Precise measurement of inner diameter of mono-capillary optic using X-ray imaging technique.

BACKGROUND: Mono-capillary optics have been applied to increase the performance of X-ray instruments. However, performance of a mono-capillary optic strongly depends on the shape accuracy, which is determined by the diameters of the inner hollow of the capillary along the axial direction. OBJECTIVE: To precisely determine the inner diameter of the capillary optic used in X-ray imaging technique, which aims to replace the conventional method using a visible microscope. METHODS: High spatial resolution X-ray images of the mono-capillary optic were obtained by a synchrotron radiation beamline. The inner diameter of the mono-capillary optic was measured and analyzed by the pixel values of the X-ray image. RESULT: Edge enhancement effect was quite useful in determining the inner diameter, and the accuracy of the diameter determination was less than 1.32 µm. Many images obtained by scanning the mono-capillary optic along the axial direction were combined, and the axial profile, consisting of diameters along the axial direction, was obtained from the combined image. The X-ray imaging method could provide an accurate measurement with slope error of±19 µrad. CONCLUSIONS: Applying X-ray imaging technique to determine the inner diameter of a mono-capillary optic can contribute to increasing fabrication accuracy of the mono-capillary optic through a feedback process between the fabrication and measurement of its diameter.

Hard x-ray telescopes to be onboard ASTRO-H.

The new Japanese x-ray astronomy satellite, ASTRO-H, will carry two identical hard x-ray telescopes (HXTs), which cover the energy range of 5 to 80 keV. The HXT mirrors employ tightly nested, conically approximated thin-foil Wolter-I optics, and the mirror surfaces are coated with Pt/C depth-graded multilayers to enhance the hard x-ray effective area by means of Bragg reflection. The HXT comprises foils 120-450 mm in diameter and 200 mm in length, with a focal length of 12 m. To obtain a large effective area, 213 aluminum foils 0.2 mm in thickness are tightly nested confocally. The requirements for HXT are a total effective area of >300 cm2 at 30 keV and an angular resolution of <1.7' in half-power diameter (HPD). Fabrication of two HXTs has been completed, and the x-ray performance of each HXT was measured at a synchrotron radiation facility, SPring-8 BL20B2 in Japan. Angular resolutions (HPD) of 1.9' and 1.8' at 30 keV were obtained for the full telescopes of HXT-1 and HXT-2, respectively. The total effective area of the two HXTs at 30 keV is 349 cm2.

Corrective finishing of extreme ultraviolet photomask blanks by precessed bonnet polisher.

The progressive transition from Excimer to extreme ultraviolet (EUV) lithography is driving a need for flatter and smoother photomask blanks. It is, however, proving difficult to meet the next-generation specification with the conventional chemical mechanical polishing technology commonly used for finishing photomask blanks. This paper reports on the application of subaperture computer numerical control precessed bonnet polishing technology to the corrective finishing of photomask substrates for EUV lithography. Full-factorial analysis was used to identify process parameters capable of delivering microroughness below 0.5 nm rms while retaining relatively high removal rates. Experimental results show that masks prepolished to 300-600 nm peak-to-valley (P-V) flatness by chemical/mechanical polishing can then be improved down to 50-100 nm P-V flatness using the automated technology described in this paper. A series of edge polishing experiments also hints at the possibility of increasing the quality area beyond the 142 mm square defined in the official EUV photomask specification.

Regular subwavelength surface structures induced by femtosecond laser pulses on stainless steel.

In this research, we studied the formation of laser-induced periodic surface structures on the stainless steel surface using femtosecond laser pulses. A 780 nm wavelength femtosecond laser, through a 0.2 mm pinhole aperture for truncating fluence distribution, was focused onto the stainless steel surface. Under different experimental condition, low-spatial-frequency laser-induced periodic surface structures with a period of 526 nm and high-spatial-frequency laser-induced periodic surface structures with a period of 310 nm were obtained. The mechanism of the formation of laser-induced periodic surface structures on the stainless steel surface is discussed.

Figure tolerance of a Wolter type I mirror for a soft-x-ray microscope.

The demand for an x-ray microscope has received much attention because of the desire to study living cells at a high resolution and in a hydrated environment. A Wolter type I mirror used for soft-x-ray microscope optics has many advantages. From the mirror fabrication point of view, it is necessary to perform tolerance analysis, particularly with respect to figure errors that considerably degrade the image quality. The figure tolerance of a Wolter type I mirror for a biological application in terms of the image quality and the state-of-the-art fabrication technology is discussed. The figure errors rapidly destroyed the image quality, and the required slope error depended on the detector used in the soft-x-ray microscope.

Wolter type I x-ray focusing mirror using multilayer coatings.

A multilayer coating is a useful addition to a mirror in the x-ray region and has been applied to normal incidence mirrors used with soft x rays. When a multilayer coating is used on grazing incidence optics, higher performance can be achieved than without it. Cr/Sc multilayers coated on a Wolter type I mirror substrate for a soft x-ray microscope are considered. The reflectivity and effective solid angle are calculated for Wolter type I mirrors with uniform and laterally graded multilayer coatings. The laterally graded multilayer mirror showed superior x-ray performance, and the multilayer tolerances were relaxed. This multilayer mirror could be especially useful in the soft x-ray microscope intended for biological applications.

Compact soft x-ray transmission microscopy with sub-50 nm spatial resolution.

In this paper, the development of compact transmission soft x-ray microscopy (XM) with sub-50 nm spatial resolution for biomedical applications is described. The compact transmission soft x-ray microscope operates at lambda = 2.88 nm (430 eV) and is based on a tabletop regenerative x-ray source in combination with a tandem ellipsoidal condenser mirror for sample illumination, an objective micro zone plate and a thinned back-illuminated charge coupled device to record an x-ray image. The new, compact x-ray microscope system requires the fabrication of proper x-ray optical devices in order to obtain high-quality images. For an application-oriented microscope, the alignment procedure is fully automated via computer control through a graphic user interface. In imaging studies using our compact XM system, a gold mesh image was obtained with 45 nm resolution at x580 magnification and 1 min exposure. Images of a biological sample (Coscinodiscus oculoides) were recorded.

Characterization of the supermirror hard-x-ray telescope for the InFOCmuS balloon experiment.

A hard-x-ray telescope is successfully produced for balloon observations by making use of depth-graded multilayers, or so-called supermirrors, with platinum-carbon (Pt/C) layer pairs. It consists of four quadrant units assembled in an optical configuration with a diameter of 40 cm and a focal length of 8 m. Each quadrant is made of 510 pieces of coaxially and confocally aligned supermirrors that significantly enhance the sensitivity in an energy range of 20-40 keV. The configuration of the telescope is similar to the x-ray telescope onboard Astro-E, but with a longer focal length. The reflectivity of supermirrors is of the order of 40% in the energy range concerned at a grazing angle of 0.2 deg. The effective area of a fully assembled telescope is 50 cm2 at 30 keV. The angular resolution is 2.37 arc min at half-power diameter 8.0 keV. The field of view is 12.6 arc min in the hard-x-ray region, depending somewhat on x-ray energies. We discuss these characteristics, taking into account the figure errors of reflectors and their optical alignment in the telescope assembly. This hard-x-ray telescope is unanimously afforded in the International Focusing Optics Collaboration for muCrab Sensitivity balloon experiment.