3D high resolution imaging for microelectronics: A multi-technique survey on copper pillars.

In microelectronics, recently developed 3D integration offers the possibility to stack the dice or wafers vertically instead of putting their different parts next to one another, in order to save space. As this method becomes of greater interest, the need for 3D imaging techniques becomes higher. We here report a study about different 3D characterization techniques applied to copper pillars, which are used to stack different dice together. Destructive techniques such as FIB/SEM, FIB/FIB, and PFIB/PFIB slice and view protocols have been assessed, as well as non-destructive ones, such as laboratory-based and synchrotron-based computed tomographies. A comparison of those techniques in the specific case of copper pillars is given, taking into account the constraints linked to the microelectronics industry, mainly concerning resolution and sample throughput. Laboratory-based imaging techniques are shown to be relevant in the case of punctual analyses, while synchrotron based tomographies offer highly resolved volumes for larger batches of samples.

Developments on a SEM-based X-ray tomography system: Stabilization scheme and performance evaluation.

Recent improvements in a SEM-based X-ray tomography system are described. In this type of equipment, X-rays are generated through the interaction between a highly focused electron-beam and a geometrically confined anode target. Unwanted long-term drifts of the e-beam can lead to loss of X-ray flux or decrease of spatial resolution in images. To circumvent this issue, a closed-loop control using FFT-based image correlation is integrated to the acquisition routine, in order to provide an in-line drift correction. The X-ray detection system consists of a state-of-the-art scientific CMOS camera (indirect detection), featuring high quantum efficiency (∼60%) and low read-out noise (∼1.2 electrons). The system performance is evaluated in terms of resolution, detectability, and scanning times for applications covering three different scientific fields: microelectronics, technical textile, and material science.

3D correlative morphological and elemental characterization of materials at the deep submicrometre scale.

This paper shows how X-ray computed nanotomography (CNT) can be correlated with focused ion beam time-of-flight secondary ion mass spectrometry (FIB-TOF-SIMS) tomography on the same sample to investigate both the morphological and elemental structure. This methodology is applicable to relatively large specimens with dimensions of several tens of microns whilst maintaining a high spatial resolution of the order of 100 nm. However, combining X-ray CNT and FIB-TOF-SIMS tomography requires innovative sample preparation protocols to allow both experiments to be conducted on exactly the same sample without chemically or structurally modifying the sample between measurements. Moreover, dedicated algorithms have been developed for effective data fusion that is biased with nine degrees of freedom. This methodology has been tested using a porous and heterogeneous solid oxide fuel cell (SOFC) that has features varying in size by three orders of magnitude - from hundreds of nanometre large pores and grains to tens of micron wide functional layers.

Correction of absorption-edge artifacts in polychromatic X-ray tomography in a scanning electron microscope for 3D microelectronics.

X-ray tomography is widely used in materials science. However, X-ray scanners are often based on polychromatic radiation that creates artifacts such as dark streaks. We show this artifact is not always due to beam hardening. It may appear when scanning samples with high-Z elements inside a low-Z matrix because of the high-Z element absorption edge: X-rays whose energy is above this edge are strongly absorbed, violating the exponential decay assumption for reconstruction algorithms and generating dark streaks. A method is proposed to limit the absorption edge effect and is applied on a microelectronic case to suppress dark streaks between interconnections.

Reduction of the scanning time by total variation minimization reconstruction for X-ray tomography in a SEM.

Total variation minimization is applied to the particular case of X-ray tomography in a scanning electron microscope. To prove the efficiency of this reconstruction method, noise-free and noisy data based on the Shepp & Logan phantom have been simulated. These simulations confirm that Total variation minimization-reconstruction algorithm better manages data containing low number of projections with respect to simultaneous iterative reconstruction technique or filtered backprojection, even in the presence of noise. The algorithm has been applied to real data sets, with a low angular sampling and a high level of noise. Two samples containing micro-interconnections have been analyzed and 3D reconstructions show that Total variation minimization-based algorithm performs well even with 60 projections in order to properly recover a 500 nm diameter void inside a copper interconnection.

Deep sub micrometer imaging of defects in copper pillars by X-ray tomography in a SEM.

The potential of X-ray nanotomography hosted in a SEM in presented in this paper. In order to improve the detail detectability of this system, which is directly related to the X-ray source size, thin metal layers have been studied and installed in the equipment. A 3D resolution pattern has been created in order to determine the smallest detectable features by this setup. This sample is a 25 µm diameter copper pillar in which size-controlled holes have been milled using a plasma-focused ion beam. This pattern has then been scanned and the resulting 3D reconstruction demonstrates that the instrument is able to detect 500 nm diameter voids in a copper interconnection, as used in 3D integration.

Specifications for hard condensed matter specimens for three-dimensional high-resolution tomographies.

Tomography is a standard and invaluable technique that covers a large range of length scales. It gives access to the inner morphology of specimens and to the three-dimensional (3D) distribution of physical quantities such as elemental composition, crystalline phases, oxidation state, or strain. These data are necessary to determine the effective properties of investigated heterogeneous media. However, each tomographic technique relies on severe sampling conditions and physical principles that require the sample to be adequately shaped. For that purpose, a wide range of sample preparation techniques is used, including mechanical machining, polishing, sawing, ion milling, or chemical techniques. Here, we focus on the basics of tomography that justify such advanced sample preparation, before reviewing and illustrating the main techniques. Performances and limits are highlighted, and we identify the best preparation technique for a particular tomographic scale and application. The targeted tomography techniques include hard X-ray micro- and nanotomography, electron nanotomography, and atom probe tomography. The article mainly focuses on hard condensed matter, including porous materials, alloys, and microelectronics applications, but also includes, to a lesser extent, biological considerations.

Three-dimensional imaging of copper pillars using x-ray tomography within a scanning electron microscope: a simulation study based on synchrotron data.

While microelectronic devices are frequently characterized with surface-sensitive techniques having nanometer resolution, interconnections used in 3D integration require 3D imaging with high penetration depth and deep sub-micrometer spatial resolution. X-ray tomography is well adapted to this situation. In this context, the purpose of this study is to assess a versatile and turn-key tomographic system allowing for 3D x-ray nanotomography of copper pillars. The tomography tool uses the thin electron beam of a scanning electron microscope (SEM) to provoke x-ray emission from specific metallic targets. Then, radiographs are recorded while the sample rotates in a conventional cone beam tomography scheme that ends up with 3D reconstructions of the pillar. Starting from copper pillars data, collected at the European Synchrotron Radiation Facility, we build a 3D numerical model of a copper pillar, paying particular attention to intermetallics. This model is then used to simulate physical radiographs of the pillar using the geometry of the SEM-hosted x-ray tomography system. Eventually, data are reconstructed and it is shown that the system makes it possible the quantification of 3D intermetallics volume in copper pillars. The paper also includes a prospective discussion about resolution issues.

"Compressed graphite" formed during C60 to diamond transformation as revealed by scattering computed tomography.

The collapsing of C60 into polycrystalline diamond has been studied after nonhydrostatic pressurization at ambient temperature using x-ray scattering computed tomography. Using this selective structural probe we provide evidence of concentric coexistence of "compressed graphite" (d(00l)∼3.09-3.11 Å), sp2-graphitelike phase (d(00l)∼3.35-3.42 Å), and sp3-like amorphous carbon surrounding polycrystalline diamond (a∼3.56-3.59 Å). The so-called "compressed graphite" exhibits a collapsed c axis and is textured with disordered layers. This latter phase is better described as a short interlayered carbon phase with buckled sp2-sp3 layers with possible interlayer bonding. Additionally, our 3D maps of phase distribution and of the residual stress retained in the polycrystalline diamond phase support the importance of stressed synthesis conditions for diamond formation.

A new white beam x-ray microdiffraction setup on the BM32 beamline at the European Synchrotron Radiation Facility.

A white beam microdiffraction setup has been developed on the bending magnet source BM32 at the European Synchrotron Radiation Facility. The instrument allows routine submicrometer beam diffraction to perform orientation and strain mapping of polycrystalline samples. The setup features large source to optics distances allowing large demagnification ratios and small beam sizes. The optics of the beamline is used for beam conditioning upstream a secondary source, suppressing any possible interference of beam conditioning on beam size and position. The setup has been designed for an easy and efficient operation with position control tools embedded on the sample stage, a high magnification large aperture optical microscope, and fast readout detectors. Switching from the white beam mode to the monochromatic mode is made easy by an automatic procedure and allows the determination of both the deviatoric and hydrostatic strain tensors.

Monitoring microbial redox transformations of metal and metalloid elements under high pressure using in situ X-ray absorption spectroscopy.

X-ray absorption spectroscopy is a well-established method for probing local structural and electronic atomic environments in a variety of systems. We used X-ray absorption near-edge structure (XANES) spectroscopy for monitoring in real-time conditions selenium reduction in situ in live cultures of Shewanella oneidensis MR-1 under high hydrostatic pressure. High-quality XANES data show that Shewanella oneidensis MR-1 reduces selenite Se(IV) to red elemental selenium Se(0) up to 150 MPa without any intermediate redox state. MR-1 reduces all selenite provided (5-10 mM) between 0.1 and 60 MPa. Above 60 MPa the selenite reduction yield decreases linearly with pressure and the activity is calculated to stop at 155 ± 5 MPa. The analysis of cultures recovered after in situ measurements showed that the decrease in activity is linked to a decrease in viability. This study emphasizes the promising potential of XANES spectroscopy for real-time probing in situ microbial redox transformations of a broad range of metal and metalloid elements in live samples, including under high hydrostatic pressure.

Cartilage collagen matrix reorientation and displacement in response to surface loading.

An investigation of collagen fiber reorientation, as well as fluid and matrix movement of equine articular cartilage and subchondral bone under compressive mechanical loads, was undertaken using small angle X-ray scattering measurements and optical microscopy. Small angle X-ray scattering measurements were made on healthy and diseased samples of equine articular cartilage and subchondral bone mounted in a mechanical testing apparatus on station ID18F of ESRF, Grenoble, together with fiber orientation analysis using polarized light and displacement measurements of the cartilage matrix and fluid using tracers. At surface pressures of up to approximately 1.5 MPa, there was reversible compression of the tangential surface fibers and immediately subjacent zone. As load increased, deformation in these zones reached a maximum and then reorientation propagated to the radial deep zone. Between surface pressures of 4.8 MPa and 6.0 MPa, fiber orientation above the tide mark rotated 10 deg from the radial direction, with an overall loss of alignment. With further increase in load, the fibers "crimped" as shown by the appearance of subsidiary peaks approximately +/-10 deg either side of the principal fiber orientation direction. Failure at higher loads was characterized by a radial split in the deep cartilage, which propagated along the tide mark while the surface zone remained intact. In lesions, the fiber organization was disrupted and the initial response to load was consistent with early rupture of fibers, but the matrix relaxed to an organization very similar to that of the unloaded tissue. Tracer measurements revealed anisotropic solid and fluid displacement, which depended strongly on depth within the tissue.

High-resolution angular beam stability monitoring at a nanofocusing beamline.

Two semi-transparent imaging beam-position monitors developed at the ESRF have been installed at the micro-analysis beamline ID22 for monitoring the angular stability of the X-ray beam. This system allows low-frequency (10 Hz) angular beam stability measurements at a submicroradian range. It is demonstrated that the incoming macro-beam angular fluctuations are one of the major sources of focal spot instabilities downstream of the Kirkpatrick-Baez mirrors. It is also shown that scanning the energy by rotating the so-called fixed-exit monochromator induces some unexpected angular beam shifts that are, to a large extent, deterministic.

Regional variations of collagen orientation in normal and diseased articular cartilage and subchondral bone determined using small angle X-ray scattering (SAXS).

OBJECTIVE: To determine regional differences in the orientation of collagen in the articular cartilage of the equine metacarpophalangeal joint as well as describing cartilage orientation in lesions using small angle X-ray scattering (SAXS). DESIGN: SAXS diffraction patterns were taken at the European Synchrotron Radiation Facility (ESRF), with increasing depth into cartilage and bone cross sections. Results for healthy samples were taken at different regions along the joint which receive different loads and differences in collagen orientation were determined. Results were also taken from diseased samples and the collagen orientation changes from that of healthy samples observed. RESULTS: Regions subject to low loads show a lower degree of orientation and regions exposed to the highest loads possess oriented collagen fibres especially in the radial layer. In early lesions the orientations of the collagen fibres are disrupted. Subchondral bone fibres are twisted in regions where the joint receives shear forces. Changes in fibre orientation are also observed in the calcified cartilage even in regions where the cartilage is intact. In more advanced lesions where there is loss of cartilage the fibres in the calcified layer are realigned tangential to the surface. CONCLUSIONS: Regional variations in collagen arrangement show that the highly ordered layers of the articular cartilage are the most important elements in supporting high variable loads. In lesions changes occur in the deep tissue whilst the overlying cartilage appeared normal. We therefore suggest that the interface region is a key element in the early stages of the disease.

ID22: a multitechnique hard X-ray microprobe beamline at the European Synchrotron Radiation Facility.

The ID22 beamline is dedicated to hard X-ray microanalysis allowing the combination of fluorescence, spectroscopy, diffraction and tomography techniques in a wide energy range from 6 to 70 keV. The recent installation of an in-vacuum undulator, a new sample stage and the adaptation of various focusing optics has contributed to a great improvement in the capabilities of the beamline, which is now accessed by a wide user community issued from medical, earth and environmental science, archaeology and material science. Many applications requiring low detection limits for localization/speciation of trace elements together with structural analysis have been developed at the beamline on the (sub)micrometer scale. The possibility of combining simultaneously different analytical probes offers the opportunity of a thorough study of a given sample or scientific problem. This paper presents a review of the recent developments of the beamline and a detailed description of its capabilities through examples from different fields of applications.

Quantification of single fluid inclusions by combining synchrotron radiation-induced micro-X-ray fluorescence and transmission.

Fluid inclusions represent the only direct samples of ancient fluids in many crustal rocks; precise knowledge of their chemical composition provides crucial information to model paleofluid-rock interactions and hydrothermal transport processes. Owing to its nondestructive character, micrometer-scale spatial resolution, and high sensitivity, synchrotron radiation-induced micro-X-ray fluorescence has received great interest for the in situ multielement analysis of individual fluid inclusions. Major uncertainties associated with the quantitative analysis of single fluid inclusions arise from the inclusion depth and the volume of fluid sampled by the incident beam. While the depth can be extracted directly from the fluorescence spectrum, its volume remains a major source of uncertainty. The present study performed on natural and synthetic inclusions shows that the inclusion thickness can be accurately evaluated from transmission line scans. Experimental data matched numerical simulations based on an elliptical inclusion geometry. However, for one nonelliptical inclusion, the experimental data were confirmed using a computed absorption tomography reconstruction. Good agreement between the imaging and scanning techniques implies that the latter provides reliable fluid thickness values independent of the shape of the inclusion. Taking into consideration the incident angle, the incident beam energy, the inclusion fluid salinity, and the transmission measurement stability resulted in errors of 0.3-2 microm on calculated fluid inclusion thicknesses.