Height Fluctuations and Surface Gradients in Topographic Measurements.

Topographic maps are composed of pixels associated with coordinates (x, y, z) on a surface. Each pixel location (x, y) is linked with fluctuations in a measured height sample (z). Fluctuations here are uncertainties in heights estimated from multiple topographic measurements at the same position. Height samples (z) are measured at individual locations (x, y) in topographic measurements and compared with gradients on topographies. Here, gradients are slopes on a surface calculated at the scale of the sampling interval from inclination angles of vectors that are normal to triangular facets formed by adjacent height samples (z = z(x, y)). Similarities between maps of gradients logs and height fluctuations are apparent. This shows that the fluctuations are exponentially dependent on local surface gradients. The highest fluctuations correspond to tool/material interactions for turned surfaces and to regions of maximum plastic deformation for sandblasted surfaces. Finally, for abraded, heterogeneous, multilayer surfaces, fluctuations are dependent on both abrasion and light/sub-layer interactions. It appears that the natures of irregular surface topographies govern fluctuation regimes, and that regions which are indicative of surface functionality, or integrity, can have the highest fluctuations.

Top-down Determination of Fluctuations in Topographic Measurements.

A top-down method is presented and studied for quantifying topographic map height (z) fluctuations directly from measurements on surfaces of interest. Contrary to bottom-up methods used in dimensional metrology, this method does not require knowledge of transfer functions and fluctuations of an instrument. Fluctuations are considered here to be indicative of some kinds of uncertainties. Multiple (n), successive topographic measurements (z = z(x,y)) are made at one location without moving the measurand relative to the measurement instrument. The measured heights (z) at each position (x,y) are analyzed statistically. Fluctuation maps are generated from the calculated variances. Three surfaces were measured with two interferometric measuring microscopes (Bruker ContourGT™ and Zygo NewView™ 7300). These surfaces included an anisotropic, turned surface; an isotropic, sandblasted surface; and an abraded, heterogeneous, multilayer surface having different, complex, multiscale morphologies. In demonstrating the method, it was found that few non-measured points persisted for all 100 measurements at any location. The distributions of uncertainties are similar to those of certain features on topographic maps at the same locations, suggesting that topographic features can augment measurement fluctuations. This was especially observed on the abraded ophthalmic lens; a scratch divides the topographic map into two zones with different uncertainty values. The distributions of fluctuations can be non-Gaussian. Additionally, they can vary between regions within some measurements.