SOI MEMS Electro-Thermal Actuators for Biomedical Applications: Operation in 0.9% NaCl Solution.

In recent years, the immense potential for MEMS devices in the biomedical industry has been understood. It has been determined that, among their many plausible functions, their use may also extend to single human red blood cell diagnostics, whereby biomarkers of quantifiable magnitudes may be detected. Without a doubt, the mechanical and thermal specifications by which potential devices must be able to function are very strict. Among them is the ability to operate while fully submerged in aqueous solutions. In this work, six devices were modelled numerically in deionised (DI) water and 0.9 wt% NaCl solution, the results of which were validated experimentally. The mechanical performance of the different devices when fully submerged in 0.9 wt% NaCl solution is hereby discussed. With the exception of one, all the devices in their current configuration are confirmed to be suitable candidates for biomedical applications.

Thermo-Mechanical Fluid-Structure Interaction Numerical Modelling and Experimental Validation of MEMS Electrothermal Actuators for Aqueous Biomedical Applications.

Recent developments in MEMS technologies have made such devices attractive for use in applications that involve precision engineering and scalability. In the biomedical industry, MEMS devices have gained popularity in recent years for use as single-cell manipulation and characterisation tools. A niche application is the mechanical characterisation of single human red blood cells, which may exhibit certain pathological conditions that impart biomarkers of quantifiable magnitude that are potentially detectable via MEMS devices. Such applications come with stringent thermal and structural specifications wherein the potential device candidates must be able to function with no exceptions. This work presents a state-of-the-art numerical modelling methodology that is capable of accurately predicting MEMS device performance in various media, including aqueous ones. The method is strongly coupled in nature, whereby thermal as well as structural degrees of freedom are transferred to and from finite element and finite volume solvers at every iteration. This method therefore provides MEMS design engineers with a reliable tool that can be used in design and development stages and helps to avoid total reliability on experimental testing. The proposed numerical model is validated via a series of physical experiments. Four MEMS electrothermal actuators with cascaded V-shaped drivers are presented. With the use of the newly proposed numerical model as well as the experimental testing, the MEMS devices' suitability for biomedical applications is confirmed.

Polyethylene wear simulation models applied to a prosthetic hip joint based on unidirectional articulations.

Ultra-high molecular weight polyethylene (UHMWPE) is commonly used as soft-bearing material in total joint replacements. However, the release of polymeric wear debris is still related to complications leading to aseptic loosening. Recently, a novel hip prosthesis showing reduced wear was developed by the authors of this study, consisting of unidirectional cylindrical articulations instead of the conventional multidirectional ball-and-socket design. This study evaluates four different theoretical wear models applied to this new design. The calculated volumetric wear was compared to experimental results. Although all models provided a good indication of the wear rates for the ball-and-socket prosthesis, they exhibited high discrepancies when predicting the amount of wear of the new unidirectional design. It was observed that the closest agreement with experimental results was obtained by the models that consider the friction-induced molecular orientation phenomenon exhibited by UHMWPE.

A novel hip joint prosthesis with uni-directional articulations for reduced wear.

A novel polymer-on-metal hip joint prosthesis design that makes use of uni-directional articulations was developed and tested in this work. The new implant was tested using two polymer variants, virgin ultra-high molecular weight polyethylene (UHMWPE), and Vitamin E-infused highly crosslinked polyethylene (VEHXPE). The degrees of freedom of the ball-and-socket are reproduced by three cylindrical orthogonally-aligned articulations. This unconventional design leverages on the molecular orientation hardening mechanisms of the polyethylene and increased contact area to minimize wear. An experimental hip joint simulator was used to compare the gravimetric wear of the conventional ball-on-socket and the new implant. The new prosthesis including UHMWPE components produced a 78% reduction in wear, whereas the new prosthesis with VEHXPE components produced a 100% reduction in wear, as no measurable wear was detected. Machining marks on the acetabular cups of the new prosthesis were retained for both polyethylene variants, further demonstrating the low levels of wear exhibited by the new implants. Both polyethylene materials produced particles in the range of 0.1-1.0 µm, which are the most biologically active. Nonetheless, the extremely low wear rates are likely to induce minimal osteolysis effects. Furthermore, the novel design also offers an increase of more than 24% in the range of motion in flexion/extension when compared to a dual-mobility hip implant. A prototype of the prosthesis was implanted into a Thiel-embalmed human cadaver during a mock-surgery, which demonstrated high resistance to dislocation and the possibility of performing a figure of four position.

Coupled Finite Element-Finite Volume Multi-Physics Analysis of MEMS Electrothermal Actuators.

Microelectromechanical systems (MEMS) are the instruments of choice for high-precision manipulation and sensing processes at the microscale. They are, therefore, a subject of interest in many leading industrial and academic research sectors owing to their superior potential in applications requiring extreme precision, as well as in their use as a scalable device. Certain applications tend to require a MEMS device to function with low operational temperatures, as well as within fully immersed conditions in various media and with different flow parameters. This study made use of a V-shaped electrothermal actuator to demonstrate a novel, state-of-the-art numerical methodology with a two-way coupled analysis. This methodology included the effects of fluid-structure interaction between the MEMS device and its surrounding fluid and may be used by MEMS design engineers and analysts at the design stages of their devices for a more robust product. Throughout this study, a thermal-electric finite element model was strongly coupled to a finite volume model to incorporate the spatially varying cooling effects of the surrounding fluid (still air) onto the V-shaped electrothermal device during steady-state operation. The methodology was compared to already established and accepted analysis methods for MEMS electrothermal actuators in still air. The maximum device temperatures for input voltages ranging from 0 V to 10 V were assessed. During the postprocessing routine of the two-way electrothermal actuator coupled analysis, a spatially-varying heat transfer coefficient was evident, the magnitude of which was orders of magnitude larger than what is typically applied to macro-objects operating in similar environmental conditions. The latter phenomenon was correlated with similar findings in the literature.

The Effects of Cold Arm Width and Metal Deposition on the Performance of a U-Beam Electrothermal MEMS Microgripper for Biomedical Applications.

Microelectromechanical systems (MEMS) have established themselves within various fields dominated by high-precision micromanipulation, with the most distinguished sectors being the microassembly, micromanufacturing and biomedical ones. This paper presents a horizontal electrothermally actuated 'hot and cold arm' microgripper design to be used for the deformability study of human red blood cells (RBCs). In this study, the width and layer composition of the cold arm are varied to investigate the effects of dimensional and material variation of the cold arm on the resulting temperature distribution, and ultimately on the achieved lateral displacement at the microgripper arm tips. The cold arm widths investigated are 14 µ m, 30 µ m, 55 µ m, 70 µ m and 100 µ m. A gold layer with a thin chromium adhesion promoter layer is deposited on the top surface of each of these cold arms to study its effect on the performance of the microgripper. The resultant ten microgripper design variants are fabricated using a commercially available MEMS fabrication technology known as a silicon-on-insulator multi-user MEMS process (SOIMUMPs)™. This process results in an overhanging 25 µ m thick single crystal silicon microgripper structure having a low aspect ratio (width:thickness) value compared to surface micromachined structures where structural thicknesses are of the order of 2 µ m. Finite element analysis was used to numerically model the microgripper structures and coupled electrothermomechanical simulations were implemented in CoventorWare ® . The numerical simulations took into account the temperature dependency of the coefficient of thermal expansion, the thermal conductivity and the electrical conductivity properties in order to achieve more reliable results. The fabricated microgrippers were actuated under atmospheric pressure and the experimental results achieved through optical microscopy studies conformed with those predicted by the numerical models. The gap opening and the temperature rise at the cell gripping zone were also compared for the different microgripper structures in this work, with the aim of identifying an optimal microgripper design for the deformability characterisation of RBCs.

Analytical, Numerical and Experimental Study of a Horizontal Electrothermal MEMS Microgripper for the Deformability Characterisation of Human Red Blood Cells.

Microgrippers are typical microelectromechanical systems (MEMS) that are widely used for micromanipulation and microassembly in both biological and micromanufacturing fields. This paper presents the design, modelling, fabrication and experimental testing of an electrothermal microgripper based on a 'hot and cold arm' actuator design that is suitable for the deformability characterisation of human red blood cells (RBCs). The analysis of the mechanical properties of human RBCs is of great interest in the field of medicine as pathological alterations in the deformability characteristics of RBCs have been linked to a number of diseases. The study of the microgripper's steady-state performance is initially carried out by the development of a lumped analytical model, followed by a numerical model established in CoventorWare® (Coventor, Inc., Cary, NC, USA) using multiphysics finite element analysis. Both analytical and numerical models are based on an electothermomechanical analysis, and take into account the internal heat generation due to the applied potential, as well as conduction heat losses through both the anchor pads and the air gap to the substrate. The models are used to investigate key factors of the actuator's performance including temperature distribution, deflection and stresses based on an elastic analysis of structures. Results show that analytical and numerical values for temperature and deflection are in good agreement. The analytical and computational models are then validated experimentally using a polysilicon microgripper fabricated by the standard surface micromachining process, PolyMUMPs™ (Durham, NC, USA). The microgripper's actuation is characterised at atmospheric pressure by optical microscopy studies. Experimental results for the deflection of the microgripper arm tips are found to be in good agreement with the analytical and numerical results, with process-induced variations and the non-linear temperature dependence of the material properties accounting for the slight discrepancies observed. The microgripper is shown to actuate to a maximum opening displacement of 9 µ m at an applied voltage of 3 V, thus being in line with the design requirement of an approximate opening of 8 µ m for securing and characterising a RBC.