we investigate the effects of a dual-plate enclosure on droplet transport for the anisotropic ratchet conveyor system. This system uses an asymmetric pattern of hydrophilic rungs to transport droplets with an applied vibration. Through this work, we discovered that the addition of a substrate on top of the droplet, held in place with a 3D printed fixture, extends the functional frequency range for droplet transport and normalizes the device performance for droplets of different volumes. Furthermore, we found that the edge movements are anti-phasic between top and bottom substrates, providing a velocity profile that is correlated to vibration frequency, unlike the resonance-dependent profiles observed on open systems. These results expand the capabilities of this system, providing avenues for new applications and innovation, but also new insights for droplet mechanics in response to applied vibration.

Transport velocity of droplets on ratchet conveyors.

Anisotropic ratchet conveyors (ARC) are a type of digital microfluidic system. Unlike electrowetting based systems, ARCs transport droplets through a passive, micro-patterned surface and applied orthogonal vibrations. The mechanics of droplet transport on ARC devices has yet to be as well characterized and understood as on electrowetting systems. In this work, we investigate how the design of the ARC substrate affects the droplet response to vibrations and perform the first characterization of transport velocity on ARC devices. We discovered that the design of the ARC device has a significant effect on both the transport efficiency and velocity of actuated droplets, and that the amplitude of the applied vibration can modulate the velocity of transported droplets. Finally, we show that the movement of droplet edges is not continuous but rather the sum of quantized steps between features of the ARC device. These results provide new insights into the behavior of droplets vibrated on asymmetric surface patterns and will serve as the foundation for the design and development of future lab-on-a-chip systems.

Converting Vertical Vibration of Anisotropic Ratchet Conveyors into Horizontal Droplet Motion.

An anisotropic ratchet conveyor is an asymmetric, periodic, micropatterned surface that propels droplets when vibrated with a sinusoidal signal at certain frequencies and amplitudes. For each input frequency, there is a threshold amplitude beyond which the droplet starts to move. In this paper, we study the parameters that initiate droplet motion and the relationship between the input frequency and threshold amplitude among droplets with different volume, density, viscosity, and surface tension. Through this investigation we demonstrate how nondimensionalization reveals consistent behavior for droplets of different volumes. Finally, we propose a compact model that captures the essential features of the system to describe how a pure vertical vibration results in horizontal droplet motion. This model provides an intuitive understanding of the underlying physics and explains how the surface asymmetry is the key for lateral droplet motion.

Enabling Droplet Functionality on Anisotropic Ratchet Conveyors.

Anisotropic ratchet conveyors (ARCs) are a recently developed microfluidic platform that transports liquid droplets through a passive, microfabricated surface pattern and applied orthogonal vibrations. In this work, three new functionalities are presented for controlling droplet transport on the ARC system. These devices can pause droplet transport (ARC gate), decide between two pathways of droplet transport (ARC switch), and pass droplets between transport tracks (ARC delivery junction). All devices function solely through the modification of pinning forces acting on the transported droplet and are the first reported devices that can selectively control droplet timing and directionality without active (e.g., thermal, electrical, or magnetic) surface components.

Red-emitting silicon quantum dot phosphors in warm white LEDs with excellent color rendering.

We demonstrate red-emitting silicon quantum dot (SiQD) phosphors as a low-cost and environment-friendly alternative to rare-earth element phosphors or CdSe quantum dots. After surface passivation, the SiQD-phosphors achieve high photoluminescence quantum yield = 51% with 365-nm excitation. The phosphors also have a peak photoluminescence wavelength at 630 nm and a full-width-at-half-maximum of 145 nm. The relatively broadband red emission is ideal for forming the basis of a warm white spectrum. With 365-nm or 405-nm LED pumping and the addition of green- and/or blue-emitting rare-earth element phosphors, warm white LEDs with color rendering index ~95 have been achieved.

Red-emitting silicon quantum dot phosphors in warm white LEDs with excellent color rendering.

We demonstrate red-emitting silicon quantum dot (SiQD) phosphors as a low-cost and environment-friendly alternative to rare-earth element phosphors or CdSe quantum dots. After surface passivation, the SiQD-phosphors achieve high photoluminescence quantum yield = 51% with 365-nm excitation. The phosphors also have a peak photoluminescence wavelength at 630 nm and a full-width-at-half-maximum of 145 nm. The relatively broadband red emission is ideal for forming the basis of a warm white spectrum. With 365-nm or 405-nm LED pumping and the addition of green- and/or blue-emitting rare-earth element phosphors, warm white LEDs with color rendering index ~95 have been achieved.

Surface passivation dependent photoluminescence from silicon quantum dot phosphors.

We demonstrate wavelength-tunable, air-stable and nontoxic phosphor materials based on silicon quantum dots (SiQDs). The phosphors, which are composed of micrometer-size silicon particles with attached SiQDs, are synthesized by an electrochemical etching method under ambient conditions. The photoluminescence (PL) peak wavelength can be controlled by the SiQD size due to quantum confinement effect, as well as the surface passivation chemistry of SiQDs. The red-emitting phosphors have PL quantum yield equal to 17%. The SiQD-phosphors can be embedded in polymers and efficiently excited by 405 nm light-emitting diodes for potential general lighting applications.

Directed drop transport rectified from orthogonal vibrations via a flat wetting barrier ratchet.

We introduce the wetting barrier ratchet, a digital microfluidic technology for directed drop transport in an open air environment. Cyclic drop footprint oscillations initiated by orthogonal vibrations as low as 37 µm in amplitude at 82 Hz are rectified into fast (mm/s) and controlled transport along a fabricated ratchet design. The ratchet is made from a simple wettability pattern atop a microscopically flat surface consisting of periodic semi-circular hydrophilic features on a hydrophobic background. The microfluidic ratchet capitalizes on the asymmetric contact angle hysteresis induced by the curved features to drive transport. In comparison to the previously reported texture ratchets, wetting barrier ratchets require 3-fold lower actuation amplitudes for a 10 µL drop, have a simplified fabrication, and can be made optically flat for applications where transparency is paramount.

Electrodeposition modeling and optimization to improve thin film patterning with orchestrated structure evolution.

Orchestrated structure evolution is an alternative nanomanufacturing approach that combines the advantages of top-down patterning and bottom-up self-organizing growth. It relies upon tool-directed patterning to create 'seed' locations on a surface from which a subsequent deposition process produces the final, merged film. Despite its demonstrated ability to reduce patterning time by orders of magnitude, our prior reliance on mass transfer limited deposition and square seed arrays resulted in extraneous film growth along pattern edges, thereby limiting the pattern quality of the final film. Here, quality improvements are demonstrated by modeling and tuning the growth mechanism of the deposition step to include charge transfer effects. In addition, a seed positioning optimization technique derived from simulated annealing is introduced as a method for relocating the seeds to minimize film overgrowth at the pattern edges. These improvements enable OSE to maintain geometric quality while substantially reducing the time and cost compared to traditional direct-write manufacturing methods.