Design and optimization of a conical electrostatic objective lens of a low-voltage scanning electron microscope for surface imaging and analysis in ultra-high-vacuum environment.

Low-voltage scanning electron microscopy (LV-SEM) with landing energies below 5 keV has been widely used due to its advantages in mitigating the damage and charging effects to a specimen and enhancing surface information due to small interaction volume of electrons inside a specimen. Additionally, for elemental analysis of the surfaces of bulk specimens with Auger electron spectroscopy (AES) or electron energy loss spectroscopy (EELS), ultra-high-vacuum (UHV) environment is essential to maintain clean surfaces without the absorption of gas molecules during the electron beam irradiation for the acquisition of spectral data. In this study, we propose the optimal design and condition of a conical Electrostatic Objective Lens (EOL) for a UHV LV-SEM to achieve the high spatial resolution and secondary electron (SE) detection efficiency. The EOL is composed of only the three electrodes (retarding, focusing and booster electrodes) and the insulators, which is suitable for maintaining a UHV environment with less out-gassing. The cone angle of the EOL is determined as 60° to integrate a spectrometer in the UHV LV-SEM and in a large size and a higher tilt angle of the sample. Through the optimization with the simulations, the EOL achieves the minimized spherical and chromatic aberration coefficients of 0.05 and 0.03 mm at the sample side, respectively, at the landing energy of 50 eV and the shortest working distance (WD) of 1 mm for high-resolution imaging. In addition, the probe diameter of the optimized EOL is 2.3 nm at 1 keV and 5.7 nm at 50 eV with a WD of 1 mm and a probe current of 10 pA, which are comparable to previously studied compound objective lenses with magnetic and electrostatic lenses. Using a longer WD of 4 mm for analysis, the probe diameter was 5.4 nm at 1 keV and the SE detection efficiency was 83.3 % owing to the separated scintillator detector structure from the booster electrode. These results imply that the optimized EOL has the potential to be applied to a high-performance UHV LV-SEM for the surface imaging and analysis with a simple system configuration.

Exploring the Potential of a Thermionic LaB6 Virtual Source Mode Electron Gun for a High Angular Current Density and a Narrow Energy Distribution.

To date, lanthanum hexaboride (LaB6) thermionic electron sources have not been able fully to capitalize on their inherent potential, resulting in an ambiguous position within the application area. Although they exhibit higher brightness compared with a tungsten filament source, they still fall short of the performance of Schottky electron sources. This study aims to explore the capabilities of the LaB6 electron source under different operating conditions to bridge the gap, ultimately to realize its untapped potential. Simulations in virtual source mode indicated enhanced beam brightness and a reduced beam half-angle with an increase the extraction voltage, promising up to tenfold times higher beam brightness compared with the crossover mode. The energy distribution measured using a prelens retarding field energy analyzer revealed an energy distribution of 0.55 eV and a high angular current density of 33 mA/sr in the virtual source mode. Therefore, the virtual source mode of LaB6 can provide a narrow energy distribution akin to that of a ZrO/W Schottky electron gun (1600 K) while having an angular current density over 2,000 times higher. In addition, the stability of the virtual source mode is ±0.022%, while that of the crossover mode is ±0.138%.

Enhanced Scanning Electron Microscopy Using Auto-Optimized Image Restoration With Constrained Least Squares Filter for Nanoscience.

The growing demands of nanoscience require the continuous improvement of visualization methods. The imaging performance of scanning electron microscopy (SEM) is fundamentally limited by the point spread function of the electron beam and degrades because of noise. This paper proposes an auto-optimization algorithm based on deconvolution for the restoration of SEM images. This algorithm uses a constrained least squares filter and does not dependent on the user's experience or the availability of nondegraded images. The proposed algorithm improved the quality of the SEM images of 10-nm Au nanoparticles, and achieved balance among the sharpness, contrast-to-noise ratio (CNR), and image artifacts. For the SEM image of 100-nm pitched line patterns, the analysis of the spatial frequencies allowed the 2.5-fold improvement of the intensity of 4-nm information, and the noise floor decreased approximately 32 times. Along with the results obtained by the application of the proposed algorithm to images of tungsten disulfide (WS2) flakes, carbon nanotubes (CNTs), and HeLa cells, the evaluation results confirm that the proposed algorithm can enhance the SEM imaging of nanoscale features that lie close to the microscope's resolution limit.

High-Performance Compact Pre-Lens Retarding Field Energy Analyzer for Energy Distribution Measurements of an Electron Gun.

The energy distribution of an electron gun is one of the most important characteristics determining the performance of electron beam-based instruments, such as electron microscopes and electron energy loss spectroscopes. For accurate measurements of the energy distribution, this study presents a novel retarding field energy analyzer (RFEA) with the feature of an additional integrated pre-lens, which enables an adjustment of beam trajectory into the analyzer. The advantages of this analyzer are its compact size and simple electrode configuration. According to trajectory simulation theories, the optimum condition arises when the incident electron beam inside the RFEA is focused on the center of a retarding electrode. Comparing I­V curves depending on whether the pre-lens working or not, it is confirmed that the use of the pre-lens dramatically improves the energy resolution and efficiency of the signal acquisition process. The pre-lens RFEA was applied to characterize a Schottky electron gun under various temperatures and extraction voltages as operational conditions. When the tip temperature was increased by 50 K, we were able to measure an energy distribution broadening of 13.8 meV with the proposed pre-lens RFEA. The relative standard deviation of energy distribution was 0.7% for each working condition.

A Novel Monochromator with Offset Cylindrical Lenses and Its Application to a Low-Voltage Scanning Electron Microscope.

Low-voltage scanning electron microscopes (LV-SEMs) are widely used in nanoscience. However, image resolution for SEMs is restricted by chromatic aberration due to energy spread of the electron beam at low acceleration voltage. This study introduces a new monochromator (MC) with offset cylindrical lenses (CLs) as one solution for LV-SEMs. The MC optics, with highly excited CLs in offset layouts, has advantageous high performance and simple experimental setup, making it suitable for field emission LV-SEMs. In a preliminary evaluation, our MC reduced the energy spread from 770 to 67 meV. The MC was integrated into a commercial SEM equipped with an out-lens (a conventional objective lens without immersion magnetic or retarding electric fields) and an Everhart­Thornley detector. Comparing SEM images under two conditions with the MC turned on or off, the spatial resolution was improved by 58% at 0.5 and 1 keV. The filtering effect of the MC decreased the probe current with a ratio (i.e., transmittance) of 5.7%, which was consistent with estimations based on measured energy spreads. To the best of our knowledge, this is the first report on an effective MC with higher-energy resolution than 100 meV and the results offer encouraging prospects for LV-SEM technology.

High-sensitivity microvolume UV absorption spectrometry for routine analysis of small-volume biological samples.

Substantial improvement of microvolume UV absorption spectrometry in sensitivity, robustness and ease of operation was achieved for routine biological applications. A unique microtubing-based absorption cell (208 µm internal diameter) featuring enhanced light transmission with a liquid core waveguide technique provided dramatically enhanced absorption sensitivity, proportional to the extended path length (50 mm, from the typical 1 mm), while robust measurement performance was attained by implementation of preventive measures against bubble trapping along the light path. For pBR322 plasmid DNA, absorbance at 260 nm was reliably measurable down to 0.1 ng/µl with repeatability typically 2-3% RSD. The detection limit was 0.03 ng/µl dsDNA, far lower than the current state-of-the-art âˆ¼1 ng/µl. Sample consumption for each measurement was 2.4 µl. Automated operation implemented for the first time in microvolume spectrophotometry facilitated the ease in handling with small-volume biological samples.

Deep-learned spike representations and sorting via an ensemble of auto-encoders.

Spike sorting refers to the technique of detecting signals generated by single neurons from multi-neuron recordings and is a valuable tool for analyzing the relationships between individual neuronal activity patterns and specific behaviors. Since the precision of spike sorting affects all subsequent analyses, sorting accuracy is critical. Many semi-automatic to fully-automatic spike sorting algorithms have been developed. However, due to unsatisfactory classification accuracy, manual sorting is preferred by investigators despite the intensive time and labor costs. Thus, there still is a strong need for fully automatic spike sorting methods with high accuracy. Various machine learning algorithms have been developed for feature extraction but have yet to show sufficient accuracy for spike sorting. Here we describe a deep learning-based method for extracting features from spike signals using an ensemble of auto-encoders, each with a distinct architecture for distinguishing signals at different levels of resolution. By utilizing ensemble of auto-encoder ensemble, where shallow networks better represent overall signal structure and deep networks better represent signal details, extraction of high-dimensional representative features for improved spike sorting performance is achieved. The model was evaluated on publicly available simulated datasets and single-channel and 4-channel tetrode in vivo datasets. Our model not only classified single-channel spikes with varying degrees of feature similarities and signal to noise levels with higher accuracy, but also more precisely determined the number of source neurons compared to other machine learning methods. The model also demonstrated greater overall accuracy for spike sorting 4-channel tetrode recordings compared to single-channel recordings.

Study and design of a lens-type retarding field energy analyzer without a grid electrode.

A retarding field energy analyzer (RFEA) for measuring the energy distribution of charged particles offers the advantages of a simple structure and suitability for simultaneous observations of beam patterns in two dimensions. In this study, lens-based RFEAs without a grid electrode were theoretically investigated with regard to the geometry and lens condition to achieve high performance. The simulation results show that the proposed RFEA can achieve a resolution of 2.6 meV at an energy level of 500 eV. In addition, performance, which is the ratio of the resolution to the beam energy, reached 5.2×10-6. These results indicate that the RFEA designed in this study is capable of high-performance outcomes. The findings here demonstrate that the most important factors when attempting to realize a high-resolution RFEA design are to reduce the sagging effect of the electron beam through the focusing lens and ensure that V″(z) in the retarding electrode is close to zero. The design of the lens-based RFEAs is described in detail.

Fabrication of a trimer/single atom tip for gas field ion sources by means of field evaporation without tip heating.

A gas field ion source (GFIS) has many advantages that are suitable for ion microscope sources, such as high brightness and a small virtual source size, among others. In order to apply a tip-based GFIS to an ion microscope, it is better to create a trimer/single atom tip (TSAT), where the ion beam must be generated in several atoms of the tip apex. Here, unlike the conventional method which uses tip heating or a reactive gas, we show that the tip surface can be cleaned using only the field evaporation phenomenon and that the TSAT can also be fabricated using an insulating layer containing tungsten oxide, which remains after electrochemical etching. Using this method, we could get TSAT over 90% of yield.

Serial number coding and decoding by laser interference direct patterning on the original product surface for anti-counterfeiting.

Here, we investigate a method to distinguish the counterfeits by patterning multiple reflective type grating directly on the surface of the original product and analyze the serial number from its rotation angles of diffracted fringes. The micro-sized gratings were fabricated on the surface of the material at high speeds by illuminating the interference fringe generated by passing a high-energy pulse laser through the Fresnel biprism. In addition, analysis of the grating's diffraction fringes was performed using a continuous wave laser.

A new earthworm cellulase and its possible role in the innate immunity.

A new endogenous cellulase (Ean-EG) from the earthworm, Eisenia andrei and its expression pattern are demonstrated. Based on a deduced amino acid sequence, the open reading frame (ORF) of Ean-EG consisted of 1368 bps corresponding to a polypeptide of 456 amino acid residues in which is contained the conserved region specific to GHF9 that has the essential amino acid residues for enzyme activity. In multiple alignments and phylogenetic analysis, the deduced amino acid sequence of Ean- EG showed the highest sequence similarity (about 79%) to that of an annelid (Pheretima hilgendorfi) and could be clustered together with other GHF9 cellulases, indicating that Ean-EG could be categorized as a member of the GHF9 to which most animal cellulases belong. The histological expression pattern of Ean-EG mRNA using in situ hybridization revealed that the most distinct expression was observed in epithelial cells with positive hybridization signal in epidermis, chloragogen tissue cells, coelomic cell-aggregate, and even blood vessel, which could strongly support the fact that at least in the earthworm, Eisenia andrei, cellulase function must not be limited to digestive process but be possibly extended to the innate immunity.

High-harmonic generation by field enhanced femtosecond pulses in metal-sapphire nanostructure.

Plasmonic high-harmonic generation (HHG) drew attention as a means of producing coherent extreme ultraviolet (EUV) radiation by taking advantage of field enhancement occurring in metallic nanostructures. Here a metal-sapphire nanostructure is devised to provide a solid tip as the HHG emitter, replacing commonly used gaseous atoms. The fabricated solid tip is made of monocrystalline sapphire surrounded by a gold thin-film layer, and intended to produce EUV harmonics by the inter- and intra-band oscillations of electrons driven by the incident laser. The metal-sapphire nanostructure enhances the incident laser field by means of surface plasmon polaritons, triggering HHG directly from moderate femtosecond pulses of ∼0.1 TW cm-2 intensities. The measured EUV spectra exhibit odd-order harmonics up to ∼60 nm wavelengths without the plasma atomic lines typically seen when using gaseous atoms as the HHG emitter. This experimental outcome confirms that the plasmonic HHG approach is a promising way to realize coherent EUV sources for nano-scale near-field applications in spectroscopy, microscopy, lithography and atto-second physics.

Note: O-ring stack system for electron gun alignment.

We present a reliable method for aligning an electron gun which consists of an electron source and lenses by controlling a stack of rubber O-rings in a vacuum condition. The beam direction angle is precisely tilted along two axes by adjusting the height difference of a stack of O-rings. In addition, the source position is shifted in each of three orthogonal directions. We show that the tilting angle and linear shift along the x and y axes as obtained from ten stacked O-rings are ±2.55° and ±2 mm, respectively. This study can easily be adapted to charged particle gun alignment and adjustments of the flange position in a vacuum, ensuring that its results can be useful with regard to electrical insulation between flanges with slight modifications.

Observation of strongly enhanced ultrashort pulses in 3-D metallic funnel-waveguide.

For strong field enhancement of ultrashort light pulses, a 3-D metallic funnel-waveguide is analyzed using the finite-difference time-domain (FDTD) method. Then the maximum intensity enhancement actually developed by the funnel-waveguide upon the injection of femtosecond laser pulses is observed using two-photon luminescence (TPL) microscopy. In addition, the ultrafast dephasing profile of the localized field at the hot spot of the funnel-waveguide is verified through the interferometric autocorrelation of the TPL signal. Finally it is concluded the funnel-waveguide is an effective 3-D nanostructure that is capable of boosting the peak pulse intensity of stronger than 80 TWcm(-2) by an enhancement factor of 20 dB without significant degradation of the ultrafast spatiotemporal characteristics of the original pulses.

High-harmonic generation by resonant plasmon field enhancement.

High-harmonic generation by focusing a femtosecond laser onto a gas is a well-known method of producing coherent extreme-ultraviolet (EUV) light. This nonlinear conversion process requires high pulse intensities, greater than 10(13) W cm(-2), which are not directly attainable using only the output power of a femtosecond oscillator. Chirped-pulse amplification enables the pulse intensity to exceed this threshold by incorporating several regenerative and/or multi-pass amplifier cavities in tandem. Intracavity pulse amplification (designed not to reduce the pulse repetition rate) also requires a long cavity. Here we demonstrate a method of high-harmonic generation that requires no extra cavities. This is achieved by exploiting the local field enhancement induced by resonant plasmons within a metallic nanostructure consisting of bow-tie-shaped gold elements on a sapphire substrate. In our experiment, the output beam emitted from a modest femtosecond oscillator (100-kW peak power, 1.3-nJ pulse energy and 10-fs pulse duration) is directly focused onto the nanostructure with a pulse intensity of only 10(11) W cm(-2). The enhancement factor exceeds 20 dB, which is sufficient to produce EUV wavelengths down to 47 nm by injection with an argon gas jet. The method could form the basis for constructing laptop-sized EUV light sources for advanced lithography and high-resolution imaging applications.

Estimation of an examinee's ability in the web-based computerized adaptive testing program IRT-CAT.

We developed a program to estimate an examinee s ability in order to provide freely available access to a web-based computerized adaptive testing (CAT) program. We used PHP and Java Script as the program languages, PostgresSQL as the database management system on an Apache web server and Linux as the operating system. A system which allows for user input and searching within inputted items and creates tests was constructed. We performed an ability estimation on each test based on a Rasch model and 2- or 3-parametric logistic models. Our system provides an algorithm for a web-based CAT, replacing previous personal computer-based ones, and makes it possible to estimate an examinee's ability immediately at the end of test.