A Piezoelectric MEMS Speaker with a Combined Function of a Silent Alarm.

To explore the versatility of speakers, a piezoelectric micro-electro-mechanical system (MEMS) speaker combining the function of a silent alarm is proposed, which mainly comprises a lead zirconate titanate (PZT) actuation layer and a rigid-flexible coupling supporting layer. Measurements performed on encapsulated prototypes mounted to an artificial ear simulator have revealed that, compared to a speaker with a rigid supporting layer, the sound pressure level (SPL) of the proposed piezoelectric MEMS speaker with a rigid-flexible coupling supporting layer is significantly higher and is especially higher by 4.1-20.1 dB in the frequency range from 20 Hz to 4.2 kHz, indicating that the rigid-flexible coupling supporting layer can improve the SPL significantly in low frequency. Moreover, the spectral distribution characteristic of its playback audio is similar to that of the commercial electromagnetic type. The device can also function as a silent alarm based on oral airflows in dangerous situations, as it performs well at recognizing words according to their unique voltage-signal characteristics, and can avoid the effects of external sound noise, body movement, long distance, and occlusion. This strategy provides inspiration for functional diversification of piezoelectric MEMS speakers.

Stability of silicon resonator temperature sensors with the Pound-Drever-Hall technique.

In this paper, we research the temperature stability of silicon-based ring resonator thermometers utilizing the Pound-Drever-Hall (PDH) technique. A slight temperature fluctuation of 12.2 mK in 200 s was experimentally detected by immersing the sensor in the triple point of water (TPW) system with ultrahigh precision. Additionally, factors that affect temperature stability, including fundamental thermal noise, laser frequency drift, and power fluctuation were analyzed and calculated theoretically. This shows high consistency with experimental results. Moreover, it is proved that the laser drift can be suppressed from 11.3 pm to 0.013 pm with the developed experimental system based on the PDH technique. The silicon-based ring resonator as a potential platform for precise temperature monitoring is proved based on this work.

A robust HD-sEMG sensor suitable for convenient acquisition of muscle activity in clinical post-stroke dysphagia.

Objective.A flexible high-density surface electromyography (HD-sEMG) sensor combined with an adaptive algorithm was used to collect and analyze the swallowing activities of patients with Post-stroke dysphagia.Approach.The electrode frame, modified electrode, and bonded substrate of the sensor were fabricated using a flexible printed circuit process, controlled drop coating, and molding, respectively. The adaptation algorithm was achieved by using Laplace and Teager-Kaiser energy operators to extract active segments, a cross-correlation coefficient matrix (CCCM) to evaluate synergy, and multi-frame real-time dynamic root mean square (RMS) to visualize spatiotemporal information to screen lesions and level of dysphagia. Finally, support vector machines (SVM) were adopted to explore the classification accuracy of sex, age, and lesion location with small sample sizes.Main results.The sensor not only has a basic low contact impedance (0.262 kΩ) and high signal-to-noise ratio (37.284 ± 1.088 dB) but also achieves other characteristics suitable for clinical applications, such as flexibility (747.67 kPa) and durability (1000 times) balance, simple operation (including initial, repeated, and replacement use), and low cost ($ 15.2). The three conclusions are as follows. CCCM can be used as a criterion for judging the unbalanced muscle region of the patient's neck and can accurately locate unbalanced muscles. The RMS cloud map provides the time consumption, swallowing times, and unbalanced areas. When the lesion location involves the left and right hemispheres simultaneously, it can be used as an evidence of relatively severely unbalanced areas. The classification accuracy of SVM in terms of sex, age, and lesion location was as high as 100%.Significance.The HD-sEMG sensor in this study and the adaptation algorithm will contribute to the establishment of a larger-scale database in the future to establish more detailed and accurate quantitative standards, which will be the basis for developing more optimized screening mechanisms and rehabilitation assessment methods.

A flexible neural implant with ultrathin substrate for low-invasive brain-computer interface applications.

Implantable brain-computer interface (BCI) devices are an effective tool to decipher fundamental brain mechanisms and treat neural diseases. However, traditional neural implants with rigid or bulky cross-sections cause trauma and decrease the quality of the neuronal signal. Here, we propose a MEMS-fabricated flexible interface device for BCI applications. The microdevice with a thin film substrate can be readily reduced to submicron scale for low-invasive implantation. An elaborate silicon shuttle with an improved structure is designed to reliably implant the flexible device into brain tissue. The flexible substrate is temporarily bonded to the silicon shuttle by polyethylene glycol. On the flexible substrate, eight electrodes with different diameters are distributed evenly for local field potential and neural spike recording, both of which are modified by Pt-black to enhance the charge storage capacity and reduce the impedance. The mechanical and electrochemical characteristics of this interface were investigated in vitro. In vivo, the small cross-section of the device promises reduced trauma, and the neuronal signals can still be recorded one month after implantation, demonstrating the promise of this kind of flexible BCI device as a low-invasive tool for brain-computer communication.

Chip-scale humidity sensor based on a silicon nanobeam cavity.

In this Letter, a novel humidity sensor based on a chip-scale silicon nanobeam cavity with polymethyl methacrylate (PMMA) cladding is demonstrated. This sensor is easy to fabricate and compatible with CMOS technology. It shows a humidity sensing with a linear wavelength dependence of 22.9 pm/% relative humidity (RH) in a wide range of RH from 10% to 85%, an ultra-fast response time of 540 ms, and high stability. After annealing, the sensor exhibits high reversibility, repeatability, and temperature insensitivity at the range of 25°C-40°C. To the best of our knowledge, this is the first application of integrated photonics in high performance humidity detection. It provides a new way for the chip-scale sensor to integrate with photonic devices and optical systems.