A Large-Range and High-Sensitivity Fiber-Optic Fabry-Perot Pressure Sensor Based on a Membrane-Hole-Base Structure.

In the field of in situ measurement of high-temperature pressure, fiber-optic Fabry-Perot pressure sensors have been extensively studied and applied in recent years thanks to their compact size and excellent anti-interference and anti-shock capabilities. However, such sensors have high technological difficulty, limited pressure measurement range, and low sensitivity. This paper proposes a fiber-optic Fabry-Perot pressure sensor based on a membrane-hole-base structure. The sensitive core was fabricated by laser cutting technology and direct bonding technology of three-layer sapphire and develops a supporting large-cavity-length demodulation algorithm for the sensor's Fabry-Perot cavity. The sensor exhibits enhanced sensitivity, a simplified structure, convenient preparation procedures, as well as improved pressure resistance and anti-harsh environment capabilities, and has large-range pressure sensing capability of 0-10 MPa in the temperature range of 20-370 °C. The sensor sensitivity is 918.9 nm/MPa, the temperature coefficient is 0.0695 nm/(MPa∙°C), and the error over the full temperature range is better than 2.312%.

Conformal Fabrication of Thick Film Platinum Strain Gauge Via Error Regulation Strategies for In Situ High-Temperature Strain Detection.

Monitoring high-temperature strain on curved components in harsh environments is a challenge for a wide range of applications, including in aircraft engines, gas turbines, and hypersonic vehicles. Although there are significant improvements in the preparation of high-temperature piezoresistive film on planar surfaces using 3D printing methods, there are still difficulties with poor surface compatibility and high-temperature strain testing on curved surfaces. Herein, a conformal direct ink writing (CDIW) system coupled with an error feedback regulation strategy was used to fabricate high-precision, thick films on curved surfaces. This strategy enabled the maximum amount of error in the distance between the needle and the substrate on a curved surface to be regulated from 155 to 4 µm. A conformal Pt thick-film strain gauge (CPTFSG) with a room-temperature strain coefficient of 1.7 was created on a curved metallic substrate for the first time. The resistance drift rate at 800 °C for 1 h was 1.1%, which demonstrated the excellent stability and oxidation resistance of the CPTFSG. High-temperature dynamic strain tests up to 769 °C revealed that the sensor had excellent high-temperature strain test performance. Furthermore, the CPTFSG was conformally deposited on an aero-engine turbine blade to perform in situ tensile and compressive strain testing at room temperature. High-temperature strain tests were conducted at 100 and 200 °C for 600 and 580 µÎµ, respectively, demonstrating a high steady-state response consistent with the commercial high-temperature strain transducer. In addition, steady-state strain tests at high temperatures up to 496 °C were tested. The CDIW error modulation strategy provides a highly promising approach for the high-precision fabrication of Pt thick films on complex surfaces and driving in situ sensing of high-temperature parameters on curved components toward practical applications.

Rapid laser fabrication of indium tin oxide and polymer-derived ceramic composite thin films for high-temperature sensors.

Thin-film sensors are essential for real-time monitoring of components in high-temperature environments. Traditional fabrication methods often involve complicated fabrication steps or require prolonged high-temperature annealing, limiting their practical applicability. Here, we present an approach using direct ink writing and laser scanning (DIW-LS) to fabricate high-temperature functional thin films. An indium tin oxide (ITO)/preceramic polymer (PP) ink suitable for DIW was developed. Under LS, the ITO/PP thin film shrank in volume. Meanwhile, the rapid pyrolysis of PP into amorphous precursor-derived ceramic (PDC) facilitated the faster sintering of ITO nanoparticles and improved the densification of the thin film. This process realized the formation of a conductive network of interconnected ITO nanoparticles. The results show that the ITO/PDC thin film exhibits excellent stability, with a drift rate of 4.7 % at 1000 °C for 25 h, and withstands temperatures up to 1250 °C in the ambient atmosphere. It is also sensitive to strain, with a maximum gauge factor of -6.0. As a proof of concept, we have used DIW-LS technology to fabricate a thin-film heat flux sensor on the surface of the turbine blade, capable of measuring heat flux densities over 1 MW/m2. This DIW-LS process provides a viable approach for the integrated, rapid, and flexible fabrication of thin film sensors for harsh environments.

All-Three-Dimensionally-Printed AgPd Thick-Film Strain Gauge with a Glass-Ceramic Protective Layer for High-Temperature Applications.

A high-temperature thin/thick-film strain gauge (TFSG) shows development prospects for in situ strain monitoring of hot-end components due to their small perturbations, no damage, and fast response. Direct ink writing (DIW) 3D printing is an emerging and facile approach for the rapid fabrication of TFSG. However, TFSGs prepared based on 3D printing with both high thermal stability and low temperature coefficient of resistance (TCR) over a wide temperature range remain a great challenge. Here, we report a AgPd TFSG with a glass-ceramic protective layer based on DIW. By encapsulating the AgPd sensitive layer and regulating the Pd content, the AgPd TFSG demonstrated a low TCR (191.6 ppm/°C) from 50 to 800 °C and ultrahigh stability (with a resistance drift rate of 0.14%/h at 800 °C). Meanwhile, the achieved specifications for strain detection included a strain sensing range of ±500 µÎµ, fast response time of 153 ms, gauge factor of 0.75 at 800 °C, and high durability of >8000 cyclic loading tests. The AgPd TFSG effectively monitors strain in superalloys and can be directly deposited onto cylindrical surfaces, demonstrating the scalability of the presented approach. This work provides a strategy to develop TFSGs for in situ sensing of complex curved surfaces in harsh environments.

La(Ca)CrO3-Filled SiCN Precursor Thin Film Temperature Sensor Capable to Measure up to 1100 °C High Temperature.

Thin-film sensors are regarded as advanced technologies for in situ condition monitoring of components operating in harsh environments, such as aerospace engines. Nevertheless, these sensors encounter challenges due to the high-temperature oxidation of materials and intricate manufacturing processes. This paper presents a simple method to fabricate high temperature-resistant oxidized SiCN precursor and La(Ca)CrO3 composite thin film temperature sensors by screen printing and air annealing. The developed sensor demonstrates a broad temperature response ranging from 200 °C to 1100 °C with negative temperature coefficients (NTC). It exhibits exceptional resistance to high-temperature oxidation and maintains performance stability. Notably, the sensor's resistance changes by 3% after exposure to an 1100 °C air environment for 1 h. This oxidation resistance improvement surpasses the currently reported SiCN precursor thin-film sensors. Additionally, the sensor's temperature coefficient of resistance (TCR) can reach up to -7900 ppm/°C at 200 °C. This strategy is expected to be used for other high-temperature thin-film sensors such as strain gauges, heat flux sensors, and thermocouples. There is great potential for applications in high-temperature field monitoring.

Enhanced wide-range gas pressure sensing with an all-solid open Fabry-Pérot interferometer.

The sensors with a wide gas pressure detection range are urgently demanded in many industrial applications. Here, we propose a gas pressure sensor based on an all-solid open Fabry-Pérot interferometer, which is prepared by using optical contact bonding to ensure high structural strength and high-quality factor of 8.8 × 105. The applied pressure induces a change in the refractive index of the air, leading to the shift of the resonant spectrum. The pressure is detected by calibrating this shift. The sensor exhibits a pressure sensitivity of 4.20 ± 0.01 nm/MPa in a pressure range of 0 to 10 MPa and has a minimum pressure resolution of 0.005 MPa. Additionally, it shows a lower temperature cross-sensitivity of -0.25 kPa/°C. These findings affirm that the sensor achieves high-sensitivity pressure sensing across a wide detection range. Moreover, owing to its exceptional mechanical strength, it holds great promise for applications in harsh environments, such as high temperature and high pressure.

Oxidation and Ablation Behavior of Particle-Filled SiCN Precursor Coatings for Thin-Film Sensors.

Polymer-derived ceramic (PDC) thin-film sensors have a very high potential for extreme environments. However, the erosion caused by high-temperature airflow at the hot-end poses a significant challenge to the stability of PDC thin-film sensors. Here, we fabricate a thin-film coating by PDC/TiB2/B composite ceramic material, which can be used to enhance the oxidation resistance and ablation resistance of the sensors. Due to the formation of a dense oxide layer on the surface of the thin-film coating in a high-temperature air environment, it effectively prevents the ingress of oxygen as a pivotal barrier. The coating exhibits an exceptionally thin oxide layer thickness of merely 8 µm, while its oxidation resistance was rigorously assessed under air exposure at 800 °C, proving its enduring protection for a minimum duration of 10 h. Additionally, during ablation testing using a flame gun that can generate temperatures of up to 1000 °C, the linear ablation rate of thin-film coating is merely 1.04 µm/min. Our analysis reveals that the volatilization of B2O3 occurs while new SiO2 is formed on the thin-film coating surface. This phenomenon leads to the absorption of heat, thereby enhancing the ablative resistance performance of the thin-film sensor. The results indicate that the thin-film sensor exhibits exceptional resistance to oxidation and ablation when protected by the coating, which has great potential for aerospace applications.

Electrohydrodynamic Printed Ultra-Micro AgNPs Thin Film Temperature Sensors Array for High-Resolution Sensing.

Current methods for thin film sensors preparation include screen printing, inkjet printing, and MEMS (microelectromechanical systems) techniques. However, their limitations in achieving sub-10 µm line widths hinder high-density sensors array fabrication. Electrohydrodynamic (EHD) printing is a promising alternative due to its ability to print multiple materials and multilayer structures with patterned films less than 10 µm width. In this paper, we innovatively proposed a method using only EHD printing to prepare ultra-micro thin film temperature sensors array. The sensitive layer of the four sensors was compactly integrated within an area measuring 450 µm × 450 µm, featuring a line width of less than 10 µm, and a film thickness ranging from 150 nm to 230 nm. The conductive network of silver nanoparticles exhibited a porosity of 0.86%. After a 17 h temperature-resistance test, significant differences in the performance of the four sensors were observed. Sensor 3 showcased relatively superior performance, boasting a fitted linearity of 0.99994 and a TCR of 937.8 ppm/°C within the temperature range of 20 °C to 120 °C. Moreover, after the 17 h test, a resistance change rate of 0.17% was recorded at 20 °C.

Rapid Printing of High-Temperature Polymer-Derived Ceramic Composite Thin-Film Thermistor with Laser Pyrolysis.

Polymer-derived ceramic (PDC)-based high-temperature thin-film sensors (HTTFSs) exhibit promising applications in the condition monitoring of critical components in aerospace. However, fabricating PDC-based HTTFS integrated with high-efficiency, high-temperature anti-oxidation, and customized patterns remains challenging. In this work, we introduce a rapid and flexible selecting laser pyrolysis combined with a direct ink writing process to print double-layer high-temperature antioxidant PDC composite thin-film thermistors under ambient conditions. The sensitive layer (SL) was directly written on an insulating substrate with excellent conductivity by laser-induced graphitization. Then, the antioxidant layer (AOL) was written on the surface of the SL to realize the integrated manufacturing of double-functional layers. Through characterization analysis, it was shown that B2O3 and SiO2 glass phases generated by the PDC composite AOL could effectively prevent oxygen intrusion. Therefore, the fabricated PDC composite thermistors exhibited a negative temperature coefficient in the temperature range from 100 to 1100 °C and high repeatability below 800 °C. Meanwhile, it has excellent high-temperature stability at 800 °C with a resistance change of only 2.4% in 2 h. Furthermore, the high-temperature electrical behavior of the thermistor was analyzed. The temperature dependence of the conductivity for this thermistor has shown an agreement with the Mott's variable range hopping mechanism. Additionally, the thermistor was fabricated on the surface of an aero-engine blade to verify its feasibility below 800 °C, showing the great potential of this work for state sensing on the surface of high-temperature components, especially for customized requirements.

Abnormal Graphitization Behavior in Near-Surface/Interface Region of Polymer-Derived Ceramics.

The in situ free carbon generated in polymer-derived ceramics (PDCs) plays a crucial role in their unique microstructure and resultant properties. This study advances a new phenomenon of graphitization of PDCs. Specifically, whether in micro-/nanoscale films or millimeter-scale bulks, the surface/interface radically changes the fate of carbon and the evolution of PDC nanodomains, promotes the graphitization of carbon, and evolves a free carbon enriched layer in the near-surface/interface region. Affected by the enrichment behavior of free carbon in the near-surface/interface region, PDCs exhibit highly abnormal properties such as the skin behavior and edge effect of the current. The current intensity in the near-surface/interface region of PDCs is orders of magnitude higher than that in its interior. Ultrahigh conductivity of up to 14.47 S cm-1 is obtained under the action of the interface and surface, which is 5-8 orders of magnitude higher than that of the bulk prepared under the same conditions. Such surface/interface interactions are of interest for the regulation of free carbon and its resultant properties, which are the core of PDC applications. Finally, the first PDC thin-film strain gauge that can survive a butane flame with a high temperature of up to ≈1300 °C is fabricated.

Thin-Film Platinum Resistance Temperature Detector with a SiCN/Yttria-Stabilized Zirconia Protective Layer by Direct Ink Writing for High-Temperature Applications.

In situ temperature monitoring of curved high-temperature components in extreme environments is challenging for a variety of applications in fields such as aero engines and gas turbines. Recently, extrusion-based direct ink writing (DIW) has been utilized to fabricate platinum (Pt) resistance temperature detectors (RTDs). However, the current Pt RTD prepared by DIW technology suffers from a limited temperature range and poor high-temperature stability. Here, DIW technology and yttria-stabilized zirconia (YSZ)-modified precursor ceramic film packaging have been used to build a Pt RTD with high-temperature resistance, small disturbance, and high stability. The results indicate that the protective layer formed by the liquid phase anchors the Pt particles and reduces the agglomeration and volatilization of the Pt sensitive layer at high temperature. Attributed to the SiCN/YSZ protective layer, the temperature resistance curve of the Pt RTD in the range of 50-800 °C has little deviation from the fitting curve, and the fitting correlation coefficient is above 0.9999. Interestingly, the Pt RTD also has high repeatability and stability. The high temperature resistance drift rate is only 0.05%/h after 100 h of long-term testing at 800 °C and can withstand butane flame up to ∼1300 °C without damage. Moreover, the Pt RTD can be conformally deposited on the outer ring of aerospace bearings by DIW technology and then realize on-site, nondestructive, and real-time monitoring of bearing temperature. The fabricated Pt RTD shows great potential for high-temperature applications, and the novel technology proposed provides a feasible pathway for temperature monitoring of aeroengine internal curved hot-end components.

A SiCN Thin Film Thermistor Based on DVB Modified Polymer-Derived Ceramics.

Carbon-rich SiCN ceramics were prepared by divinylbenzene (DVB)-modified polysilazane (PSN2), and a high-conductivity SiCN thin film sensor suitable for medium-low temperature sensing was fabricated. The modified liquid precursors were patterned by direct ink writing to produce SiCN resistive grids with line widths of several hundreds of micrometers and thicknesses of several micrometers. The introduction of DVB not only increases the critical thickness of SiCN ceramics several times, but also significantly improves the conductivity of SiCN, making it meet the conductivity requirements of sensing applications in the mid-low temperature range. The electrical conductivity and microstructure of DVB-modified SiCN ceramics were studied in detail. In the temperature range of 30~400 °C, the temperature resistance performance of DVB modified SiCN resistance grid was measured. The SiCN ceramics with low DVB content not only have excellent electrical conductivity, but also have good oxidation resistance.

ZrB2/SiCN Thin-Film Strain Gauges for In-Situ Strain Detection of Hot Components.

The in-situ strain/stress detection of hot components in harsh environments remains a challenging task. In this study, ZrB2/SiCN thin-film strain gauges were fabricated on alumina substrates by direct writing. The effects of ZrB2 content on the electrical conductivity and strain sensitivity of ZrB2/SiCN composites were investigated, and based on these, thin film strain gauges with high electrical conductivity (1.71 S/cm) and a gauge factor of 4.8 were prepared. ZrB2/SiCN thin-film strain gauges exhibit excellent static, cyclic strain responses and resistance stability at room temperature. In order to verify the high temperature performance of the ZrB2/SiCN thin-film strain gauges, the temperature-resistance characteristic curves test, high temperature resistance stability test and cyclic strain test were conducted from 25 °C to 600 °C. ZrB2/SiCN thin-film strain gauges exhibit good resistance repeatability and stability, and highly sensitive strain response, from 25 °C to 600 °C. Therefore, ZrB2/SiCN thin-film strain gauges provide an effective approach for the measurement of in-situ strain of hot components in harsh environments.

Additive-Manufactured Platinum Thin-Film Strain Gauges for Structural Microstrain Testing at Elevated Temperatures.

This paper investigates the feasibility and performance of the fabrication of platinum high-temperature thin-film strain sensors on nickel-based alloy substrates by additive manufacturing. The insulating layer was made of a dielectric paste by screen printing process. A 1.8-micron-thick platinum film was deposited directly on the insulating layer. The four-wire resistance measurement method was used to eliminate the contact resistance of the solder joints. Comprehensive morphological and electrical characterization of the platinum thin-film strain gauge was carried out, and good static and dynamic strain responses were obtained, which confirmed that the strain gauge was suitable for in situ strain monitoring of high-temperature complex components.

Al2O3-Modified Polymer-Derived Ceramic SiCN High-Temperature Anti-Oxidative Composite Coating Fabricated by Direct Writing.

A reliable protective layer is one of the main challenges in preventing oxidation of thin film sensors to achieve accurate, effective, and stable readings at high temperatures. In this work, an Al2O3-modified polymer-derived ceramic SiCN composite coating fabricated by a direct-writing technique is utilized as a protective layer for thin film sensors. The microstructure evolution of the Al2O3/SiCN films is examined herein. The protective layer exhibits excellent oxidation resistance and thermal stability at high temperatures up to 1000 °C, which contributes to improving the stability and lifetime of thin film sensors in extreme environments. The TiB2/SiCN thin film resistive grid with the Al2O3/SiCN composite film as a protective layer is fabricated and tested. The results indicate that the coating can protect the TiB2/SiCN thin film resistive grid at high temperatures up to 1000 °C, which is about 200 °C higher than that of the TiB2/SiCN thin film resistive grid without a protective layer. The resistance change rates of the TiB2/SiCN thin film resistive grid with a protective layer are 0.5%/h at 900 °C and 10.7%/h at 1000 °C.

In Situ Laser Fabrication of Polymer-Derived Ceramic Composite Thin-Film Sensors for Harsh Environments.

Polymer-derived ceramic (PDC) is considered an excellent sensing material for harsh environments such as aero-engines and nuclear reactors. However, there are many inherent limitations not only in pure PDC but also in its common fabrication method by furnace thermolysis. Therefore, this study proposes a novel method of rapid in situ fabrication of PDC composite thin-film sensors by laser pyrolysis. Using this method with different fillers, a sensitive PDC composite film layer with high-quality graphite can be obtained quickly, which is more flexible and efficient compared to the traditional furnace thermolysis. Furthermore, this study analyzes the reaction differences between laser pyrolysis and furnace thermolysis. The laser pyrolysis method principally produces ß-SiC and enhances the graphitization of amorphous carbon, while the degree of graphitization by furnace thermolysis is low. In addition, it is capable of rapidly preparing an insulating PDC composite film, which still has a resistance of 5 MΩ at 600 °C. As a proof of this method, the PDC composite thin-film strain sensors are fabricated in situ on nickel alloys and aluminum oxide substrates, respectively. The sensor fabricated on the nickel alloy with a high gauge factor of over 100 can be used in high-temperature environments below 350 °C without the protection of an oxidation-resistant coating. In this way, the approach pioneers the in situ laser fabrication of functional PDC films for sensors, and it has great potential for the in situ sensing of complex curved surfaces in harsh environments.

Electrochromic Photodetectors: Toward Smarter Glasses and Nano Reflective Displays via an Electrolytic Mechanism.

Electrochromic devices, serving as smart glasses, have not yet been intelligent enough to regulate lighting conditions independent of external photosensing devices. On the other hand, their bulky sandwich structures have been suffering setbacks utilized for reflective displays in an effort to compete with mature emissive displays. The key to resolve both problems lies in incorporating the photosensing function into electrochromic devices while simplifying their configuration via replacing ionic electrolytes. However, so far it has not yet been achieved because of the essential operating difference between the optoelectronic devices and the ionic devices. Herein, a concept of a smarter and thinner device: "electrochromic photodetector" is proposed to solve such problems. It is all-solid-state and electrolyte-free and operates with a simple thin metal-semiconductor-metal structure via an electrolytic mechanism. As a proof of concept, a configuration of the electrochromic photodetector is presented in this work based on a tungsten trioxide (WO3) thin film deposited on Au electrodes via facile, low-cost solution processes. The electrochromic photodetector switches between its photosensing and electrochromic functions via voltage modulation within 5 V, which is the result of the semiconductor-metal transition. The transition mechanism is further analyzed to be the voltage-triggered reversible oxygen/water vapor adsorption/intercalation from ambient air.

Nanostructure-induced performance degradation of WO3·nH2O for energy conversion and storage devices.

Although 2D layered nanomaterials have been intensively investigated towards their application in energy conversion and storage devices, their disadvantages have rarely been explored so far especially compared to their 3D counterparts. Herein, WO3·nH2O (n = 0, 1, 2), as the most common and important electrochemical and electrochromic active nanomaterial, is synthesized in 3D and 2D structures through a facile hydrothermal method, and the disadvantages of the corresponding 2D structures are examined. The weakness of 2D WO3·nH2O originates from its layered structure. X-ray diffraction and scanning electron microscopy analyses of as-grown WO3·nH2O samples suggest a structural transition from 2D to 3D upon temperature increase. 2D WO3·nH2O easily generates structural instabilities by 2D intercalation, resulting in a faster performance degradation, due to its weak interlayer van der Waals forces, even though it outranks the 3D network structure in terms of improved electronic properties. The structural transformation of 2D layered WO3·nH2O into 3D nanostructures is observed via ex situ Raman measurements under electrochemical cycling experiments. The proposed degradation mechanism is confirmed by the morphology changes. The work provides strong evidence for and in-depth understanding of the weakness of 2D layered nanomaterials and paves the way for further interlayer reinforcement, especially for 2D layered transition metal oxides.

Effect of Zinc Acetate Concentration on Optimization of Photocatalytic Activity of p-Co3O4/n-ZnO Heterostructures.

In this work, p-Co3O4/n-ZnO heterostructures were fabricated on Ni substrate by hydrothermal-decomposition method using cobaltous nitrate hexahydrate (Co(NO3)2·6H2O) and zinc acetate dihydrate (Zn(CH3COO)2·2H2O) as precursors with zinc acetate concentration varying from 5.0 to 55.0 mM. Structure and morphology of the developed samples were characterized by X-ray diffraction (XRD), Raman spectroscopy, and scanning electron microscopy (SEM). Effect of zinc acetate concentration on the photocatalytic activity of p-Co3O4/n-ZnO heterostructures was investigated by degradation of methyl orange (MO) under the UV light irradiation. The fabricated p-Co3O4/n-ZnO heterostructures exhibited higher photocatalytic activity than pure Co3O4 particles. In order to obtain the maximum photocatalytic activity, zinc acetate concentration was optimized. Specifically, at 35 mM of zinc acetate, the p-Co3O4/n-ZnO showed the highest photocatalytic activity with the degradation efficiency of MO reaching 89.38% after 72 h irradiation. The improvement of photocatalytic performance of p-Co3O4/n-ZnO heterostructures is due to the increased concentration of photo-generated holes on Co3O4 surface and the higher surface-to-volume ratio in the hierarchical structure formed by nano-lamellas.

ALD-Developed Plasmonic Two-Dimensional Au-WO3-TiO2 Heterojunction Architectonics for Design of Photovoltaic Devices.

Electrically responsive plasmonic devices, which benefit from the privilege of surface plasmon excited hot carries, have supported fascinating applications in the visible-light-assisted technologies. The properties of plasmonic devices can be tuned by controlling charge transfer. It can be attained by intentional architecturing of the metal-semiconductor (MS) interfaces. In this study, the wafer-scaled fabrication of two-dimensional (2D) TiO2 semiconductors on the granular Au metal substrate is achieved using the atomic layer deposition (ALD) technique. The ALD-developed 2D MS heterojunctions exhibited substantial enhancement of the photoresponsivity and demonstrated the improvement of response time for 2D Au-TiO2-based plasmonic devices under visible light illumination. To circumvent the undesired dark current in the plasmonic devices, a 2D WO3 nanofilm (∼0.7 nm) was employed as the intermediate layer on the MS interface to develop the metal-insulator-semiconductor (MIS) 2D heterostructure. As a result, 13.4% improvement of the external quantum efficiency was obtained for fabricated 2D Au-WO3-TiO2 heterojunctions. The impedancometry measurements confirmed the modulation of charge transfer at the 2D MS interface using MIS architectonics. Broadband photoresponsivity from the UV to the visible light region was observed for Au-TiO2 and Au-WO3-TiO2 heterostructures, whereas near-infrared responsivity was not observed. Consequently, considering the versatile nature of the ALD technique, this approach can facilitate the architecturing and design of novel 2D MS and MIS heterojunctions for efficient plasmonic devices.