Coarse-Grained Modeling of EUV Patterning Process Reflecting Photochemical Reactions and Chain Conformations.

Enabling extreme ultraviolet lithography (EUVL) as a viable and efficient sub-10 nm patterning tool requires addressing the critical issue of reducing line edge roughness (LER). Stochastic effects from random and local variability in photon distribution and photochemical reactions have been considered the primary cause of LER. However, polymer chain conformation has recently attracted attention as an additional factor influencing LER, necessitating detailed computational studies with explicit chain representation and photon distribution to overcome the existing approach based on continuum models and random variables. We developed a coarse-grained molecular simulation model for an EUV patterning process to investigate the effect of chain conformation variation and stochastic effects via photon shot noise and acid diffusion on the roughness of the pattern. Our molecular simulation demonstrated that final LER is most sensitive to the variation in photon distributions, while material distributions and acid diffusion rate also impact LER; thus, the intrinsic limit of LER is expected even at extremely suppressed stochastic effects. Furthermore, we proposed and tested a novel approach to improve the roughness by controlling the initial polymer chain orientation.

Coarse-Grained Simulation of Bottlebrush: From Single-Chain Properties to Self-Assembly.

Bottlebrush polymers consist of a linear backbone with densely grafted side chains. They are known to have a range of properties of interest, such as enhanced mechanical strength and rapid self-assembly into large domains, and have attracted attention as promising candidates for applications in photonics, lithography, energy storage, organic optoelectronics, and drug delivery. Here, we present a coarse-grained model of bottlebrush polymers that is able to reproduce their experimentally observed persistence lengths and chain conformations in the melt. The model is then used to investigate the morphologies of this class of materials for various chain architectures and grafting densities.

Electrodeposition: An efficient method to fabricate self-supported electrodes for electrochemical energy conversion systems.

The development of electrocatalysts for energy conversion systems is essential for alleviating environmental problems and producing useful energy sources as alternatives to fossil fuels. Improving the catalytic performance and stability of electrocatalysts is a major challenge in the development of energy conversion systems. Moreover, understanding their electrode structure is important for enhancing the energy efficiency. Recently, binder-free self-supported electrodes have been investigated because the seamless contact between the electrocatalyst and substrate minimizes the contact resistance as well as facilitates fast charge transfer at the catalyst/substrate interface and high catalyst utilization. Electrodeposition is an effective and facile method for fabricating self-supported electrodes in aqueous solutions under mild conditions. Facile fabrication without a polymer binder and controlability of the compositional and morphological properties of the electrocatalyst make electrodeposition methods suitable for enhancing the performance of energy conversion systems. Herein, we summarize recent research on self-supported electrodes fabricated by electrodeposition for energy conversion reactions, particularly focusing on cathodic reactions of electrolyzer system such as hydrogen evolution, electrochemical CO2 reduction, and electrochemical N2 reduction reactions. The deposition conditions, morphological and compositional properties, and catalytic performance of the electrocatalyst are reviewed. Finally, the prospective directions of electrocatalyst development for energy conversion systems are discussed.

Mesoscale Simulations of Polymer Solution Self-Assembly: Selection of Model Parameters within an Implicit Solvent Approximation.

Coarse-grained modeling is an outcome of scientific endeavors to address the broad spectrum of time and length scales encountered in polymer systems. However, providing a faithful structural and dynamic characterization/description is challenging for several reasons, particularly in the selection of appropriate model parameters. By using a hybrid particle- and field-based approach with a generalized energy functional expressed in terms of density fields, we explore model parameter spaces over a broad range and map the relation between parameter values with experimentally measurable quantities, such as single-chain scaling exponent, chain density, and interfacial and surface tension. The obtained parameter map allows us to successfully reproduce experimentally observed polymer solution assembly over a wide range of concentrations and solvent qualities. The approach is further applied to simulate structure and shape evolution in emulsified block copolymer droplets where concentration and domain shape change continuously during the process.

Molecular Weight Dependent Morphological Transitions of Bottlebrush Block Copolymer Particles: Experiments and Simulations.

The molecular weights and chain rigidities of block copolymers can strongly influence their self-assembly behavior, particularly when the block copolymers are under confinement. We investigate the self-assembly of bottlebrush block copolymers (BBCPs) confined in evaporative emulsions with varying molecular weights. A series of symmetric BBCPs, where polystyrene (PS) and polylactide (PLA) side-chains are grafted onto a polynorbornene (PNB) backbone, are synthesized with varying degrees of polymerization of the PNB (NPNB) ranging from 100 to 300. Morphological transitions from onion-like concentric particles to striped ellipsoids occur as the NPNB of the BBCP increases above 200, which is also predicted from coarse-grained simulations of BBCP-containing droplets by an implicit solvent model. This transition is understood by the combined effects of (i) an elevated entropic penalty associated with bending lamella domains of large molecular weight BBCP particles and (ii) the favorable parallel alignment of the backbone chains at the free surface. Furthermore, the morphological evolutions of onion-like and ellipsoidal particles are compared. Unlike the onion-like BBCP particles, ellipsoidal BBCP particles are formed by the axial development of ring-like lamella domains on the particle surface, followed by the radial propagation into the particle center. Finally, the shape anisotropies of the ellipsoidal BBCP particles are analyzed as a function of particle size. These BBCP particles demonstrate promising potential for various applications that require tunable rheological, optical, and responsive properties.

Molecular Modeling of EUV Photoresist Revealing the Effect of Chain Conformation on Line-Edge Roughness Formation.

Extreme ultraviolet lithography (EUVL) is a leading-edge technology for pattern miniaturization and the production of advanced electronic devices. One of the current critical challenges for further scaling down the technology is reducing the line-edge roughness (LER) of the final patterns while simultaneously maintaining high resolution and sensitivity. As the target sizes of features and LER become closer to the polymer size, polymer chain conformations and their distribution should be considered to understand the primary sources of LER. Here, we proposed a new approach of EUV photoresist modeling with an explicit description of polymer chains using a coarse-grained model. Our new simulation model demonstrated that interface variation represented by width and fluctuation at the edge of the pattern could be caused by characteristic changes of the resist material during the lithography processes. We determined the effect of polymer chain conformation on LER formation and how it finally contributed to LER formation with various resist material parameters (e.g., Flory-Huggins parameter, molecular weight, protected site ratio, and Tg).