High-Quality-Factor Silicon-on-Lithium Niobate Metasurfaces for Electro-optically Reconfigurable Wavefront Shaping.

Dynamically reconfigurable metasurfaces promise compact and lightweight spatial light modulation for many applications, including LiDAR, AR/VR, and LiFi systems. Here, we design and computationally investigate high-quality-factor silicon-on-lithium niobate metasurfaces with electrically driven, independent control of its constituent nanobars for full phase tunability with high tuning efficiency. Free-space light couples to guided modes within each nanobar via periodic perturbations, generating quality factors exceeding 30,000 while maintaining a bar spacing of <λ/1.5. We achieve nearly 2π phase variation with an applied bias not exceeding ±25 V, maintaining a reflection efficiency above 91%. Using full-field simulations, we demonstrate a high-angle (51°) switchable beamsplitter with a diffracted efficiency of 93% and an angle-tunable beamsteerer, spanning 18-31°, with up to 86% efficiency, all using the same metasurface device. Our platform provides a foundation for highly efficient wavefront-shaping devices with a wide dynamic tuning range capable of generating nearly any transfer function.

Dynamic Focusing with High-Quality-Factor Metalenses.

Metasurface lenses provide an ultrathin platform in which to focus light, but weak light-matter interactions limit their dynamic tunability. Here we design submicron-thick, ultrahigh quality factor (high-Q) metalenses that enable dynamic modulation of the focal length and intensity. Using full-field simulations, we show that quality factors exceeding 5000 can be generated by including subtle, periodic perturbations within the constituent Si nanoantennas. Such high-Q resonances enable lens modulation based on the nonlinear Kerr effect, with focal lengths varying from 4 to 6.5 µm and focal intensities decreasing by half as input intensity increases from 0.1 to 1 mW/µm2. We also show how multiple high-Q resonances can be embedded in the lens response through judicious placement of the perturbations. Our high-Q lens design, with quality factors 2 orders of magnitude higher than existing lens designs, provides a foundation for reconfigurable, multiplexed, and hyperspectral metasurface imaging platforms.